IP Library Granted Patent US 7,461,961
Granted Patent B2
US 7,461,961 · App. 11/740,569 · Granted Dec 9, 2008

Fiber optic darkfield ring light

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Quick Facts
Patent No.
US 7,461,961
App. No.
11/740,569
Granted
Dec 9, 2008
Kind
B2
Abstract

A fiber optic darkfield ring light with many angled fiber optic light lines with direct illumination in a very small package. The fiber optic darkfield ring light includes a base with multiple light heads and multiple light covers attached thereto, a main cover, an optional cord grip, and an optional hood. It incorporates multiple fiber optic line arrays positioned at low angle and used in conjunction with a strobe light source.

Claims (30)

1. A darkfield illuminator, comprising:

a base;

a plurality of separate and distinct light heads attached to the base;

a plurality of fiber optic lines; and

wherein each of the light heads is configured to hold a plurality of the fiber optic lines and provide darkfield illumination.

2. The darlfield illuminator of claim 1 , wherein the base includes a recess formed therein.

3. The darkfield illuminator of claim 2 , wherein the recess is substantially cylindrical in shape.

4. The darkfield illuminator of claim 2 , wherein the recess is defined by a bottom recess surface and a wall substantially surrounding the bottom recess surface.

5. The darkfield illuminator of claim 4 , wherein the bottom recess surface includes a first surface portion that is angled with respect to a surface to be illuminated.

6. The darkfield illuminator of claim 5 , wherein the light heads are attached to the first surface portion in a substantially circular arrangement, and are configured to provide light from the fiber optic lines toward a center of the substantially circular arrangement.

7. The darkfield illuminator of claim 1 , wherein the plurality of light heads includes at least eight light heads.

8. The darkfield illuminator of claim 1 , wherein the plurality of fiber optic lines held by each of the light heads includes a plurality of fiber optic lines that are arranged in a light line configuration, such that the plurality of light heads provides a corresponding plurality of lines of light.

9. The darkfield illuminator of claim 1 , wherein the base is less than about one-half inch in height.

10. The darkfield illuminator of claim 1 , wherein the base is about 0.35 inches in height.

11. An automated inspection system for inspecting a substrate, comprising:

a darkfield illumination device for illuminating the substrate with darkfield illumination, the darkfield illumination device including a base having a recess formed therein, the base including a bottom surface at a bottom of the recess, the bottom surface including a first surface portion that is angled with respect to a surface to be illuminated, the darkfield illumination device including a plurality of light heads attached to the first surface portion in a substantially circular arrangement, the light heads each including a plurality of fiber optic lines for providing light toward a center of the substantially circular arrangement at an angle corresponding to the angle of the first surface portion;

a substrate provider for providing the substrate within the substantially circular arrangement of light heads;

a visual inspection device for capturing images of the substrate provided by the substrate provider; and

a controller for identifying defects in the substrate based on the captured images.

12. The automated inspection system of claim 11 , wherein the recess is substantially cylindrical in shape.

13. The automated inspection system of claim 11 , wherein the plurality of light heads includes at least eight light heads.

14. The automated inspection system of claim 11 , wherein the plurality of fiber optic lines in each of the light heads are arranged in a light line configuration, such that the plurality of light heads provide a corresponding plurality of lines of light.

15. The automated inspection system of claim 11 , wherein the darkfield illumination device is configured to strobe based on a velocity of the substrate.

16. A method of providing darkfield illumination, the method comprising:

providing a base having a recess formed therein, the recess defined by a bottom surface and a wall substantially surrounding the bottom surface, the bottom surface including a first surface portion that is angled with respect to a surface to be illuminated;

attaching a plurality of light heads to the first surface portion in a substantially circular arrangement, the light heads each including a plurality of fiber optic lines; and

transmitting light through the fiber optic lines of each light head, thereby providing darkfield light toward a center of the substantially circular arrangement at an angle corresponding to the angle of the first surface portion.

17. An illuminator comprising:

a base with multiple separate and distinct light heads attached thereto; and

a plurality of fiber optics lines provided in each of the multiple heads for providing darkfield illumination.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 2, 2020
From: RUDOLPH TECHNOLOGIES, INC.
To: ONTO INNOVATION INC.
Reel/Frame 053117/0623 →