Method of manufacturing semiconductor apparatus
View Patent ↗A method of manufacturing a semiconductor apparatus includes forming an electrode on a semiconductor device, forming a conductive bump on the electrode, placing an external wire on the conductive bump, and laser-welding the external wire and the conductive bump to establish electrical connection.
1. A method of manufacturing a semiconductor apparatus comprising:
forming an electrode on a semiconductor device;
forming a plurality of conductive bumps on the electrode;
mounting the semiconductor device on a die pad of a lead frame;
placing one end of an individual electrical member different from the lead frame on the conductive bumps and the other end of the individual electrical member on a lead of the lead frame;
applying a laser beam to a plurality of positions of the individual electrical member corresponding to that of the conductive bumps to form a plurality of laser welded portions and to establish electrical connections between the one end of the individual electrical member and the conductive bumps; and
applying a laser beam to another position of the individual electrical member corresponding to that of the lead to establish electrical connection between the other end of the individual electrical member and the lead.
2. The method of manufacturing a semiconductor apparatus according to claim 1 , wherein
the semiconductor device includes a Metal-Oxide-Semiconductor Field-Effect Transistor.
3. The method of manufacturing a semiconductor apparatus according to claim 1 , wherein
the semiconductor apparatus has an operational current of 1 to 200 A.
4. The method of manufacturing a semiconductor apparatus according to claim 1 , wherein
a thickness of the individual electrical member is 1 to 30 times a height of the conductive bumps.
5. The method of manufacturing a semiconductor apparatus according to claim 1 , wherein
a height of the conductive bumps is determined based on a thickness of the individual electrical member.
6. The method of manufacturing a semiconductor apparatus according to claim 1 , wherein
the individual electrical member is a ribbon-like connecting member, and the plurality of laser-welded portions formed in the one end of the individual electrical member are arranged in a grid manner.
7. The method of manufacturing a semiconductor apparatus according to claim 1 , wherein
the individual electrical member is composed of a plurality of lead-like connecting members, and the plurality of laser-welded portions formed in the one end of each of the lead-like connecting members are arranged in a dotted line manner.
8. The method of manufacturing a semiconductor apparatus according to claim 2 , wherein, for the semiconductor apparatus formed by the method
the electrode, the conductive bumps, the individual electrical member and the lead function as a source electrode of the Metal-Oxide-Semiconductor Field-Effect Transistor, and the die pad functions as a drain electrode thereof.
9. The method of manufacturing a semiconductor apparatus according to claim 8 , further comprising
laser welding one end of another individual electrical member of the semiconductor apparatus and another conductive bump formed on another electrode of the semiconductor device; and
laser welding an other end of the another individual electrical member and an another lead of a lead frame of the semiconductor apparatus;
wherein, for the semiconductor apparatus formed by the method, the another electrode, the another conductive bump, the another individual electrical member and the another lead function as a gate electrode of the Metal-Oxide-Semiconductor Field-Effect Transistor.
10. The method of manufacturing a semiconductor apparatus according to claim 1 , wherein
the conductive bumps are made of a metal containing at least one of Au, Cu, Ni, Ag, Al, Pd, Sn and Pb.
11. The method of manufacturing a semiconductor apparatus according to claim 1 , wherein
the electrode is made of a metal containing at least one of Au, Cu, Ni, Ag, Al and Pd.
12. The method of manufacturing a semiconductor apparatus according to claim 1 , wherein
the individual electrical member is made of a metal containing at least one of Au, Cu, Ni, Ag, Al and Pd.
13. The method of manufacturing a semiconductor apparatus according to claim 12 , wherein
the individual electrical member is made of Cu or Cu alloy with a surface plated with Ni.
14. The method of manufacturing a semiconductor apparatus according to claim 12 , wherein
the electrode and the individual electrical member are both made of a metal containing at least one of Au, Cu, Ni, Ag, Al and Pd.