Surface mountable transducer system
View Patent ↗The present invention relates to a surface mountable acoustic transducer system, comprising one or more transducers, a processing circuit electrically connected to the one or more transducers, and contact points arranged on an exterior surface part of the transducer system. The contact points are adapted to establish electrical connections between the transducer system and an external substrate, the contact points further being adapted to facilitate mounting of the transducer system on the external substrate by conventional surface mounting techniques.
1. A method of fabricating a silicon condenser microphone, comprising:
etching an indentation into a first surface of a silicon-based carrier;
adding contact points to a second surface of said silicon-based carrier, said second surface being opposite to said first surface;
mounting a silicon-based transducer element onto said first surface of said silicon-based carrier such that said silicon-based transducer element overlaps at least a portion of said indentation to form a volume adjacent to said silicon-based transducer element;
mounting silicon-based processing circuitry onto said silicon-based carrier; and
electrically connecting said silicon-based processing circuitry to said contact points.
2. The method of claim 1 , wherein said mounting of said silicon-based processing circuitry includes flip-chip mounting said processing circuitry on said silicon-based carrier.
3. The method of claim 2 , wherein said electrically connecting includes etching a feed-through opening between said first and second surfaces and adding a metallic layer within said feed-though opening.
4. The method of claim 1 , further comprising forming a cover over said silicon-based transducer element.
5. The method of claim 1 , further comprising hermetically sealing said silicon-based transducer element.
6. The method of claim 1 , further comprising surface mounting said carrier onto a printed circuit board via said contact points.
7. The method of claim 1 , wherein said mounting said silicon-based transducer element includes flip-chip mounting said silicon-based transducer element on said first surface.
8. The method of claim 7 , wherein said mounting of said silicon-based processing circuitry includes flip-chip mounting said silicon-based processing circuitry on said carrier.
9. The method of claim 1 , wherein said contact points are electrically conductive and said silicon-based transducer element includes a backplate and a diaphragm.
10. The method of claim 9 , wherein said electrically connecting includes etching a feed-through opening between said first and second surfaces and adding a metallic layer within said feed-though opening.