Split game memory cell method
View Patent ↗A multi-bit split-gate memory device is formed over a substrate. A storage layer is formed over the substrate. A first conductive layer is formed over the storage layer. A thickness of a portion of the conductive layer is removed to leave a pillar of the conductive layer and an area of reduced thickness of the conductive layer. A first sidewall spacer is formed adjacent to the pillar to cover a first portion and a second portion of the area of reduced thickness of the conductive layer. The pillar is replaced with a select gate. The area of reduced thickness is selectively removed to leave the first and second portions as control gates.
1. A method for forming a split-gate memory cell using a semiconductor substrate, comprising:
forming a storage layer over the substrate;
forming a first conductive layer over the storage layer;
reducing a thickness of a portion of the conductive layer to leave a pillar of the conductive layer and an area of reduced thickness of the conductive layer;
forming a first sidewall spacer adjacent to the pillar to cover a first portion and a second portion of the area of reduced thickness of the conductive layer;
replacing the pillar with a select gate; and
selectively removing the area of reduced thickness to leave the first and second portions as control gates.
2. The method of claim 1 , wherein the step of replacing further comprises forming a gate dielectric under the select gate before formation of the select gate.
3. The method of claim 1 , further comprising replacing the first sidewall spacer with a second sidewall spacer.
4. The method of claim 3 wherein the step of replacing the first sidewall spacer with a second sidewall spacer further comprises forming an insulating layer over the area of reduced thickness before forming the second sidewall spacer.
5. The method of claim 1 , wherein the step of forming the first conductive layer is further characterized by the conductive layer comprising doped polysilicon.
6. The method of claim 5 , wherein the step of forming the first sidewall spacer is further characterized by the first sidewall spacer comprising nitride.
7. The method of claim 1 , further comprising forming source/drain regions in the substrate spaced laterally from the select gate.
8. The method of claim 7 , wherein the step of forming a charge storage layer is further characterized by the charge storage layer comprising nanocrystals.
9. The method of claim 8 , wherein the step of selectively removing is further characterized by an area in the charge storage layer directly under the first portion for defining a logic state of a first bit and an area in the charge storage layer directly under the second portion for defining a logic state of a second bit.
10. The method of claim 1 , further comprising forming a nitride layer over the first conductive layer prior to the step of reducing the thickness.
11. A method for forming a split-gate memory cell using a semiconductor substrate, comprising:
forming a storage layer over the substrate;
forming a first polysilicon layer having a thickness over the storage layer;
forming a nitride layer over the polysilicon layer;
forming a masking layer having a pattern over the nitride layer;
etching through the nitride layer according to the pattern;
etching a portion of the polysilicon layer according to the pattern to leave a pillar of polysilicon under the masking layer and an area of reduced thickness of polysilicon surrounding the pillar;
forming a first nitride sidewall spacer around the pillar to cover a portion of the area of reduced thickness and leaving an exposed portion of the area of reduced thickness;
growing polysilicon over the exposed portion of the area of reduced thickness to form an area of enhanced thickness of polysilicon;
oxidizing a top portion of the area of enhanced thickness of polysilicon to form a top oxide layer;
removing the pillar to form an opening;
replacing the first nitride sidewall spacer with a second nitride sidewall spacer;
depositing a second polysilicon layer in the opening, over the second nitride sidewall spacer, and over the top oxide layer;
etching back the second polysilicon layer to leave a polysilicon portion in the opening;
removing the top oxide layer;
while using the second nitride sidewall spacer as a mask, removing the area of enhanced thickness of polysilicon and the charge storage layer to leave a polysilicon remnant under the second sidewall spacer; and
forming source/drains in the substrate spaced from the polysilicon portion in the opening.
12. The method of claim 11 , wherein the step of forming the first polysilicon layer is further characterized by the first polysilicon layer being doped.
13. The method of claim 11 , wherein the step of forming the storage layer over the substrate is further characterized by the charge storage layer comprising nanocrystals.
14. A method of claim 11 , wherein the step of removing the area of enhanced thickness of polysilicon is further characterized by the remnant having a first portion as a first control gate and a second portion as a second control gate.
15. The method of claim 14 , wherein the step of removing the area of enhanced thickness of polysilicon is further characterized by a first portion of the charge storage layer under the first control gate for defining a logic state of a first bit and a second portion of the charge storage layer under the second control gate for defining a logic of a second bit.
16. A method for forming a split-gate memory cell using a semiconductor substrate, comprising:
forming a storage layer over the substrate;
forming a first conductive layer over the storage layer;
reducing a thickness of a portion of the conductive layer to leave a pillar of the conductive layer and an area of reduced thickness of the conductive layer;
forming a first sidewall spacer adjacent to the pillar to cover a first portion and a second portion of the area of reduced thickness of the conductive layer;
forming an insulating layer over the area of reduced thickness;
while using the insulating layer as a mask, replacing the pillar with a select gate;
removing the insulating layer; and
selectively removing the area of reduced thickness to leave the first and second portions as control gates.
17. The method of claim 16 , wherein the step of forming an insulating layer over the area of reduced thickness comprises:
growing a polysilicon layer over the area of reduced thickness; and
performing an oxidation step on the polysilicon layer.
18. The method of claim 17 further comprising:
forming a nitride layer over the conductive layer; and
selectively etching the nitride layer to leave a portion of the nitride layer over the pillar prior to the step of reducing the thickness.
19. The method of claim 18 , wherein the step of growing the polysilicon layer is further characterized as using the portion of the nitride layer as a mask.
20. The method of claim 16 wherein the step of forming the storage layer is further characterized as comprising nanocrystals, further comprising forming source/drains in the substrate laterally spaced from the select gate.