Method of fabricating complementary metal oxide silicon image sensor
View Patent ↗Provided is a method of fabricating a complementary metal oxide silicon image sensor. The method includes: applying a passivation oxide and a passivation nitride after forming a pad; selectively removing the passivation nitride in a pad region and a pixel region by a photolithography process, and performing a first cleaning process; performing a hydrogen anneal process; opening the pad by removing the passivation oxide in the pad region and performing a second cleaning process; applying a pad protective layer; performing a color filter array process, a planarization process, and a microlens process after the applying of the pad protective layer; and removing the pad protective layer in the pad region.
1. A method of fabricating a complementary metal oxide silicon (CMOS) image sensor, comprising:
forming a passivation oxide and a passivation nitride on the CMOS image sensor having a pad in a pad region thereof;
selectively removing the passivation nitride in the pad region and in a pixel region by a photolithography process to form a groove in the pixel region, and performing a first cleaning process;
performing a hydrogen anneal process;
opening the pad by removing the passivation oxide in the pad region and performing a second cleaning process;
forming a pad protective layer on the pad, the passivation nitride, and the passivation oxide, after selectively removing the passivation nitride and opening the pad, wherein the pad protective layer directly contacts the passivation oxide in the pixel region;
forming a color filter array directly on the pad protective layer in the groove in the pixel region, then forming a planarization layer and a microlens thereafter; and
removing the pad protective layer in the pad region.
2. The method according to claim 1 , wherein the first cleaning process comprises an ashing process and a solvent cleaning process.
3. The method according to claim 1 , wherein the second cleaning process comprises a first ashing process, a solvent cleaning process, and a second ashing process.
4. The method according to claim 1 , wherein the pad protective layer comprises one of a plasma enhanced tetraethyl orthosilicate (PE-TEOS) layer and a thermosetting resin layer.
5. The method according to claim 1 , wherein the pad protective layer has a thickness of 200 to 600 Å.
6. The method according to claim 4 , wherein the pad protective layer comprises the PE-TEOS layer, and removing the PE-TEOS layer comprises dry etching.
7. The method according to claim 4 , wherein the pad protective layer comprises the thermosetting resin layer, and removing the thermosetting resin layer comprises oxygen ashing.
8. A method of fabricating a complementary metal oxide silicon (CMOS) image sensor, comprising:
forming an oxide layer on the CMOS image sensor, including in a pad region, a pixel region, and a signal processor region of the image sensor;
forming a passivation nitride on the oxide layer;
selectively removing the passivation nitride in the pad region and the pixel region to form a groove in the pixel region;
performing a hydrogen anneal process after selectively removing the passivation nitride;
opening a pad by removing the oxide layer in the pad region;
forming a pad protective layer on the pad, the passivation nitride, and the passivation oxide, after selectively removing the passivation nitride and opening the pad, wherein the pad protective layer directly contacts the passivation oxide in the pixel region;
forming a color filter array directly on the pad protective layer in the groove in the pixel region, then forming a planarization layer and a microlens in the pixel region; and
removing the pad protective layer in the pad region.
9. The method according to claim 8 , further comprising a first cleaning process after selectively removing the passivation nitride.
10. The method according to claim 9 , wherein the first cleaning process comprises an ashing process and a solvent cleaning process.
11. The method according to claim 8 , further comprising a second cleaning process after removing the oxide layer in the pad region.
12. The method according to claim 11 , wherein the second cleaning process comprises a first ashing process, a solvent cleaning process, and a second ashing process.
13. The method according to claim 8 , wherein the pad protective layer comprises one of a plasma enhanced tetraethyl orthosilicate (PE-TEOS) layer and a thermosetting resin layer.
14. The method according to claim 8 , wherein the pad protective layer has a thickness of 200 to 600 Å.
15. The method according to claim 13 , wherein the pad protective layer comprises the PE-TEOS layer, and removing the PE-TEOS layer comprises dry etching.
16. The method according to claim 13 , wherein the pad protective layer comprises the thermosetting resin layer, and removing the thermosetting resin layer comprises oxygen ashing.
17. The method according to claim 8 , wherein the pad protective layer is also formed in the pixel region.
18. The method according to claim 8 , wherein the pad has a width greater than a corresponding opening in the oxide layer and nitride layer in the pad region.
19. The method according to claim 8 , wherein at least a portion of the color filter is formed on the same horizontal plane with the passivation nitride.