Semiconductor device
View Patent ↗A semiconductor device capable of dissipating heat, which has been produced in an ESD protection element, to the exterior of the device rapidly and efficiently includes an ESD protection element having a drain region, a source region and a gate electrode, and a thermal diffusion portion. The thermal diffusion portion, which has been formed on the drain region, has a metal layer electrically connected to a pad, and contacts connecting the drain region and metal layer. The metal layer has a first wiring trace extending along the gate electrode, and second wiring traces intersecting the first wiring trace perpendicularly. The contacts are connected to intersections between the first wiring trace and the second wiring traces. Heat that has been produced at a pn-junction of the ESD protection element and transferred through a contact is diffused simultaneously in three directions through the first wiring trace and second wiring trace in the metal layer and is released into the pad.
1. A semiconductor device with an electrostatic discharge protection element having first and second semiconductor regions, which are formed within a substrate area electrically isolated by non-conductive regions extending into the substrate, that form a first pn junction, said device comprising:
a first metal layer formed above the electrostatic discharge protection element, the first metal layer being electrically connected to a pad at a position outside of the electrically isolated area; and
a plurality of first contacts connecting the first semiconductor region and said first metal layer within the electrically isolated area;
wherein said first metal layer and said first contacts are in a thermally non-floating state;
said first metal layer has a first diffusion path whereby heat that has been conducted through at least one first contact among said plurality thereof is diffused simultaneously from a connection to said at least one first contact in a first direction in which the first pn junction extends and in a second direction intersecting the first direction; and
said first diffusion path forms part of a path that conducts heat to the exterior of said semiconductor device.
2. The semiconductor device according to claim 1 , wherein said first metal layer has at least one first wiring trace extending in the first direction, and a plurality of second wiring traces that intersect said first wiring trace; and said first contacts are connected to the intersection between said first wiring trace and said second wiring traces.
3. The semiconductor device according to claim 1 , wherein said first metal layer and said first contacts define a path of conduction of electrostatic discharge current.
4. The semiconductor device according to claim 1 , wherein said first semiconductor region has a silicide layer on a surface portion thereof; and said first contacts are connected to said silicide layer.
5. The semiconductor device according to claim 1 , wherein the electrostatic discharge protection element further comprises a third semiconductor region that together with the second semiconductor region forms a second pn junction; and said third semiconductor region is electrically connected to a ground region or power-source region.
6. The semiconductor device according to claim 5 , further comprising:
a second metal layer formed above the electrostatic discharge protection element; and
a plurality of second contacts connecting the third semiconductor region and said second metal layer within the electrically isolated area;
wherein said second metal layer and said second contacts are in a thermally non-floating state;
said second metal layer has a second diffusion path whereby heat that has been conducted through at least one second contact among said plurality thereof is diffused simultaneously from a connection to said at least one second contact in a third direction in which the second pn junction extends and in a fourth direction intersecting the third direction; and
said second diffusion path forms part of a path that conducts heat to the exterior of said semiconductor device.
7. The semiconductor device according to claim 6 , wherein said second metal layer has at least one third wiring trace extending in the third direction, and a plurality of fourth wiring traces that intersect said third wiring trace; and said second contacts are connected to intersections between said third wiring trace and said fourth wiring traces.
8. The semiconductor device according to claim 6 , wherein said second metal layer is electrically connected to a pad; and said second metal layer and said second contacts define a path of conduction of electrostatic discharge current.
9. The semiconductor device according to claim 5 , wherein said third semiconductor region has a silicide layer on a surface portion thereof; and said second contacts are connected to said silicide layer.
10. The semiconductor device according to claim 5 , wherein said first semiconductor region is a drain region, said second semiconductor region is a channel region, said third semiconductor region is a source region, and said electrostatic discharge protection element has a metal oxide semiconductor field-effect transistor structure that further includes a gate insulating film and a gate electrode on said second semiconductor region.