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App. No. 10/619,922 · Confirmation No. 7155

USE OF HYPOFLUORITES, FLUOROPEROXIDES, AND/OR FLUOROTRIOXIDES AS OXIDIZING AGENT IN FLUOROCARBON ETCH PLASMAS

Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2008-09-17 ABN Abandonment 2 View
2008-01-24 CTFR Final Rejection 11 View
2008-01-24 892 List of references cited by examiner 1 View
2008-01-24 FOR Foreign Reference 12 View
2008-01-24 FOR Foreign Reference 13 View
2008-01-24 SRFW Search information including classification, databases and other search related notes 1 View
2007-11-20 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2007-11-20 REM Applicant Arguments/Remarks Made in an Amendment 8 View
2007-11-20 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-08-21 CTNF Non-Final Rejection 9 View
2007-08-21 1449 List of References cited by applicant and considered by examiner 2 View
2007-08-21 892 List of references cited by examiner 1 View
2007-08-21 CLM Claims 3 View
2007-08-21 FWCLM Index of Claims 1 View
2007-08-21 SRFW Search information including classification, databases and other search related notes 1 View
2007-08-11 SRNT Examiner's search strategy and results 2 View
2007-08-02 AMSB Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) 1 View
2007-08-02 CLM Claims 3 View
2007-08-02 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2007-08-02 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-08-02 WFEE Fee Worksheet (SB06) 1 View
2007-08-02 FWCLM Index of Claims 1 View
2007-07-31 PET.DEC.TC Petition decision routed to the Technology Center to act on the decision or continue prosecution 1 View
2007-07-27 PETWDISS Petition to Withdraw from Issue 3 View
2007-07-27 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2007-07-27 WFEE Fee Worksheet (SB06) 2 View
2007-07-27 N417 Electronic Filing System Acknowledgment Receipt 2 View
2007-07-27 RCEX Request for Continued Examination (RCE) 3 View
2007-06-07 IFEE Issue Fee Payment (PTO-85B) 1 View
2007-03-12 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2007-03-12 NOA Notice of Allowance and Fees Due (PTOL-85) 3 View
2007-03-12 1449 List of References cited by applicant and considered by examiner 2 View
2007-03-12 IIFW Issue Information including classification, examiner, name, claim, renumbering, etc. 1 View
2007-03-12 FWCLM Index of Claims 1 View
2007-03-12 SRFW Search information including classification, databases and other search related notes 1 View
2007-02-28 SRNT Examiner's search strategy and results 3 View
2007-02-08 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2007-02-08 CLM Claims 3 View
2007-02-08 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2007-02-08 XT/ Extension of Time 1 View
2007-02-08 WFEE Fee Worksheet (SB06) 1 View
2007-02-08 WFEE Fee Worksheet (SB06) 1 View
2006-09-06 CTNF Non-Final Rejection 10 View
2006-09-06 892 List of references cited by examiner 1 View
2006-09-06 FOR Foreign Reference 4 View
2006-09-06 FWCLM Index of Claims 1 View
2006-09-06 SRFW Search information including classification, databases and other search related notes 1 View
2006-08-16 SRNT Examiner's search strategy and results 3 View
2006-08-03 A.NE Response After Final Action 1 View
2006-08-03 CLM Claims 3 View
2006-08-03 REM Applicant Arguments/Remarks Made in an Amendment 3 View
2006-08-03 XT/ Extension of Time 1 View
2006-08-03 WFEE Fee Worksheet (SB06) 1 View
2006-03-13 CTFR Final Rejection 11 View
2006-03-13 FWCLM Index of Claims 1 View
2006-03-13 SRFW Search information including classification, databases and other search related notes 1 View
2006-02-24 SRNT Examiner's search strategy and results 1 View
2005-12-27 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2005-12-27 CLM Claims 3 View
2005-12-27 REM Applicant Arguments/Remarks Made in an Amendment 7 View
2005-12-27 XT/ Extension of Time 1 View
2005-12-27 WFEE Fee Worksheet (SB06) 1 View
2005-07-27 CTNF Non-Final Rejection 10 View
2005-07-27 1449 List of References cited by applicant and considered by examiner 3 View
2005-07-27 892 List of references cited by examiner 1 View
2005-07-27 FWCLM Index of Claims 1 View
2005-07-27 SRFW Search information including classification, databases and other search related notes 1 View
2005-07-27 IDS Information Disclosure Statement (IDS) Form (SB08) 5 View
2005-07-27 FOR Foreign Reference 44 View
2005-07-18 SRNT Examiner's search strategy and results 2 View
2005-07-06 SRNT Examiner's search strategy and results 2 View
2005-05-12 ELC. Response to Election / Restriction Filed 1 View
2005-05-12 CLM Claims 5 View
2005-05-12 REM Applicant Arguments/Remarks Made in an Amendment 2 View
2005-05-12 WFEE Fee Worksheet (SB06) 1 View
2005-04-22 IDS Information Disclosure Statement (IDS) Form (SB08) 4 View
2005-04-22 FOR Foreign Reference 8 View
2005-04-22 FOR Foreign Reference 6 View
2005-04-22 FOR Foreign Reference 8 View
2005-04-22 FOR Foreign Reference 6 View
2005-04-22 FOR Foreign Reference 14 View
2005-04-22 FOR Foreign Reference 8 View
2005-04-22 FOR Foreign Reference 16 View
2005-04-12 CTRS Requirement for Restriction/Election 5 View
2005-04-12 FWCLM Index of Claims 1 View
2005-04-12 BIB Bibliographic Data Sheet 1 View
2004-07-26 IDS Information Disclosure Statement (IDS) Form (SB08) 2 View
2004-05-17 DRW Drawings-only black and white line drawings 7 View
2004-05-17 ARTIFACT Artifact sheet indicating an item has been filed which cannot be scanned 1 View
2003-11-05 OATH Oath or Declaration filed 7 View
2003-10-15 PEFN Pre-Exam Formalities Notice 2 View
2003-07-15 TRNA Transmittal of New Application 2 View
2003-07-15 SPEC Specification 17 View
2003-07-15 CLM Claims 4 View
2003-07-15 ABST Abstract 1 View
2003-07-15 DRW Drawings-only black and white line drawings 6 View
2003-07-15 OATH Oath or Declaration filed 4 View
2003-07-15 IDS Information Disclosure Statement (IDS) Form (SB08) 1 View
2003-07-15 FOR Foreign Reference 8 View
2003-07-15 FOR Foreign Reference 2 View
2003-07-15 WFEE Fee Worksheet (SB06) 1 View
2003-07-15 WFEE Fee Worksheet (SB06) 1 View
2003-07-15 FOR Foreign Reference 16 View
2003-07-15 FOR Foreign Reference 14 View
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Quick Facts
App. No.
10/619,922
Filed
2003-07-15
Pub. No.
US20050014383A1
Art Unit
1794