Wiring member, resin-coated metal part and resin-sealed semiconductor device, and manufacturing method for the resin-coated metal part and the resin-sealed semiconductor device
View Patent ↗There is provided a semiconductor device that suppresses the occurrence of resin burrs and has favorable electrical connectivity and bond strength, and a manufacturing method for such semiconductor device. A resin-coated metal part is manufactured by forming an organic coating by depositing a material including functional organic molecules on a wiring lead composed of a metallic material. Each of the functional organic molecules includes a main chain, a first functional group having a metal bonding property, and a second functional group. The first functional group and the second functional group are provided at different ends of the main chain. Thereafter the functional organic molecules self-assemble by bonding of the first functional groups to metal atoms of the wiring lead. After performing the organic coating formation step, resin is adhered to a predetermined surface area of the wiring lead having the organic coating formed thereon.
1. A wiring member including a wiring lead composed of a metallic material, wherein
an organic coating has been formed on a surface of the wiring lead by self-assembly of a plurality of functional organic molecules,
each of the functional organic molecules has a chemical structure including a main chain having two ends, a first functional group bonded to one end of the main chain, and a second functional group bonded to the other end of the main chain, the first functional group being in a form for bonding to the wiring lead by any one or more of a metal bond, a hydrogen bond, and a coordinate bond by a metal complex, and the second functional group having a resin hardening property or a resin-hardening promoting property,
the main chain includes at least one of a methylene chain, a fluoromethylene chain and a siloxane chain, which have a carbon number n of 4 to 40, the main chain being hydrophobic,
an outermost layer of the wiring lead includes Ag,
each of the first functional groups is bonded to the wiring lead,
the first functional group is a chemical structure selected from the group consisting of (i) a nitrogen-containing heterocyclic compound, (ii) a nitrogen-containing heterocyclic compound and a thiol compound, (iii) a nitrogen-containing heterocyclic compound and a sulfide compound, and (iv) a nitrogen-containing heterocyclic compound, a thiol compound, and a sulfide compound, the nitrogen-containing heterocyclic compound of (i), (ii), (iii) and (iv) being selected from the group consisting of an imidazole compound and a triazine compound, and
the second functional group is (v) a chemical structure selected from the group consisting of a hydroxyl, a carboxylic acid, an acid anhydride, a primary amine, an amide, a thiol, a sulfide, a hydrazide, an organic phosphine, and a boron trifluoride amine complex, (vi) a chemical structure selected from the group consisting of a vinyl and an organic hydrogen silane, (vii) a chemical structure selected from the group consisting of platinum, palladium, ruthenium, and rhodium, or (viii) a chemical structure selected from the group consisting of a fluorescent compound and a phosphorescent compound.
2. A resin-coated metal part including the wiring member of claim 1 having a resin material adhered to a portion thereof, wherein
a deposited area of the organic coating is greater in area than a surface area of the wiring member where the resin has been adhered.
3. The resin-coated metal part of claim 2 , wherein
the resin is a thermoset resin.
4. The resin-coated metal part of claim 3 , wherein
the thermoset resin is composed of a compound, a chemical structure, or a derivative that includes at least one selected from the group consisting of an epoxy resin, a phenol resin, an acryl resin, a melamine resin, a urea resin, an unsaturated polyester resin, an alkyl resin, a polyimide resin, a polyamide resin, and a polyether resin, and
the second functional group is composed of a compound, a chemical structure, or a derivative that includes at least one selected from the group consisting of a secondary amine and a tertiary amine.
5. The resin-coated metal part of claim 3 , wherein
the thermoset resin is a silicone resin.
6. A resin-sealed semiconductor device comprising:
a wiring member including a wiring lead composed of a metallic material,
an organic coating having been formed on a surface of the wiring lead by self-assembly of a plurality of functional organic molecules,
each of the functional organic molecules having a chemical structure including a main chain having two ends, a first functional group bonded to one end of the main chain, and a second functional group bonded to the other end of the main chain, the first functional group being in a form for bonding to the wiring lead by any one or more of a metal bond, a hydrogen bond, and a coordinate bond by a metal complex, and the second functional group having a resin hardening property or a resin-hardening promoting property,
each of the first functional groups having bonded to the wiring lead; and
a semiconductor element electrically connected to the wiring lead, wherein
a portion of the wiring member is externally exposed,
the semiconductor element has been resin sealed in an area where the organic coating has been formed,
the main chain includes at least one of a methylene chain, a fluoromethylene chain and a siloxane chain, which have a carbon number n of 4 to 40, the main chain being hydrophobic,
an outermost layer of the wiring lead includes Ag,
the first functional group is a chemical structure selected from the group consisting of (i) a nitrogen-containing heterocyclic compound, (ii) a nitrogen-containing heterocyclic compound and a thiol compound, (iii) a nitrogen-containing heterocyclic compound and a sulfide compound, and (iv) a nitrogen-containing heterocyclic compound, a thiol compound, and a sulfide compound, the nitrogen-containing heterocyclic compound of (i), (ii), (iii) and (iv) being selected from the group consisting of an imidazole compound and a triazine compound, and
the second functional group is (v) a chemical structure selected from the group consisting of a hydroxyl, a carboxylic acid, an acid anhydride, a primary amine, an amide, a thiol, a sulfide, a hydrazide, an organic phosphine, and a boron trifluoride amine complex, (vi) a chemical structure selected from the group consisting of a vinyl and an organic hydrogen silane, (vii) a chemical structure selected from the group consisting of platinum, palladium, ruthenium, and rhodium, or (viii) a chemical structure selected from the group consisting of a fluorescent compound and a phosphorescent compound.