Method for manufacturing actuator device and liquid ejecting head including actuator device prepared by the method
A method is provided for manufacturing an actuator device including a substrate, a vibration plate, lower electrode, and a piezoelectric element having a piezoelectric layer, and an upper electrode. The vibration plate is formed by forming an insulating film comprised of a columnar crystalline zirconium layer whose surface has an average crystal grain size of about 20 to 50 nm on one surface the substrate, and then thermally oxidizing the zirconium layer into a columnar crystalline zirconium oxide layer whose surface has an average crystal grain size of about 20 to 50 nm. The zirconium layer shows an XRD pattern having a (002) plane peak with an FWHM of 0.4 or less. The piezoelectric element is formed on the lower electrode.
1. A method for manufacturing an actuator device including a substrate, a vibration plate, and a piezoelectric element, respectively placed in a stacked manner, the method comprising:
forming the vibration plate, wherein the steps for forming the vibration plate include:
forming a silicon oxide elastic film on the surface of the substrate;
forming a columnar crystalline zirconium layer on the silicon oxide elastic film with an average crystal grain size of about 20 to 50 nm which shows an XRD pattern having a (002) plane peak with an FWHM of 0.4 degrees or less using a DC sputtering method performed at a temperature between room temperature and 100° C. at a pressure of between 0.3 to 1 Pa at a power density of between 1 to 20 kW/m 2 ; and
thermally oxidizing the columnar crystalline zirconium layer in a diffusion furnace heated to between 600 to 1000° C. at a speed of 300 mm/min or more such that the columnar crystalline zirconium layer is oriented in the (−111) plane; and
forming the piezoelectric element on the vibration plate, including a lower electrode formed on the columnar crystalline zirconium layer, a piezoelectric layer of lead titanate zirconate formed on the lower electrode, and an upper electrode formed on the piezoelectric layer.