Patent Application
Utility
App. No. 11/759,768
· Confirmation No. 6844
ION IMPLANTATION DEVICE AND A METHOD OF SEMICONDUCTOR MANUFACTURING BY THE IMPLANTATION OF IONS DERIVED FROM CARBORANE MOLECULAR SPECIES
Abandoned -- After Examiner's Answer or Board of Appeals Decision
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Code | Description | Pages | ||
|---|---|---|---|---|---|
| 2016-06-08 | ABN |
Abandonment | 2 | View | |
| 2016-03-23 | APDA |
Patent Board Decision - Examiner Affirmed | 6 | View | |
| 2014-03-20 | AP_DK_M |
Appeal Docketing Notice | 2 | View | |
| 2014-02-20 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2014-02-03 | APRB |
Reply Brief Filed | 3 | View | |
| 2014-02-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2013-12-03 | APEA |
Examiner's Answer to Appeal Brief | 13 | View | |
| 2013-09-03 | AP.B |
Appeal Brief Filed | 22 | View | |
| 2013-09-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2013-09-03 | TRAN.LET |
Transmittal Letter | 2 | View | |
| 2013-08-12 | APBD |
Notice - Defective Appeal Brief | 3 | View | |
| 2013-08-07 | AP.B |
Appeal Brief Filed | 18 | View | |
| 2013-08-07 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-08-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2013-01-07 | N/AP |
Notice of Appeal Filed | 1 | View | |
| 2013-01-07 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2013-01-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-08-07 | CTFR |
Final Rejection | 12 | View | |
| 2012-08-07 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2012-05-10 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2012-05-10 | CLM |
Claims | 5 | View | |
| 2012-05-10 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2012-05-10 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2012-05-10 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2012-05-10 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2011-11-10 | CTNF |
Non-Final Rejection | 11 | View | |
| 2011-11-10 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2011-07-19 | RCEX |
Request for Continued Examination (RCE) | 1 | View | |
| 2011-07-19 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2011-07-19 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2011-07-19 | AMSB |
Amendment Submitted/Entered with Filing of Continued Prosecution Application (CPA)/Request for Continued Examination(RCE) | 1 | View | |
| 2011-07-19 | CLM |
Claims | 4 | View | |
| 2011-07-19 | REM |
Applicant Arguments/Remarks Made in an Amendment | 5 | View | |
| 2011-07-19 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2011-01-19 | CTFR |
Final Rejection | 12 | View | |
| 2011-01-19 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2011-01-10 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2011-01-10 | CLM |
Claims | 4 | View | |
| 2011-01-10 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2011-01-10 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2011-01-10 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2011-01-10 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2010-08-10 | CTNF |
Non-Final Rejection | 11 | View | |
| 2010-08-10 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2010-08-03 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2010-08-03 | CLM |
Claims | 4 | View | |
| 2010-08-03 | REM |
Applicant Arguments/Remarks Made in an Amendment | 1 | View | |
| 2010-08-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-08-03 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2010-07-29 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2010-07-29 | NTC.A.NONCPL |
Notice to the applicant regarding a non-compliant or non-responsive amendment | 2 | View | |
| 2010-07-26 | RCEX |
Request for Continued Examination (RCE) | 1 | View | |
| 2010-07-26 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2010-07-26 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2010-07-26 | CPA-AMD |
Notice of Informal or Non-Responsive Continued Prosecution Application (CPA) Amendment | 1 | View | |
| 2010-07-26 | CLM.NE |
Claim-Amendment Not Entered | 4 | View | |
| 2010-07-26 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2010-03-25 | CTFR |
Final Rejection | 11 | View | |
| 2010-03-25 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2010-03-25 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2010-02-09 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2010-02-09 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2010-02-09 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2010-02-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-12-28 | A... |
Amendment/Request for Reconsideration-After Non-Final Rejection | 1 | View | |
| 2009-12-28 | CLM |
Claims | 4 | View | |
| 2009-12-28 | REM |
Applicant Arguments/Remarks Made in an Amendment | 4 | View | |
| 2009-12-28 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2009-12-28 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2009-12-28 | WFEE |
Fee Worksheet (SB06) | 1 | View | |
| 2009-06-26 | CTNF |
Non-Final Rejection | 10 | View | |
| 2009-06-26 | 892 |
List of references cited by examiner | 1 | View | |
| 2009-06-26 | SRNT |
Examiner's search strategy and results | 4 | View | |
| 2009-06-26 | SRFW |
Search information including classification, databases and other search related notes | 1 | View | |
| 2009-06-26 | 1449 |
List of References cited by applicant and considered by examiner | 3 | View | |
| 2009-06-26 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2009-06-26 | 1449 |
List of References cited by applicant and considered by examiner | 1 | View | |
| 2009-05-27 | STATUS.LET |
Request for status of Application | 1 | View | |
| 2009-05-27 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2008-12-11 | NTC.PUB |
Notice of Publication | 1 | View | |
| 2008-11-26 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 2 | View | |
| 2008-11-26 | DRW |
Drawings-only black and white line drawings | 14 | View | |
| 2008-11-26 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2008-10-09 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2008-10-09 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2008-10-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2008-01-08 | CFILE |
Request for Corrected Filing Receipt | 3 | View | |
| 2008-01-08 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2007-12-10 | LET. |
Miscellaneous Incoming Letter | 4 | View | |
| 2007-12-10 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2007-12-07 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2007-12-04 | PEFR |
Applicant Response to Pre-Exam Formalities Notice | 5 | View | |
| 2007-12-04 | DRW |
Drawings-only black and white line drawings | 13 | View | |
| 2007-12-04 | OATH |
Oath or Declaration filed | 3 | View | |
| 2007-12-04 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2007-12-04 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2007-12-03 | PA.. |
Power of Attorney | 2 | View | |
| 2007-12-03 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2007-07-09 | TRAN.LET |
Transmittal Letter | 3 | View | |
| 2007-07-09 | IDS |
Information Disclosure Statement (IDS) Form (SB08) | 1 | View | |
| 2007-07-09 | FOR |
Foreign Reference | 3 | View | |
| 2007-07-09 | FOR |
Foreign Reference | 2 | View | |
| 2007-07-09 | N417 |
Electronic Filing System Acknowledgment Receipt | 2 | View | |
| 2007-07-06 | APP.FILE.REC |
Filing Receipt | 3 | View | |
| 2007-07-06 | PEFN |
Pre-Exam Formalities Notice | 2 | View | |
| 2007-06-07 | SPEC |
Specification | 28 | View | |
| 2007-06-07 | CLM |
Claims | 4 | View | |
| 2007-06-07 | ABST |
Abstract | 1 | View | |
| 2007-06-07 | DRW |
Drawings-only black and white line drawings | 14 | View | |
| 2007-06-07 | OATH |
Oath or Declaration filed | 3 | View | |
| 2007-06-07 | WFEE |
Fee Worksheet (SB06) | 2 | View | |
| 2007-06-07 | N417 |
Electronic Filing System Acknowledgment Receipt | 3 | View | |
| 2007-06-07 | WFEE |
Fee Worksheet (SB06) | 1 | View |
Inventors
Thomas N. Horsky
Boxborough, MA
Dale C. Jacobson
Salem, NH
Attorneys & Agents of Record
Classification
USPC
438/514
H10P30/204
H10P30/21
H10D30/601
H10D30/0227
H10P30/224
H10P30/225
H10P30/28
H01J37/08
H01J37/3171
H01J2237/08
H01J2237/0815
H01J2237/082
Prosecution
- Examiner
- SMITH, BRADLEY
- Art Unit
- 2817
- Customer No.
- 27160
- Docket No.
- 211843-00078
- Confirmation No.
- 6844
Publication
- Pub. No.
- US20080305598A1
- Pub. Date
- 2008-12-11
RELEASE OF SECURITY INTEREST
Recorded 2008-08-13
from
SEMEQUIP, INC.
SECURITY AGREEMENT
Recorded 2008-07-28
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded 2007-12-03
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Quick Facts
- App. No.
- 11/759,768
- Filed
- 2007-06-07
- Pub. No.
- US20080305598A1
- Examiner
- SMITH, BRADLEY
- Art Unit
- 2817
External Links