Method and apparatus for recycling process fluids
View Patent ↗A method and apparatus for recycling a process fluid from a drain of a semiconductor process tool. The process fluid may be an acidic cobalt solution or an electroless cobalt solution used in a semiconductor process step to prevent electromigration in copper interconnects. The used process fluid is collected from the tool drain and recycled back to the tool inlet if a condition of the fluid is within a predetermined range. Otherwise, the used process fluid is drained from the system. The system may also operate in a bleed and feed mode where a portion of the used process fluid is periodically drained from the system.
1. A method of recycling an acidic cobalt solution from a semiconductor process tool comprising the steps of:
reclaiming used acidic cobalt solution from a drain of the semiconductor process tool wherein the used acidic cobalt solution flows from the drain and into a reclaim line;
measuring conductivity of the used acidic cobalt solution with a conductivity probe connected to the reclaim line;
sending a signal indicative of the conductivity to a controller and determining if the conductivity is within a predetermined conductivity range;
recycling the used acidic cobalt solution to the semiconductor process tool if the conductivity is within the predetermined conductivity range and diverting at least a portion of the used acidic cobalt solution to a system drain if the conductivity is outside of the predetermined conductivity range wherein the step of recycling the used acidic cobalt solution comprises transferring the used acidic cobalt solution to a tank and pumping the acidic cobalt solution from the tank to an inlet of the semiconductor process tool; and
adding fresh acidic cobalt solution to the tank when the level of the acidic cobalt solution in the tank reaches a low setpoint;
wherein the step of adding fresh acidic cobalt solution to the tank comprises combining a first fluid with a second fluid to form the fresh acidic cobalt solution; and
wherein the step of combining the first and second fluids comprises controlling the flow rate of the first fluid with a first flow controller and controlling the flow rate of the second fluid with a second flow controller.
2. A system for recycling an acidic cobalt solution comprising:
a semiconductor process tool adapted to prevent electromigration in copper interconnects by applying the acidic cobalt solution to the copper interconnects; and
a recycling system comprising:
a reclaim line connected to a drain of the semiconductor process tool for reclaiming used acidic cobalt solution;
a conductivity probe connected to the reclaim line for measuring conductivity of the used acidic cobalt solution;
a recycle line for recycling the used acidic cobalt solution from the reclaim line to an inlet of the semiconductor process tool;
a tank positioned in the recycle line, the tank having an inlet for receiving the used acidic cobalt solution from the reclaim line;
a controller adapted to receive a signal indicative of the conductivity and to determine if the signal is within a predetermined conductivity range wherein if the signal is within the conductivity range the controller is adapted to send a signal to a valve to direct the used acidic cobalt solution to the tank and if the signal is outside of the conductivity range the controller is adapted to send a signal to the valve to direct the used acidic cobalt solution to the system drain;
a fluid distribution means connected to the tank and to the inlet of the semiconductor process tool; and
a first flow controller for controlling the flow rate of a first fluid and a second flow controller for controlling the flow rate of a second fluid wherein the first and second fluids are adapted to combine to form a stream of fresh acidic cobalt solution and wherein the tank includes a fluid inlet for the stream of fresh acidic cobalt solution.