Pattern matching method and computer program for executing pattern matching
A pattern matching method which is capable of selecting a suitable measurement object pattern, even on a sample containing a periodic structure, and a computer program for making a computer execute the pattern matching. In a pattern matching method which executes matching between the design data-based first image of an object sample, and a second image, whether or not a periodic structure is included in a region to execute the matching is determined, so as to select a pattern, based on distance between an original point which is set in said image, and the pattern configuring said periodic structure, in the case where the periodic structure is included in said region, and to select a pattern based on coincidence of the pattern in said image, in the case where the periodic structure is not included in said region, and a computer program product.
1. A pattern matching method for matching between a design data-based first image of an object sample, and a second image, comprising steps of: determining whether or not a periodic structure is included in a region to be subjected to the matching of said first image and second image;
selecting a pattern, based on a distance between an original point which is set in said images, and pattern configuring said periodic structure, in the case where the periodic structure is included in said region; and
selecting a pattern based on coincidence of the pattern in said images, in the case where the periodic structure is not included in said region.
2. The pattern matching method according to claim 1 , wherein the determining step determines whether or not said periodic structure is included in said region to be subjected to said matching in said design data based first image.
3. The pattern matching method according to claim 1 , wherein, in the case where the periodic structure is included in said region, a pattern configuring said periodic structure which is nearest from the image center is selected.
4. The pattern matching method according to claim 1 , wherein, in the case where the periodic structure is not included in said region, a pattern which exhibits the highest coincidence in said images is selected.
5. The pattern matching method according to claim 1 , wherein the dimension of the pattern of said second image selected is measured.
6. The pattern matching method according to claim 1 , wherein said determining step is carried out in the case where a plurality of drawings are included in said images.
7. The pattern matching method according to claim 1 , wherein the shape of a plurality of drawings in said region is determined, and in the case where a plurality of drawings, which are determined to be the same, are included in said region, it is determined that the periodic structure is included in said region.
8. A non-transitory computer-readable recording medium carrying a program, wherein execution of the program causes a computer to perform matching between a design data-based first image of an objective sample and a second image, wherein the matching including functions comprising:
determining whether or not a periodic structure is included in a region to be subjected to the matching of said first image and second image
selecting a pattern, based on a distance between an original point which is set in said images; and pattern configuring said periodic structure, in the case where the periodic structure is included in said region; and
selecting a pattern based on coincidence of the pattern in said image, in the case where the periodic structure is not included in said region.
9. The computer readable recording medium according to claim 8 , wherein in said determination, the determining step determines whether or not said periodic structure is included in said region to be subjected to said matching in said design data based first image.
10. The computer readable recording medium according to claim 8 , wherein, in the case where the periodic structure is included in said region, a pattern configuring said periodic structure which is nearest from the image center is selected.
11. The computer readable recording medium according to claim 8 , wherein, in the case where the periodic structure is not included in said region, a pattern which exhibits the highest coincidence in said images is selected.
12. The computer readable recording medium according to claim 8 , wherein the dimension of the pattern of said second image selected is measured.
13. The computer readable recording medium according to claim 8 , wherein said determining step is carried out in the case where a plurality of drawings are included in said images.
14. The program product according to claim 8 , wherein the shape of a plurality of drawings in said region is determined, and in the case where a plurality of drawings, which are determined to be the same, are included in said region, it is determined that the periodic structure is included in said region.
15. A scanning electron microscope equipped with a computer which executes matching between a design data-based first image of an object sample, and a second image obtainable by scanning electron beams,
wherein said computer:
determine whether or not a periodic structure is included in a region to be subjected to the matching of said first image and second image is determined,
selects a pattern, based on distance between an original point which is set in said image, and pattern configures said periodic structure, in the case where the periodic structure is included in said region, and
selects a pattern based on coincidence of the pattern in said images, in the case where the periodic structure is not included in said region.