Substrate treatment apparatus and substrate treatment method

1. A substrate treatment apparatus comprising:

a substrate holding mechanism for holding a substrate;

a first brush made of an elastically deformable material and having a cleaning surface inclined with respect to a perpendicular direction perpendicular to one surface of the substrate held by the substrate holding mechanism;

a first brush moving mechanism for moving the first brush with respect to the substrate held by the substrate holding mechanism;

a controller for controlling the first brush moving mechanism so that the cleaning surface is made to contact with a peripheral area on the one surface and a peripheral end face of the substrate held by the substrate holding mechanism;

a first brush relative movement mechanism for relatively moving the first brush and the substrate held by the substrate holding mechanism so that the first brush is moved in a circumferential direction of the substrate; and

a first pushing pressure holding mechanism for holding a pushing pressure of the first brush in the direction perpendicular to the peripheral area on the one surface of the substrate at a preset pushing pressure, the first pushing pressure holding mechanism being arranged to hold the pushing pressure at the preset pushing pressure during the relative movement of the substrate and the first brush regardless of a warp deformation of the substrate, wherein the first pushing pressure holding mechanism includes an air cylinder, an air supply pipe connected to the air cylinder, and a relief valve arranged in the air supply pipe.

2. The substrate treatment apparatus according to claim 1 , wherein

the first brush has a shape rotationally symmetrical around a central axis extending in the perpendicular direction, and

the substrate treatment apparatus comprises a first brush rotation mechanism for rotating the first brush around the central axis.

3. The substrate treatment apparatus according to claim 1 , wherein

the cleaning surface includes a first cleaning surface formed in a shape narrowed toward one side in the perpendicular direction and a second cleaning surface formed in a shape expanding toward the one side in the perpendicular direction from an end edge of the first cleaning surface on the one side, and

the controller controls the first brush moving mechanism so that the first cleaning surface is made to contact with the peripheral area on the one surface and the peripheral end face of the substrate held by the substrate holding mechanism and the second cleaning surface is made to contact with the peripheral area on the other surface on the opposite side of the one surface and the peripheral end face of the substrate held by the substrate holding mechanism.

4. The substrate treatment apparatus according to claim 1 , wherein

the first brush is formed in a shape tapered toward one side in the perpendicular direction,

the substrate treatment apparatus further comprises:

a second brush made of an elastically deformable material, formed in a shape tapered toward the opposite side of the one side in the perpendicular direction and having a cleaning surface inclined with respect to the perpendicular direction; and

a second brush moving mechanism for moving the second brush with respect to the substrate held by the substrate holding mechanism, and

the controller further controls the second brush moving mechanism so that the cleaning surface of the second brush is made to contact with a peripheral area on the other surface on the opposite side of the one surface and the peripheral end face of the substrate held by the substrate holding mechanism.

5. The substrate treatment apparatus according to claim 4 , further comprising:

a second pushing pressure holding mechanism for holding a pushing pressure of the second brush in the perpendicular direction to the peripheral area on the other surface of the substrate at a preset pushing pressure.

6. The substrate treatment apparatus according to claim 4 , wherein

the second brush has a shape rotationally symmetrical around a central axis extending in the perpendicular direction, and

the substrate treatment apparatus comprises a second brush rotation mechanism for rotating the second brush around a central axis.

7. The substrate treatment apparatus according to claim 4 , further comprising:

a second brush relative movement mechanism for relatively moving the substrate held by the substrate holding mechanism and the second brush so that the second brush is moved in a circumferential direction of the substrate.

8. The substrate treatment apparatus according to claim 1 , further comprising:

a treatment liquid supply mechanism for supplying treatment liquid to an area located more inward than the peripheral area on at least the one surface of the substrate held by the substrate holding mechanism.

9. A substrate treatment apparatus comprising:

a substrate holding mechanism for holding a substrate;

a brush made of an elastically deformable material, and having a first cleaning surface formed in a shape narrowed toward one side in a perpendicular direction perpendicular to one surface of the substrate held by the substrate holding mechanism and a second cleaning surface formed in a shape expanding toward the one side in the perpendicular direction from an end edge of the first cleaning surface on the one side;

a brush moving mechanism for moving the brush with respect to the substrate held by the substrate holding mechanism, and

a controller for controlling the brush moving mechanism so that the first cleaning surface is made to contact with a peripheral area on the one surface and a peripheral end face of the substrate held by the substrate holding mechanism, and the second cleaning surface is made to contact with a peripheral area on the other surface on the opposite side of the one surface and the peripheral end face of the substrate held by the substrate holding mechanism, the controller being arranged to control the brush moving mechanism such that only one of the first and second cleaning surfaces is brought into contact with the substrate, and thereafter only the other of the first and second cleaning surfaces is brought into contact with the substrate.

10. The substrate treatment apparatus according to claim 9 , wherein

the brush has a shape rotationally symmetrical around a central axis extending in the perpendicular direction, and

the substrate treatment apparatus further comprises a brush rotation mechanism for rotating the brush around the central axis.

11. The substrate treatment apparatus according to claim 9 , further comprising:

a relative movement mechanism for relatively moving the substrate held by the substrate holding mechanism and the brush so that the brush is moved in a circumferential direction of the substrate.

12. The substrate treatment apparatus according to claim 9 , further comprising:

a treatment liquid supply mechanism for supplying a treatment liquid to an area located more inward than the peripheral area on at least the one surface of the substrate held by the substrate holding mechanism.

13. The substrate treatment apparatus according to claim 3 , wherein the controller is arranged to control the brush moving mechanism such that only one of the first and second cleaning surfaces is brought into contact with the substrate, and thereafter only the other of the first and second cleaning surfaces is brought into contact with the substrate.

14. The substrate treatment apparatus according to claim 1 , wherein

the first brush relative movement mechanism includes a rotation mechanism arranged to rotate the substrate held by the substrate holding mechanism about an axis extending through a center of a major surface of the substrate, and

the first pushing pressure holding mechanism is arranged to hold the pushing pressure at the preset pushing pressure irrespective of a position change of the first brush on the peripheral area on the one surface of the substrate due to the rotation of the substrate by the rotation mechanism.

15. The substrate treatment apparatus according to claim 11 , wherein the first brush relative movement mechanism includes a rotation mechanism arranged to rotate the substrate held by the substrate holding mechanism about an axis extending through a center of a major surface of the substrate.

16. A substrate treatment apparatus comprising:

a substrate holding mechanism for holding a substrate;

a brush made of an elastically deformable material, and having a first cleaning surface formed in a truncated conical shape narrowed toward one side in a perpendicular direction perpendicular to one surface of the substrate held by the substrate holding mechanism, and a second cleaning surface formed in a truncated conical shape expanding toward the one side in the perpendicular direction from a narrow end edge of the first cleaning surface on the one side, a narrow end edge of the second cleaning surface being directly connected to the narrow end edge of the first cleaning surface;

a brush moving mechanism for moving the brush with respect to the substrate held by the substrate holding mechanism, and

a controller configured for controlling the brush moving mechanism so that the first cleaning surface is made to contact with a peripheral area on the one surface and a peripheral end face of the substrate held by the substrate holding mechanism, and the second cleaning surface is made to contact with a peripheral area on the other surface on the opposite side of the one surface and the peripheral end face of the substrate held by the substrate holding mechanism, wherein the controller is arranged to control the brush moving mechanism such that only one of the first and second cleaning surfaces is brought into contact with the substrate, and thereafter only the other of the first and second cleaning surfaces is brought into contact with the substrate.

17. The substrate treatment apparatus according to claim 16 , wherein

the brush has a shape rotationally symmetrical around a central axis extending in the perpendicular direction, and

the substrate treatment apparatus further comprises a brush rotation mechanism for rotating the brush around the central axis.

18. The substrate treatment apparatus according to claim 16 , further comprising:

a relative movement mechanism for relatively moving the substrate held by the substrate holding mechanism and the brush so that the brush is moved in a circumferential direction of the substrate.

19. The substrate treatment apparatus according to claim 18 , wherein the brush relative movement mechanism includes a rotation mechanism arranged to rotate the substrate held by the substrate holding mechanism about an axis extending through a center of a major surface of the substrate.

20. The substrate treatment apparatus according to claim 16 , further comprising:

a treatment liquid supply mechanism for supplying a treatment liquid to an area located more inward than the peripheral area on at least the one surface of the substrate held by the substrate holding mechanism.

21. A substrate treatment apparatus comprising:

a substrate holding mechanism for holding a substrate;

a first brush made of an elastically deformable material and having a cleaning surface inclined with respect to a perpendicular direction perpendicular to one surface of the substrate held by the substrate holding mechanism;

a first brush moving mechanism for moving the first brush with respect to the substrate held by the substrate holding mechanism;

a controller for controlling the first brush moving mechanism so that the cleaning surface is made to contact with a peripheral area on the one surface and a peripheral end face of the substrate held by the substrate holding mechanism;

a first brush relative movement mechanism for relatively moving the first brush and the substrate held by the substrate holding mechanism so that the first brush is moved in a circumferential direction of the substrate; and

a first pushing pressure holding mechanism for holding a pushing pressure of the first brush in the direction perpendicular to the peripheral area on the one surface of the substrate at a preset pushing pressure, the first pushing pressure holding mechanism being arranged to hold the pushing pressure at the preset pushing pressure during the relative movement of the substrate and the first brush regardless of a warp deformation of the substrate, wherein

the cleaning surface includes a first cleaning surface formed in a shape narrowed toward one side in the perpendicular direction and a second cleaning surface formed in a shape expanding toward the one side in the perpendicular direction from an end edge of the first cleaning surface on the one side,

the controller controls the first brush moving mechanism so that the first cleaning surface is made to contact with the peripheral area on the one surface and the peripheral end face of the substrate held by the substrate holding mechanism and the second cleaning surface is made to contact with the peripheral area on the other surface on the opposite side of the one surface and the peripheral end face of the substrate held by the substrate holding mechanism, and

the controller is arranged to control the brush moving mechanism such that only one of the first and second cleaning surfaces is brought into contact with the substrate, and thereafter only the other of the first and second cleaning surfaces is brought into contact with the substrate.