Semiconductor device manufacturing apparatus and semiconductor device manufacturing method
View Patent ↗A semiconductor device manufacturing apparatus which uses a thermal CVD reaction to deposit a film onto a substrate has a ring with an electrode terminal that makes contact with either the substrate or the deposited film thereon, a power supply that applies a current or a potential to this electrode terminal of the ring, and a piston cylinder mechanism for moving the ring up and down, so as to cause its electrode terminal to make and break contact with the substrate or deposited film thereon.
1. A semiconductor device manufacturing method for depositing a film on a substrate by a thermal CVD reaction, wherein a raw material is vaporized to form a vapor phase deposition material, and said film is deposited on said substrate while a d.c. electrical potential is applied across said substrate or film deposited thereupon, thereby orienting precursor molecules of said vapor phase material in the direction of the electrical field induced by said d.c. electrical potential.
2. A semiconductor device manufacturing method according to claim 1 , wherein said film is deposited while the d.c. electrical potential on said substrate or film deposited thereupon is arbitrarily set.
3. A semiconductor device manufacturing method according to claim 1 , wherein said film is deposited while the d.c. electric potential is applied to said substrate or said film deposited thereupon, intermittently.
4. A semiconductor device manufacturing method according to claim 1 , wherein said film is deposited while said d.c. electrical potential is varied either intermittently or continuously.
5. A semiconductor device manufacturing method according to claim 1 , wherein said film is deposited while a direction of said d.c. electrical potential applied to said substrate or said film deposited thereupon, is changed, either intermittently or continuously.
6. A semiconductor device manufacturing method according to claim 1 , wherein said film is deposited while a temperature of said substrate or of said film deposited thereupon, is varied.
7. A semiconductor device manufacturing method according to claim 1 , wherein either one of a voltage value or a potential value is varied either intermittently or continuously.
8. A semiconductor device manufacturing method according to claim 1 , wherein said film is deposited while setting the potential of said substrate or film deposited thereupon to a ground potential.
9. A semiconductor device manufacturing method that uses a thermal CVD reaction to deposit a film onto a substrate, said method comprising:
vaporizing a raw material to form a vapor phase deposition material; and
depositing a film by using a thermal CVD reaction by applying a d.c. electrical potential across either one of said substrate and said film deposited thereon, thereby orienting precursor molecules of said vapor phase material in the direction of the electrical field induced by said d.c. electrical potential.