Thin film solar cells by selenization sulfurization using diethyl selenium as a selenium precursor
View Patent ↗A method of forming a CIGSS absorber layer includes the steps of providing a metal precursor, and selenizing the metal precursor using diethyl selenium to form a selenized metal precursor layer (CIGSS absorber layer). A high efficiency solar cell includes a CIGSS absorber layer formed by a process including selenizing a metal precursor using diethyl selenium to form the CIGSS absorber layer.
1. A method of forming a CIGSS absorber layer, comprising the steps of:
forming a metal precursor;
homogenizing said metal precursor at a temperature sufficient for homogenizing said metal precursor but below a melting point of indium;
after said homogenizing, selenizing said metal precursor using diethyl selenium to form a selenized metal precursor layer (CIGSS absorber layer), wherein a flow of said diethyl selenium to begin said selenizing is first initiated before said metal precursor reaches said melting point temperature of indium; and
further comprising the step of removal of gases during a cooling cycle after said selenization step when said temperature is above 450° C.
2. The method of claim 1 , wherein said metal precursor comprises Cu—In—Ga.
3. The method of claim 1 , wherein said homogenizing is performed in an inert atmosphere.
4. The method of claim 1 , wherein said selenizing further comprises heating said metal precursor while flowing said diethyl selenium to reach a temperature above 450° C. for a sufficient time to complete formation of said CIGSS layer.
5. The method of claim 1 , further comprising the step of annealing said CIGSS layer in a sulfur comprising ambient, wherein a selenized CIGSS absorber layer is formed.
6. The method of claim 1 , further comprising the steps of:
providing a substrate, and depositing a back contact layer prior to forming said CIGSS absorber layer, wherein said CIGSS absorber layer is formed on said back contact layer,
depositing a heterojunction partner layer on said CIGSS absorber layer,
depositing an optically transparent and conducting window layer on said heterojunction partner layer, and
forming contact fingers on said optically transparent and conducting window layer, wherein a solar cell is formed.
7. The method of claim 1 , wherein all components of said metallic precursor are deposited by a sputtering process.
8. The method of claim 1 , wherein said temperature sufficient for homogenizing said metal precursor but below a melting point of indium comprises 120 to 140° C.