IP Library Granted Patent US 7,590,968
Granted Patent B1
US 7,590,968 · App. 11/680,552 · Granted Sep 15, 2009

Methods for risk-informed chip layout generation

View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 7,590,968
App. No.
11/680,552
Granted
Sep 15, 2009
Kind
B1
Abstract

A chip layout is generated based on a quantified fabrication process capability. A minimum required value is selected for a fabrication process capability factor associated with a fabrication process to be performed on a layer sub-region within the chip. Design rules are determined for the layer sub-region within the chip that will enable the selected minimum required value for the fabrication process capability factor associated with the layer sub-region to be satisfied. A layout is then generated for the layer sub-region within the chip using the determined design rules associated with the layer sub-region. Fabrication process capability can be improved by restricting the design rules and generated layouts to a linear design style that requires features defined within the chip to be linear in shape and without bends. The linear design style enables optimization of photolithographic rendering without the need to consider two-dimensional optical effects.

Claims (18)

1. A method for generating a chip layout based on fabrication process capability, comprising:

selecting a minimum required value for a fabrication process capability factor associated with a fabrication process to be performed on a layer sub-region within a chip based on a balance between yield loss of the chip and size of the chip,

wherein the fabrication process is characterized by a measurable parameter, the measurable parameter having an associated distribution representing a frequency of occurrence of values of the parameter, the distribution being defined by a mean and a standard deviation, and

wherein the fabrication process capability factor represents a minimum fraction of a number of standard deviations that is between the mean of the parameter distribution and either a lower specification limit or an upper specification limit for the fabrication process;

determining design rules for the layer sub-region within the chip that will enable the selected minimum required value for the fabrication process capability factor associated with the layer sub-region to be satisfied;

generating a layout for the layer sub-region within the chip using the determined design rules associated with the layer sub-region; and recording the generated layout on a computer readable storage medium.

2. A method for generating a chip layout based on fabrication process capability as recited in claim 1 , further comprising:

selecting a value for the number of standard deviations; and

computing the fabrication process capability factor based on the selected value for the number of standard deviations, wherein a larger selected value for the number of standard deviations causes the determined design rules to be more restrictive.

3. A method for generating a chip layout based on fabrication process capability as recited in claim 1 , wherein the design rules for the layer sub-region are determined to constrain the fabrication process such that the parameter distribution corresponding to the constrained fabrication process enables the selected minimum required value for the fabrication process capability factor to be satisfied.

4. A method for generating a chip layout based on fabrication process capability as recited in claim 1 , further comprising:

determining a fabrication process capability factor associated with application of the determined design rules to the fabrication process; and

verifying that the selected minimum required value for the fabrication process capability factor is less than the determined fabrication process capability factor associated with application of the determined design rules to the fabrication process.

5. A method for generating a chip layout based on fabrication process capability as recited in claim 1 , wherein the generated layout for the layer sub-region and the determined design rules associated with the layer sub-region correspond to a linear design style.

6. A method for generating a chip layout based on fabrication process capability as recited in claim 5 , wherein the linear design style requires each feature in each layer sub-region within the chip to be linear in shape and positioned in a parallel orientation with respect to adjacent features within the same layer sub-region.

7. A method for generating a chip layout based on fabrication process capability as recited in claim 6 , wherein the features that are linear in shape extend in one direction without bending, the one direction being defined within a plane coincident with a layer of the chip.

8. A method for generating a chip layout based on fabrication process capability as recited in claim 6 , wherein a fixed separation distance is maintained between adjacent features within a given layer sub-region within the chip.

9. A method for generating a chip layout based on fabrication process capability as recited in claim 8 , wherein the fixed separation distance is defined to optimize photolithographic rendering of the features within the given layer sub-region.

Assignments (3)
PATENT SECURITY AGREEMENT Recorded Apr 21, 2023
From: RPX CORPORATION
To: BARINGS FINANCE LLC, AS COLLATERAL AGENT
Reel/Frame 063424/0569 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 7, 2021
From: TELA INNOVATIONS, INC.
To: RPX CORPORATION
Reel/Frame 056602/0001 →
RELEASE OF SECURITY INTEREST Recorded Apr 12, 2021
From: VENTURE LENDING & LEASING IV, INC./VENTURE LENDING & LEASING V, INC.
To: TELA INNOVATIONS, INC.
Reel/Frame 055899/0604 →