GMR angle sensor for vehicles
A GMR angle sensor for vehicles includes a GMR element in which the element resistance is changed in response to an external magnetic field, lead conductors connected to either end of the GMR element, and a protective layer that seals the GMR element and the lead conductors, wherein the protective layer has a laminated structure including an oxidation-resistant inorganic film that ensures that the GMR element and the lead conductors are sufficiently insulated and a silicone-based organic film laminated on the inorganic film.
1. A GMR angle sensor for vehicles comprising:
a giant magnetoresistive element in which the element resistance is changed in response to an external magnetic field;
lead conductors connected to the giant magnetoresistive element; and
a protective layer that seals the giant magnetoresistive element and the lead conductors, wherein the protective layer has a laminated structure including:
an inorganic film provided on the giant magnetoresistive element and the lead conductors, which ensures that the giant magnetoresistive element and the lead conductors are sufficiently insulated; and
a silicone-based organic film provided on the inorganic film, and wherein the inorganic film comprises a silica (SiO 2 ) film and an oxidation-preventing film laminated on the lower surface of the silica film, the oxidation-preventing film being an alumina (Al 2 O 3 ) film having a thickness smaller than a thickness of the silica film.
2. The GMR angle sensor for vehicles according to claim 1 , wherein the organic film comprises a silicone-based photosensitive resin that can be cured at 200° C. to 250° C.
3. The GMR angle sensor for vehicles according to claim 1 , wherein the organic film has a thickness of at least 5 μm.
4. The GMR angle sensor for vehicles according to claim 1 , wherein the organic film is formed by patterning using photolithography.
5. The GMR angle sensor for vehicles according to claim 1 , wherein the thickness of the silica film is 3,000Å or more and 4,000Å or less.
6. A GMR angle sensor for vehicles, comprising:
a giant magnetoresistive element formed on a substrate, a resistance of the giant magnetoresistive element being changed in response to an external magnetic field;
lead conductors formed on the substrate, the lead conductors connected to the giant magnetoresistive element; and
a protective layer formed on the giant magnetoresistive element and the lead conductors, the protective layer sealing the giant magnetoresistive element and at least part of the lead conductors,
wherein the protective layer has a laminated structure comprising:
an inorganic film provided on the giant magnetoresistive element and the lead conductors; and
a silicone-based organic film provided on the inorganic film, and wherein the inorganic film comprises:
an oxidation-preventing film formed on the giant magnetoresistive element and the lead conductors, and
a silica (SiO 2 ) film laminated over the oxidation-preventing film.
7. The GMR angle sensor for vehicles according to claim 6 , wherein the organic film comprises a silicone-based photosensitive resin that can be cured at 200° C. to 250° C.
8. The GMR angle sensor for vehicles according to claim 6 , wherein the organic film has a thickness of at least 5 μm.
9. The GMR angle sensor for vehicles according to claim 6 , wherein the organic film is formed by patterning using photolithography.
10. The GMR angle sensor for vehicles according to claim 6 , wherein the oxidation-preventing film is an alumina (Al 2 O 3 ) film.
11. The GMR angle sensor for vehicles according to claim 6 , wherein the oxidation-preventing film has a thickness smaller than a thickness of the silica film.
12. The GMR angle sensor for vehicles according to claim 6 , wherein the substrate includes an insulation layer formed thereon below the giant magnetoresistive element and the lead conductors.