Substrate for growing Pendeo epitaxy and method of forming the same
View Patent ↗A Pendeo-epitaxy growth substrate and a method of manufacturing the same are provided. The Pendeo-epitaxy growth substrate includes a substrate, a plurality of pattern areas formed on the substrate in a first direction for Pendeo-epitaxy growth, and at least one solution blocking layer contacting the plurality of pattern areas and formed on the substrate in a second direction, thereby preventing contamination of a semiconductor device due to air gaps and reducing the percentage defects of the semiconductor device during a Pendeo-epitaxy growth process.
1. A Pendeo-epitaxy growth substrate comprising:
a substrate;
a plurality of pattern areas formed in a usable area on the substrate in a first direction for Pendeo-epitaxy growth; and
at least one solution blocking layer contacting the plurality of pattern areas and formed on the substrate in a second direction,
wherein the solution blocking layer contacts the pattern areas only at an edge of the usable area adjacent an unusable area.
2. The Pendeo-epitaxy growth substrate of claim 1 , wherein the first direction and the second direction are orthogonal to each other.
3. The Pendeo-epitaxy growth substrate of claim 1 , wherein the substrate is formed of sapphire, silicon carbide, silicon, or ZnO.
4. The Pendeo-epitaxy growth substrate of claim 1 , wherein the pattern areas and the solution blocking layer are formed of Group III nitrides.
5. The Pendeo-epitaxy growth substrate of claim 1 , wherein the first direction is a direction <1-100>, and the second direction is a direction <11-20>.
6. The Pendeo-epitaxy growth substrate of claim 1 , wherein the solution blocking layer contacts ends of the pattern areas.
7. A method of forming a Pendeo-epitaxy growth substrate, the method comprising:
coating Group III nitrides on a substrate and forming a nitride layer;
disposing a mask having openings corresponding to a plurality of pattern areas formed in a usable area on the substrate in a first direction for Pendeo-epitaxy growth and at least one solution blocking layer contacting the plurality of pattern areas and formed on the substrate in a second direction on the nitride layer; and
patterning the nitride layer excluding the pattern areas and the solution blocking layer and removing the etched nitride layer,
wherein the solution blocking layer contacts the pattern areas only at an edge of the usable area adjacent an unusable area.
8. The method of claim 7 , wherein the first direction and the second direction are orthogonal to each other.
9. The method of claim 7 , wherein the substrate is formed of sapphire, silicon carbide, silicon, or ZnO.
10. The method of claim 7 , wherein the Group III nitrides are GaN, AlGaN, InGaN, or AlInGaN.
11. The method of claim 7 , wherein the solution blocking layer contacts the ends of the pattern areas.
12. The method of claim 4 , wherein the group Group III nitrides are GaN, AlGaN, InGaN, or AlInGaN.