Apparatuses and methods for cleaning test probes
View Patent ↗Apparatuses and methods for cleaning test probes used in a semiconductor testing machine of the type having a plurality of test probes configured to contact the surface of a semiconductor wafer to test one or more dies formed thereon. In one embodiment, the apparatus includes a roller-support arm and a cylindrical roller supported by the roller-support arm. The roller has an outer surface comprising a sticky material. Debris on the probes will adhere to the sticky material as roller is rolled across tips of the probes. The probes are thereby cleaned.
1. An apparatus for cleaning comprising:
a loosening means for loosening debris from electrically conductive probes extending from a probe card and comprising contact tips for contacting and establishing electrical connections with semiconductor dies; and
a roller having an outer surface comprising a sticky material,
wherein the loosened debris will adhere to the sticky material as the outer surface of the roller is rolled across the tips of the probes.
2. The apparatus of claim 1 , wherein the loosening means comprises a second roller having a bristled outer surface, and wherein the debris is loosened from the probes as the outer surface of the second roller is rolled across the tips of the probes.
3. The apparatus of claim 1 , wherein the loosening means comprises a block having a bristled top surface, and the debris is loosened from the probes as the bristled top surface of the block is moved in a horizontal direction along the tips of the probes.
4. An apparatus for cleaning probes that extend from a probe card used for testing one or more semiconductor dies, comprising:
a loosening means for loosening debris from the probes; and
a roller having an outer surface comprising a sticky material,
wherein the loosened debris will adhere to the sticky material as the outer surface of the roller is rolled across tips of the probes,
wherein the loosening means comprises a second roller having an outer surface comprising an abrasive material, and wherein the debris is loosened from the probes as the outer surface of the second roller is rolled across the tips of the probes.
5. An apparatus for cleaning probes that extend from a probe card used for testing one or more semiconductor dies, comprising:
a loosening means for loosening debris from the probes; and
a roller having an outer surface comprising a sticky material,
wherein the loosened debris will adhere to the sticky material as the outer surface of the roller is rolled across tips of the probes,
wherein the loosening means comprises a block having an abrasive top surface, and the debris is loosened from the probes as the abrasive top surface of the block is moved in a horizontal direction along the tips of the probes.
6. An apparatus for cleaning probes that extend from a probe card used for testing one or more semiconductor dies, comprising:
a loosening means for loosening debris from the probes; and
a roller having an outer surface comprising a sticky material,
wherein the loosened debris will adhere to the sticky material as the outer surface of the roller is rolled across tips of the probes,
wherein the loosening means comprises an abrading pad, and the debris is loosened from the probes as the abrading pad is repeatedly moved in a vertical direction against and away from the tips of the probes.