Flexible manifold for integrated gas system gas panels

1. A flexible gas delivery apparatus, comprising:

a gas panel having a first gas stick and a last gas stick, each of the gas sticks having a plurality of gas delivery components thereon;

a plurality of manifold blocks interconnected to form a substrate, each of the plurality of manifold blocks coupled to one of the plurality of gas delivery components;

a base plate having an upper surface and a lower surface, the upper surface of the base plate coupled to a bottom surface of the substrate;

a mixing manifold positioned at the upper surface of the base plate to connect a plurality of mixing valves on the substrate in parallel; and

a pump/purge manifold positioned on the upper surface of the base plate to connect a plurality of pump/purge valves on the substrate in parallel;

wherein the first gas stick further comprises:

a first extension block having a first section and a second section, the first section positioned between a purge valve and the substrate having a discharge port in fluid communication with the pump/purge manifold,

a second extension block having a first section and second section, the first section positioned between a mixing valve and the substrate having an exit port in fluid communication with the mixing manifold; and

wherein the second portion of the first and second extension blocks extend outwardly from the gas panel.

2. The apparatus of claim 1 , wherein the mixing manifold is a mixing manifold and the pump/purge manifold is a purge manifold.

3. The apparatus of claim 1 , wherein the last gas stick further comprises:

a third extension block having a first section and second section, the first section positioned between a mixing valve and the substrate having an exit port in fluid communication with the mixing manifold; and

a fourth extension block having a first section and a second section, the first section positioned between a purge valve and the substrate having a discharge port in fluid communication with the pump/purge manifold,

wherein the second portion of the third and fourth extension blocks extend outwardly from the gas panel configured to be fluidly coupled to a second single gas stick.

4. The apparatus of claim 3 , wherein the third extension and fourth extension blocks further comprise a plurality of sections coupled to the second section.

5. The apparatus of claim 3 , wherein each section of the first extension block and the third extension block further comprises:

an entrance port in fluid communication with the substrate,

wherein the exit port accesses a horizontal secondary manifold in the extension block.

6. The apparatus of claim 3 , wherein each section of the second extension block and the fourth extension block further comprises:

an entrance port and exit port in fluid communication with the substrate,

wherein the discharge port accesses a horizontal secondary manifold passageway in the extension block.

7. The apparatus of claim 1 , wherein the first extension and second extension blocks further comprise a plurality of sections coupled to the second section.

8. The apparatus of claim 1 , wherein the base plate further comprises:

a first plurality of input/output ports in fluid communication with the plurality of mixing valves and the exit port; and

a second plurality of input/output ports in fluid communication with the plurality of purge valves and the discharge port.

9. The apparatus of claim 1 , wherein the mixing manifold is parallel to the pump/purge manifold.