Measurement apparatus, test apparatus, and measurement method
View Patent ↗A signal whose voltage level fluctuates with respect to a high voltage is measured with favorable accuracy. Provided is a measurement apparatus for measuring a fluctuation of a voltage level of an input signal with respect to a reference voltage, where the voltage level of the input signal fluctuates with respect to the reference voltage having a predetermined voltage level, the measurement apparatus including: a high-frequency passage section for allowing passage of a high-frequency component of a predetermined first band of the input signal; a reference voltage dividing section for dividing a voltage level of the reference voltage at a predetermined voltage dividing ratio; a signal voltage dividing section for dividing the voltage level of the input signal at the voltage dividing ratio; a low-frequency passage section for allowing passage of a low-frequency component of a second band of a differential signal that is according to a difference between a voltage level of the reference voltage outputted from the reference voltage dividing section and a voltage level of the input signal outputted from the signal voltage dividing section, the second band being lower than the first band; a composite section for combining a signal outputted from the high-frequency passage section and a signal outputted from the low-frequency passage section; and a measurement section for measuring a signal outputted from the composite section.
1. A measurement apparatus for measuring a fluctuation of a voltage level of an input signal with respect to a reference voltage, where the voltage level of the input signal fluctuates with respect to the reference voltage having a predetermined high voltage level, the measurement apparatus comprising:
a high-frequency passage section for allowing passage of a high-frequency component of a predetermined first band of the input signal;
a reference voltage dividing section for dividing a voltage level of the reference voltage at a predetermined voltage dividing ratio;
a signal voltage dividing section for dividing the voltage level of the input signal at the voltage dividing ratio;
a low-frequency passage section for allowing passage of a low-frequency component of a second band of a differential signal that is according to a difference between a voltage level of the reference voltage outputted from the reference voltage dividing section and a voltage level of the input signal outputted from the signal voltage dividing section, the second band being lower than the first band;
a composite section for combining a signal outputted from the high-frequency passage section and a signal outputted from the low-frequency passage section; and
a measurement section for measuring a signal outputted from the composite section.
2. The measurement apparatus according to claim 1 , wherein
the high-frequency passage section outputs a differential waveform of the input signal, and the low-frequency passage section outputs an integral waveform obtained by integrating a difference between the voltage level of the reference voltage outputted from the reference voltage dividing section and the voltage level of the input signal outputted from the signal voltage dividing section.
3. The measurement apparatus according to claim 1 , wherein
the high-frequency passage section includes:
a buffer that allows passage of the input signal; and
a high-pass filter that allows passage of a frequency component of the first band of the input signal outputted from the buffer.
4. The measurement apparatus according to claim 3 , wherein
the low-frequency passage section includes:
a differential circuit that outputs the differential signal obtained from amplifying, at an amplification factor that is according to the voltage dividing ratio, the difference between the voltage level of the reference voltage outputted from the reference voltage dividing section and the voltage level of the input signal outputted from the signal voltage dividing section.
5. The measurement apparatus according to claim 4 , wherein
the low-frequency passage section further includes a low-pass filter that allows passage of a frequency component of the second band of the differential signal outputted from the differential circuit.
6. The measurement apparatus according to claim 5 , wherein
the second band is substantially adjacent to a low frequency side of the first band.
7. The measurement apparatus according to claim 6 , wherein
a cut-off frequency of the first band is substantially equal to a cut-off frequency of the second band.
8. The measurement apparatus according to claim 6 , wherein
a roll-off factor of the first band is substantially equal to a roll-off factor of the second band.
9. The measurement apparatus according to claim 6 , wherein
an amplitude gain for the high-frequency passage section is substantially equal to an amplitude gain for the low-frequency passage section.
10. A test apparatus for testing a device under test, the test apparatus comprising:
a reference voltage application section for applying a reference voltage to the device under test, the reference voltage defining a reference of a voltage level of an output signal outputted from the device under test;
a measurement apparatus for measuring the output signal; and
a judgment section for judging quality of the device under test based on the output signal measured by the measurement apparatus, wherein
the measurement apparatus includes:
a high-frequency passage section for allowing passage of a high-frequency component of a predetermined first band of the output signal;
a reference voltage dividing section for dividing a voltage level of the reference voltage at a predetermined voltage dividing ratio;
a signal voltage dividing section for dividing the voltage level of the output signal at the voltage dividing ratio;
a low-frequency passage section for allowing passage of a low-frequency component of a second band of a differential signal that is according to a difference between a voltage level of the reference voltage outputted from the reference voltage dividing section and a voltage level of the output signal outputted from the signal voltage dividing section, the second band being lower than the first band;
a composite section for combining a signal outputted from the high-frequency passage section and a signal outputted from the low-frequency passage section; and
a measurement section for measuring a signal outputted from the composite section.
11. The test apparatus according to claim 10 , wherein
the device under test includes:
a low-voltage driving section for outputting a first output signal whose reference is a predetermined voltage level; and
a high-voltage driving section for outputting a second output signal whose reference is the reference voltage having a higher voltage than a reference voltage level of the first output signal, and
the measurement apparatus measures the second output signal.
12. A measurement method for measuring a fluctuation of a voltage level of an input signal with respect to a reference voltage, where the voltage level of the input signal fluctuates with respect to the reference voltage having a predetermined voltage level, the measurement method comprising:
a high-frequency passage step for allowing passage of a high-frequency component of a predetermined first band of the input signal;
a reference voltage dividing step for dividing a voltage level of the reference voltage at a predetermined voltage dividing ratio;
a signal voltage dividing step for dividing the voltage level of the input signal at the voltage dividing ratio;
a low-frequency passage step for allowing passage of a low-frequency component of a second band of a differential signal that is according to a difference between a voltage level of the reference voltage resulting from voltage division in the reference voltage dividing step and a voltage level of the input signal resulting from voltage division in the signal voltage dividing step, the second band being lower than the first band;
a composite step for combining a signal generated in the high-frequency passage step and a signal generated in the low-frequency passage step; and
a measurement step for measuring a signal generated in the composite step.