IP Library Granted Patent US 7,388,942
Granted Patent B2
US 7,388,942 · App. 11/682,503 · Granted Jun 17, 2008

X-ray micro-tomography system optimized for high resolution, throughput, image quality

Assignee: Xradia, Inc.
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Quick Facts
Patent No.
US 7,388,942
App. No.
11/682,503
Granted
Jun 17, 2008
Kind
B2
Abstract

A projection x-ray imaging system that possibly utilizes a laboratory-based micro-focused x-ray source is disclosed. Techniques for optimizing the system for high quality, three dimensional image formation with tomographic imaging with the potential for high resolution and high throughput are described. It also concerns ways to optimize the system design to obtain improved image quality.

Claims (14)

1. A method to acquire tomographic data, comprising:

acquiring a first set of tomographic projections with at a first source-to-sample distance; and

acquiring a second set of tomographic projections at a second source-sample distance, which is longer than the first source-to-sample distance, wherein sample tilt angles in the second set of tomographic projections are larger than sample tilt angles in the first set of tomographic projections.

2. A method as claimed in claim 1 , wherein step of acquiring the first set of tomographic projections comprises orienting the sample at a tilt angle of θ<60 degrees at the first source-to-sample distance, in which a distance between the sample and the x-ray source is less than 10 millimeters.

3. A method as claimed in claim 1 , wherein step of acquiring the first set of tomographic projections comprises orienting the sample at a tilt angle of θ<60 degrees at the first source-to-sample distance, in which a distance between the sample and the x-ray source is less than 2 millimeters.

4. A method as claimed in claim 1 , wherein step of acquiring the first set of tomographic projections comprises orienting the sample at a tilt angle of θ<60 degrees at the first source-to-sample distance, in which a distance between the sample and the x-ray source is less than 1 millimeter.

5. A method as claimed in claim 1 , wherein step of acquiring the second set of tomographic projections comprises orienting the sample at a tilt angle of θ>30 degrees at the second source-to-sample distance, in which a distance between the sample and the x-ray source is between 10 and 50 millimeters.

6. A method to acquire tomographic data of a sample, comprising:

acquiring a first set of tomographic projections of the sample using an x ray beam at a first source-to-sample distance; and

acquiring a second set of tomographic projections of the sample at a second source-to-sample distance, wherein the second source-to-sample distance is greater than the first source-to-sample distance and tilt angles of the sample relative to the x-ray beam are greater in the second set of tomographic projections than tilt angles in the first set of tomographic projections.

7. A method as claimed in claim 6 , wherein step of acquiring the first set of projections comprises acquiring projections at tilt angles of θ<60 degrees with a distance between the sample and the x ray source of less than 10 millimeters.

8. A method as claimed in claim 6 , wherein step of acquiring the first set of projections comprises acquiring projections at tilt angles of θ<60 degrees with a distance between the sample and the x ray source of less than 2 millimeters.

9. A method as claimed in claim 6 , wherein step of acquiring the first set of projections comprises acquiring projections at tilt angles of θ<60 degrees with a distance between the sample and the x ray source of about 1 millimeter or less.

10. A method as claimed in claim 7 , wherein step of acquiring the second set of projections comprises acquiring projections at tilt angles of θ<30 degrees with a distance between the sample and the x ray source of between 10 and 50 millimeters.

Assignments (1)
MERGER Recorded Jan 10, 2014
From: XRADIA, INC.
To: CARL ZEISS X-RAY MICROSCOPY, INC.
Reel/Frame 031938/0108 →
Continuity (3)
Division 1107263500 · Mar 4, 2005
Provisional Application 6055075800 · Mar 5, 2004
Related Publication 20070147583A1 · Jun 28, 2007