Patent Assignment
Reel/Frame 020654/0963
Change of Name
Recorded: 2008-03-18
Received: 2008-03-18
Pages: 6
Assignor
BOC EDWARDS, INC.
Executed: 2007-09-20
Assignee
EDWARDS VACUUM, INC.
301 BALLARDVALE STREET, WILMINGTON, MA, 01887, UNITED STATES
Covered Properties
(65)
Method for controlling temperature
Application:
11/825,340 →
Fluid distribution system
Application:
11/788,891 →
Method and Apparatus for Recycling Process Fluids
Application:
11/732,088 →
Method and Apparatus for Dispensing Liquid with Precise Control
Application:
11/674,253 →
Inductively heated trap
Application:
11/605,793 →
Control of fluid conditions in bulk fluid distribution systems
Application:
11/367,888 →
Control of Fluid Conditions in Bulk Fluid Distribution Systems
Application:
11/367,140 →
Liquid dispense system
Application:
11/368,288 →
Method and Apparatus for Metal Removal by Ion Exchange
Application:
11/358,412 →
Electrophoretic cross-flow filtration and electrodeionization method for treating effluent waste and apparatus for use therewith
Application:
11/353,906 →
Use of spectroscopic techniques to monitor and control reactant gas input into a pre-pump reactive gas injection system
Application:
11/285,810 →
Selective fluoride and ammonia removal by chromatographic separation of wastewater
Application:
11/283,080 →
Method and apparatus for producing ultra-high purity water
Application:
11/252,635 →
Wide Range Pressure Control Using Turbo Pump
Application:
11/245,797 →
Pump apparatus for semiconductor processing
Application:
11/244,744 →
Vacuum handler systems and processes for flexible automation of semiconductor fabrication
Application:
11/239,968 →
Device having an embedded Ethernet networking automated link for facilitating configuration of the device and connection of the device to a network
Application:
11/205,564 →
Turbomolecular Pump with Static Charge Control
Application:
11/204,615 →
Arrangement for Tool Equipment
Application:
11/182,531 →
Integrated pump apparatus for semiconductor processing
Application:
11/173,962 →
High efficiency trap for deposition process
Application:
11/145,742 →
Method and apparatus for generating a high pressure fluid
Application:
11/088,050 →
Systems and Methods for Facilitating Wireless Communication Between Various Components of a Distributed System
Application:
11/029,068 →
Fore-Line Preconditioning for Vacuum Pumps
Application:
11/003,125 →
Integrated Turbo/Drag/Regenerative Pump with Counter-Rotating Turbo Blades
Application:
10/981,226 →
System and methods for redundant networks
Application:
10/964,414 →
Integrated High Vacuum Pumping System
Application:
10/916,081 →
Combined Vacuum Pump Load-Lock Assembly
Application:
10/822,189 →
Active Noise Cancellation System, Arrangement, and Method
Application:
10/816,703 →
Active vibration reduction
Application:
10/781,993 →
Barrier layer process and arrangement
Application:
10/774,841 →
Fluorine Removal by Ion Exchange
Application:
10/759,718 →
Apparatus and Method for Control, Pumping and Abatement for Vacuum Process Chambers
Application:
10/750,309 →
Method and apparatus for high speed atomic layer deposition
Application:
10/750,310 →
Chemical Delivery Systems and Methods of Delivery
Application:
10/749,949 →
Treatment Process for Industrial Waste Stream
Application:
10/749,950 →
Selective Fluoride and Ammonia Removal by Chromatographic Separation of Wastewater
Application:
10/749,954 →
Method for Treating Metal-Containing Solutions
Application:
10/749,946 →
Systems and Methods for Measurement of Low Liquid Flow Rates
Application:
10/650,170 →
Vacuum Chamber Load Lock Structure and Article Transport Mechanism
Application:
10/621,700 →
Method and apparatus for providing a selectively isolated equipment area network for machine elements with data communication therebetween and with remote sites
Application:
10/601,689 →
Method and apparatus for self-configuring supervisory control and data acquisition (SCADA) system for distributed control
Application:
10/601,687 →
Configurable Plc and Scada- Based Control System
Application:
10/460,794 →
Chemical Mix and Delivery Systems and Methods Thereof
Application:
10/436,349 →
Electrophoretic Cross-Flow Filtration and Electrodeionization: Method for Treating Effuluent Waste and Apparatus for Use Therewith
Application:
10/380,581 →
Self-Mixing Tank
Application:
10/364,809 →
Dilution Apparatus and Method of Diluting a Liquid Sample
Application:
10/322,238 →
Atmospheric Robot Handling Equipment
Application:
10/303,372 →
Process for Stripping Amine Borane Complex from an Electroless Plating Solution
Application:
10/256,861 →
Method and Apparatus for Metal Removal Ion Exchange
Application:
10/169,316 →
Fluorine Removal by Ion Exchange
Application:
10/148,756 →
Apparatus and Method for Sampling a Chemical-Mechanical Polishing Slurry
Application:
10/215,774 →
Flushing a Multi-Port Valve Manifold
Application:
10/215,751 →
Flow-Indicating Device and Associated Mechanism and Method
Application:
10/166,469 →
Planetary lift-off vapor deposition system
Application:
10/102,351 →
Water Softening Method and Apparatus for Use Therewith
Application:
10/031,824 →
Vacuum Load Lock, System Including Vacuum Load Lock, and Associated Methods
Application:
10/044,047 →
Electrowinning Cell Incorporating Metal Ion Filtration Apparatus
Application:
10/009,710 →
Methods for Angle Limiting Deposition Mask
Application:
10/011,508 →
Multiple Pocket Electron Beam Source
Application:
09/999,199 →
Chemical Delivery Systems and Methods of Delivery
Application:
09/968,566 →
Electrowinning Cell Incorporating Metal Ion Filtration Apparatus
Application:
09/916,062 →
Conductivity Feedback Control System for Slurry Blending
Application:
09/876,459 →
Chemical delivery systems and methods of delivery
Application:
09/870,227 →
Precision Liquid Mixing Apparatus and Method
Application:
09/850,166 →