IP Library Granted Patent US 9,111,985
Granted Patent B1
US 9,111,985 · App. 11/652,785 · Granted Aug 18, 2015

Shallow bipolar junction transistor

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Quick Facts
Patent No.
US 9,111,985
App. No.
11/652,785
Granted
Aug 18, 2015
Kind
B1
Abstract

A shallow bipolar junction transistor comprising a high voltage n+ well implanted into a semiconductor substrate. The shallow bipolar junction transistor further comprises a bit line n+ implant (BNI) above the high voltage n+ well and an oxide nitride (ONO) layer above the high voltage n+ well. A portion of the ONO layer isolates the BNI from a shallow trench isolation (STI) region.

Claims (13)

1. A shallow bipolar junction transistor comprising:

a high voltage n+ well implanted into a semiconductor substrate;

an oxide nitride oxide (ONO) layer, an n+ collector, and a bit line residual oxide removal (BLROE)/spacer over etch (SPXOE) layer above said high voltage n+ well;

a bit line n+ implant (BNI) above said high voltage n+ well, wherein a portion of said ONO layer is formed around a portion of said BNI;

a plurality of emitters in a central region of the transistor, a base laterally separated from the plurality of emitters, and an n+ core implant surrounding the plurality of emitters to isolate the base and the plurality of emitters, wherein the n+ core implant defines a difference between said base and an emitter;

a high voltage gate oxide (HVGOX) above said n+ collector and around said base; and

a p+ source/drain implant (PP) layer around said base.

2. The shallow bipolar junction transistor of claim 1 wherein said oxide nitride oxide (ONO) layer is at a periphery area of said BNI.

3. The shallow bipolar junction transistor of claim 1 further comprising a shallow trench isolation (STI) region proximate to said ONO layer.

4. The shallow bipolar junction transistor of claim 1 wherein said bit line n+ implant is at a periphery area of said plurality of emitters.

5. The shallow bipolar junction transistor of claim 4 further comprising an n+ implant for isolating a base and emitters of said shallow bipolar junction transistor.

6. The shallow bipolar junction transistor of claim 1 further comprising an emitter wherein a portion of said emitter is operable to operate as a contact.

7. The shallow bipolar junction transistor of claim 6 wherein said portion of said emitter is operable to operate as a contact without a cobalt silicide (CoSi) layer.

Assignments (7)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 15, 2022
From: CYPRESS SEMICONDUCTOR CORPORATION
To: INFINEON TECHNOLOGIES LLC
Reel/Frame 059721/0467 →
RELEASE OF SECURITY INTEREST Recorded Mar 16, 2022
From: MUFG UNION BANK, N.A.
To: CYPRESS SEMICONDUCTOR CORPORATION; SPANSION LLC
Reel/Frame 059410/0438 →
CORRECTIVE ASSIGNMENT TO CORRECT THE 8647899 PREVIOUSLY RECORDED ON REEL 035240 FRAME 0429. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY INTERST. Recorded Nov 3, 2020
From: CYPRESS SEMICONDUCTOR CORPORATION; SPANSION LLC
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 058002/0470 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN INTELLECTUAL PROPERTY Recorded Oct 28, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: MUFG UNION BANK, N.A.
Reel/Frame 050896/0366 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 11, 2015
From: SPANSION LLC
To: CYPRESS SEMICONDUCTOR CORPORATION
Reel/Frame 035890/0678 →
SECURITY INTEREST Recorded Mar 21, 2015
From: CYPRESS SEMICONDUCTOR CORPORATION; SPANSION LLC
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 035240/0429 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 11, 2007
From: ROY, ALOK NANDINI; KATHAWALA, GULZAR; PATEL, ZUBIN; SHIRAIWA, HIDEHIKO
To: SPANSION LLC.
Reel/Frame 018805/0137 →