Silicon carbide single crystal wafer and method for manufacturing the same
View Patent ↗The invention provides a method for manufacturing the silicon carbide single crystal wafer capable of improving the utilization ratio of the bulk silicon carbide single crystal, capable of improving characteristics of the element and capable of improving cleavability, and the silicon carbide single crystal wafer obtained by the manufacturing method. An α(hexagonal)-silicon carbide single crystal wafer which has a flat homoepitaxial growth surface with a surface roughness of 2 nm or less and which has an off-angle from the (0001)c plane of 0.4° or less.
1. A method for manufacturing a silicon carbide single crystal wafer comprising:
cutting a wafer from an α(hexagonal)-silicon carbide single crystal in an off-direction displaced by 2.5° or less from the <11-20> direction of the silicon carbide single crystal at an off-angle from the (0001)c plane of the silicon carbide single crystal of 0.4° or less;
disposing the wafer in a reaction vessel;
feeding a silicon source gas and carbon source gas in the reaction vessel; and
reacting the silicon source gas and carbon source gas to epitaxially grow the α(hexagonal) silicon carbide single crystal on the wafer.
2. The method for manufacturing the silicon carbide single crystal wafer according to claim 1 , wherein the off-angle of the wafer cut from the silicon carbide single crystal is in the range from 0.1 to 0.4°.
3. The method for manufacturing the silicon carbide single crystal wafer according to claim 1 , wherein the surface of the wafer cut from the silicon carbide single crystal is subjected to a surface treatment before epitaxial growth so that the surface does not contain damages by machining.
4. The method for manufacturing the silicon carbide single crystal wafer according to claim 1 , wherein the feed ratio (C/Si) of the carbon source gas (C) to the silicon source gas (Si) is 1.5 or less.
5. The method for manufacturing a silicon carbide single crystal wafer according to claim 1 by reacting the carbon source gas and silicon source gas at a temperature range from 1550 to 1700° C.
6. The method for manufacturing a silicon carbide single crystal wafer according to claim 1 , wherein the off-angle is increased from 0° in an approximately fan-like manner from one end portion to the other end portion of the wafer to restrict a region with an off-angle of less than 0.1° to a range around the one end portion of the wafer.