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App. No. 11/693,302 · Confirmation No. 9051

Use Of Hypofluorites, Fluoroperoxides, And/Or Fluorotrioxides As Oxidizing Agent In Fluorocarbon Etch Plasmas

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2009-11-09 CTNF Non-Final Rejection 7 View
2009-11-09 892 List of references cited by examiner 1 View
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2007-09-27 NTC.PUB Notice of Publication 1 View
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2007-06-07 LET. Miscellaneous Incoming Letter 3 View
2007-06-07 DRW Drawings-only black and white line drawings 6 View
2007-06-07 SCORE Placeholder sheet indicating presence of supplemental content in Supplemental Complex Repository for Examiners(SCORE) 1 View
2007-04-09 APP.FILE.REC Filing Receipt 3 View
2007-04-09 PEFN Pre-Exam Formalities Notice 2 View
2007-03-29 ADS Application Data Sheet 6 View
2007-03-29 SPEC Specification 17 View
2007-03-29 CLM Claims 4 View
2007-03-29 ABST Abstract 1 View
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2007-03-29 FOR Foreign Reference 14 View
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2007-03-29 FOR Foreign Reference 2 View
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2007-03-29 N417 Electronic Filing System Acknowledgment Receipt 4 View
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Quick Facts
App. No.
11/693,302
Filed
2007-03-29
Pub. No.
US20070224829A1
Art Unit
1716