IP Library Granted Patent US 7,761,751
Granted Patent B1
US 7,761,751 · App. 11/708,824 · Granted Jul 20, 2010

Test and diagnosis of semiconductors

Assignee: Credence Systems Corporation
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Quick Facts
Patent No.
US 7,761,751
App. No.
11/708,824
Granted
Jul 20, 2010
Kind
B1
Abstract

A method and system for performing diagnosing in an automatic test environment. The method begins by determining a fail condition during a test of a device under test (DUT). A diagnostic suite is determined for testing the fail condition. The diagnostic suite is generated if the diagnostic suite is not available for access.

Claims (67)

1. A method of diagnosing in an automatic test environment, comprising:

determining a fail condition during a test of a device under test (DUT);

determining a diagnostic suite for testing said fail condition; and

generating said diagnostic suite if said diagnostic suite is not available for access.

2. The method of claim 1 , further comprising:

determining whether to diagnose said fail condition;

determining whether to datalog said fail condition; and

determining whether to continue with said test if no diagnostic action is necessary.

3. The method of claim 2 , further comprising:

determining to diagnose said fail condition at an automatic test instrument (ATE) system.

4. The method of claim 2 , further comprising:

determining to diagnose said fail condition at a test controller.

5. The method of claim 1 , wherein said determining a fail condition comprises:

evaluating raw data from said test at a test controller to determine said fail condition.

6. The method of claim 1 , further comprising:

transmitting said diagnostic suite to an automatic test instrument (ATE) system for testing said fail condition.

7. The method of claim 1 , further comprising:

determining to diagnose said fail condition in a physical failure analysis (PFA) loop;

selecting a next diagnostic test in said diagnostic suite for testing said fail condition; and

executing said next diagnostic test in said PFA loop.

8. A method of diagnosing in an automatic test environment, comprising:

determining a fail condition during a test of a device under test (DUT);

determining whether to diagnose said fail condition; and

determining whether to datalog said fail condition.

9. The method of claim 8 , wherein said determining whether to diagnose said fail condition, comprises:

determining to diagnose said fail condition; and

determining a diagnostic suite that is available for access to test said fail condition.

10. The method of claim 9 , further comprising:

selecting said diagnostic suite;

selecting a next diagnostic test in said diagnostic suite for testing said fail condition.

11. The method of claim 8 , wherein said determining whether to diagnose said fail condition, comprises:

determining to diagnose said fail condition at an automatic test equipment (ATE) system;

sending said fail condition to a test controller;

at said test controller, determining a diagnostic suite to test said fail condition;

accessing said diagnostic suite at said test controller; and

transmitting said diagnostic suite from said test controller to said ATE system for testing said fail condition.

12. The method of claim 8 , wherein said determining whether to diagnose said fail condition, comprises:

determining to diagnose said fail condition at an automatic test equipment (ATE) system;

sending said fail condition to a test controller;

at said test controller, determining a diagnostic suite to test said fail condition;

generating said diagnostic suite if said diagnostic suite is not available for access; and

transmitting said diagnostic suite to said ATE system for testing said fail condition.

13. The method of claim 8 , wherein said determining a fail condition further comprises:

analyzing raw data during execution of said test at a test controller to determine said fail condition.

14. The method of claim 8 , wherein said determining a fail condition further comprises:

receiving at a test controller a datalog of said fail condition from an automatic test equipment (ATE) system;

determining to diagnose said fail condition at said test controller;

at said test controller, determining a diagnostic suite to test said fail condition; and

generating said diagnostic suite is said diagnostic suite is not available for access; and

transmitting said diagnostic suite to said ATE system for testing said fail condition.

15. The method of claim 8 , further comprising:

determining to diagnose said fail condition in a physical failure analysis (PFA) loop;

determining a diagnostic suite that is available for access to test said fail condition;

selecting a next diagnostic test in said diagnostic suite for testing said fail condition; and

executing said next diagnostic test in said PFA loop.

16. A system for diagnosing in an automatic test environment, comprising:

a diagnosis module for determining to diagnose a fail condition generated during a test of a device under test (DUT);

a diagnostic suite calculator for determining a diagnostic suite for testing said fail condition; and

a diagnostic suite generator for generating said diagnostic suite if said diagnostic suite is not available for access.

17. The system of claim 16 , further comprising:

an automatic test instrument (ATE) comprising said diagnosis module; and

a test controller comprising said diagnostic suite calculator and said diagnostic suite generator.

18. The system of claim 16 , further comprising:

a test controller comprising said diagnosis module, said diagnostic suite calculator, and said diagnostic suite generator.

19. The system of claim 16 , wherein said diagnostic suite generator comprises an automatic test pattern generator (ATPG).

20. The system of claim 16 , further comprising:

a transmitter module for transmitting said diagnostic suite to an automatic test instrument for testing said fail condition.

Assignments (6)
CORRECTIVE ASSIGNMENT TO CORRECT THE INCORRECT PATENT NUMBER 7261561 AND REPLACE WITH PATENT NUMBER 7231561 PREVIOUSLY RECORDED ON REEL 034660 FRAME 0188. ASSIGNOR(S) HEREBY CONFIRMS THE SECURITY AGREEMENT. Recorded Feb 11, 2016
From: XCERRA CORPORATION; EVERETT CHARLES TECHNOLOGIES LLC
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 037824/0372 →
SECURITY AGREEMENT Recorded Dec 18, 2014
From: XCERRA CORPORATION; EVERETT CHARLES TECHNOLOGIES LLC
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 034660/0188 →
RELEASE OF SECURITY INTEREST IN UNITED STATES PATENTS Recorded Dec 18, 2014
From: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
To: XCERRA CORPORATION; EVERETT CHARLES TECHNOLOGIES LLC
Reel/Frame 034660/0394 →
CHANGE OF NAME Recorded May 27, 2014
From: LTX-CREDENCE CORPORATION
To: XCERRA CORPORATION
Reel/Frame 033032/0768 →
SECURITY AGREEMENT Recorded Jan 17, 2014
From: LTX-CREDENCE CORPORATION; EVERETT CHARLES TECHNOLOGIES LLC
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 032086/0476 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 20, 2007
From: WEST, BURNELL G.
To: CREDENCE SYSTEMS CORPORATION
Reel/Frame 019010/0324 →
Continuity (1)
Provisional Application 6079992900 · May 12, 2006