IP Library Granted Patent US 8,110,906
Granted Patent B2
US 8,110,906 · App. 11/778,427 · Granted Feb 7, 2012

Semiconductor device including isolation layer

Assignee: Infineon Technologies AG
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Quick Facts
Patent No.
US 8,110,906
App. No.
11/778,427
Granted
Feb 7, 2012
Kind
B2
Abstract

A semiconductor device includes a carrier, a semiconductor chip including an active area on a first face and a separate isolation layer applied to a second face, and an adhesion material coupling the isolation layer to the carrier with the second face facing the carrier.

Claims (32)

1. A semiconductor device comprising:

a carrier;

a semiconductor chip including an active area on a first face and a separate isolation layer on an opposing second face, the isolation layer comprising a Parylene layer; and

an adhesion material coupling the isolation layer to the carrier with the second face facing the carrier.

2. The semiconductor device of claim 1 , wherein the carrier comprises a leadframe including one of a quad flat, a dual small outline, and a thin shrink small outline package.

3. The semiconductor device of claim 1 , wherein the carrier comprises a leadless package including one of a quad flat no-lead package and a thin small leadless package.

4. The semiconductor device of claim 1 , further comprising:

a power chip coupled to the carrier; and

wherein the semiconductor chip comprises a control chip and the adhesion material couples an entirety of the isolation layer of the control chip to the carrier, the power chip maintained at a voltage potential relative to the control chip and electrically connected to a contact of the control chip by a connector.

5. The semiconductor device of claim 1 , wherein Si—O—Si bonds couple the isolation layer to the second face of the semiconductor chip.

6. The semiconductor device of claim 1 , wherein an adhesion layer is disposed between the second face of the chip and the isolation layer, the adhesion layer including an aluminum layer disposed on the second face, a titanium layer disposed on the aluminum layer, and a nickel layer disposed between the titanium layer and the isolation layer.

7. A semiconductor device comprising:

a carrier;

a power chip coupled to the carrier;

a semiconductor chip including a substrate surface, a first surface separated from the substrate surface and including an active area, and an insulating layer applied to the substrate surface, the insulating layer comprising a Parylene layer;

an adhesion layer coupling the insulating layer of the semiconductor chip to the carrier; and

wherein the power chip is configured to be maintained at a voltage potential relative to the semiconductor chip and is electrically connected to a contact of the semiconductor chip by a connector.

8. The semiconductor device of claim 7 , wherein the substrate surface is oriented toward the carrier and the active area of the first surface is oriented away from the carrier.

9. The semiconductor device of claim 7 , wherein an area of the first surface is substantially equal to an area of the insulating layer, and an area of the adhesion layer is greater than the area of the first surface and greater than the area of the insulating layer.

10. The semiconductor device of claim 7 , wherein the insulating layer is applied to the substrate surface on a wafer level and is configured to electrically isolate the semiconductor chip from the carrier for drain potentials of between about 50-1000 volts.

11. A chip-by-chip die package comprising:

a conductive die pad;

a first chip electrically connected to the die pad;

a second chip bonded to the die pad by a bond layer, the second chip including an active surface, a substrate surface opposite the active surface, and an isolation layer coupled to the substrate surface, the isolation layer comprising a Parylene layer; and

wherein the isolation layer is disposed between the substrate surface of the second chip and the bond layer and is configured to electrically isolate the second chip from the die pad and the first chip.

12. The chip-by-chip die package of claim 11 , wherein the substrate surface of the second chip and the isolation layer coupled to the substrate surface comprise substantially the same area.

13. A semiconductor device comprising:

an electrically conductive carrier;

a semiconductor chip including an active area on a first face and having an opposing passive second face;

a glass isolation layer coupled to the second face of the semiconductor chip with Si—O—Si bonds at an interface between the glass isolation layer and the second face of the semiconductor chip; and

an adhesion material coupling the glass isolation layer to the carrier, wherein the glass isolation layer electrically isolates the semiconductor chip from the carrier.

14. The semiconductor device of claim 13 , including an adhesion layer is disposed between the second face of the chip and the isolation layer, the adhesion layer including an aluminum layer disposed on the second face, a titanium layer disposed on the aluminum layer, and a nickel layer disposed between the titanium layer and the isolation layer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 18, 2007
From: MAHLER, JOACHIM; YONG, WAE CHET; DORAISAMY, STANLEY JOB; DEML, GERHARD; FISCHER, RUPERT; ENGL, REIMUND
To: INFINEON TECHNOLOGIES AG
Reel/Frame 019979/0259 →
Continuity (2)
Continuation In Part 11626091 · Jan 23, 2007
Related Publication 20080173992A1 · Jul 24, 2008