Semiconductor device having adhesion increasing film to prevent peeling
View Patent ↗A semiconductor device includes at least one semiconductor constructing body provided on one side of a base member, and having a semiconductor substrate and a plurality of external connecting electrodes provided on the semiconductor substrate. An insulating layer is provided on the one side of the base member around the semiconductor constructing body. An adhesion increasing film is formed between the insulating layer, and at least one of the semiconductor constructing body and the base member around the semiconductor constructing body, for preventing peeling between the insulating layer and the at least one of the semiconductor constructing body and base member.
1. A semiconductor device fabrication method comprising:
separately arranging a plurality of semiconductor constructing bodies on an upper surface of a base member, each semiconductor constructing body including a semiconductor substrate, a plurality of external connecting electrodes provided on the semiconductor substrate, and a sealing film which covers peripheral surfaces of the external connecting electrodes;
forming a first adhesion increasing film on peripheral side surfaces of the semiconductor substrate and the sealing film of each semiconductor constructing body, and forming a second adhesion increasing film continuously with the first adhesion increasing film on the upper surface of the base member, wherein the first and second adhesion increasing films are made of a silane coupling agent;
attaching an insulating layer onto the upper surface of the base member by the first and second adhesion increasing films, such that the first adhesion increasing film is positioned between the insulating layer and the peripheral side surfaces of the semiconductor substrate and the sealing film; and
obtaining a plurality of semiconductor devices including at least one semiconductor constructing body by cutting the base member and insulating layer between the plurality of semiconductor constructing bodies.
2. A method according to claim 1 , wherein arranging said plurality of semiconductor constructing bodies includes arranging the semiconductor constructing bodies on the base member via another adhesion increasing film and an adhesive layer formed between the base member and the semiconductor constructing bodies.
3. A method according to claim 1 , wherein the semiconductor constructing body includes a plurality of columnar electrodes as the external connecting electrodes.
4. A method according to claim 1 , further comprising forming an upper insulating layer which covers the semiconductor constructing bodies and the insulating layer, and forming, on the upper insulating layer, at least one upper interconnecting layer electrically connected to the external connecting electrodes.
5. A method according to claim 1 , wherein the silane coupling agent is made of a material having (C n H 2n+1 O) m —Si— (wherein n, m=1, 2, 3) in a molecule.
6. A method according to claim 2 , wherein arranging said plurality of semiconductor constructing bodies includes arranging the semiconductor constructing bodies on the base member via said another adhesion increasing film, the adhesive layer, and a further adhesion increasing film.
7. A method according to claim 4 , further comprising forming an uppermost insulating film which covers a portion except for a connecting pad portion of an uppermost interconnecting layer of the at least one upper interconnecting layer.
8. A method according to claim 7 , further comprising forming a solder ball on the connecting pad portion of the uppermost interconnecting layer.
9. A method according to claim 8 , further comprising forming a third adhesion increasing film on each of the semiconductor constructing bodies before the upper insulating layer is formed.