Method for imprint lithography utilizing an adhesion primer layer
View Patent ↗The invention provides a method of applying an adhesion primer layer for an imprint lithography process that includes contacting a fluid with a surface of a substrate in a coating process and initiating a chemical reaction that forms a covalent bond between a component in the fluid and the surface of the substrate such that an adhesion primer layer is adhered to the surface of the substrate. A polymeric layer may be adhered to the surface of the substrate coated with the adhesion primer layer. The method allows adhesion primer coating for double-sided imprinting applications including patterned magnetic media.
1. A method comprising:
(a) contacting a substrate with a multi-functional component, wherein the multi-functional component comprises a first end, a second end, and a linker group between the first end and the second end, wherein the first end comprises a tetravalent atom and the linker group is —CH 2 —;
(b) covalently bonding the tetravalent atom of the first end of the multi-functional component to the substrate to form an adhesion primer layer;
(c) disposing a polymerizable imprinting material on the adhesion primer layer; and
(d) covalently bonding the second end of the multi-functional component to the polymerizable imprinting material during polymerization of the polymerizable imprinting material in an imprint lithography process.
2. The method of claim 1 , wherein the multi-functional component has a boiling point that is at most about 350° C.
3. The method of claim 1 , wherein the multi-functional component has a viscosity that is at most about 100 cP.
4. The method of claim 1 , wherein the tetravalent atom is silicon.
5. The method of claim 1 , wherein the multi-functional component is acryloxymethyltrimethoxysilane.
6. The method of claim 1 , wherein the multi-functional component is acryloxymethyltriethoxysilane.
7. The method of claim 1 , further comprising contacting the substrate with one or more additional components.
8. The method of claim 7 , wherein one of the additional components is 1,2-bis(trimethoxysilyl)ethane.
9. The method of claim 7 , wherein one of the additional components is 1,6-bis(trichlorosilyl)hexane.
10. The method of claim 1 , wherein the substrate comprises silicon.
11. The method of claim 1 , wherein the substrate is chosen from a group consisting of silicon, silicon oxide silicon nitride, tantalum, aluminum, quartz, and fused silica.
12. A compact disc formed according to the method of claim 1 .
13. A digital video disc formed according to the method of claim 1 .
14. A hard disc formed according to the method of claim 1 .
15. The method of claim 1 , wherein polymerization of the polymerizable imprinting material comprises UV irradiation of the polymerizable imprinting material.
16. A method comprising:
(a) contacting a substrate with a multi-functional component and an additional component, wherein the multi-functional component comprises a first end, a second end, and a linker group between the first end and the second end, wherein the first end comprises a tetravalent atom and the linker group is —CH 2 —, and wherein the additional component is 1,2-bis(trimethoxysilyl)ethane or 1,6-bis(trichlorosilyl)hexane;
(b) covalently bonding the tetravalent atom of the first end of the multi-functional component to the substrate to form an adhesion primer layer; and
(c) covalently bonding the second end of the multi-functional component to a polymerizable material during an imprint lithography process.
17. The method of claim 16 , wherein the tetravalent atom is silicon.
18. The method of claim 16 , wherein the multi-functional component is acryloxymethyltrimethoxysilane.
19. The method of claim 16 , wherein the multi-functional component is acryloxymethyltriethoxysilane.
20. The method of claim 16 , wherein the substrate comprises silicon.