Silicon carbide with low nitrogen content and method for preparation
View Patent ↗A physical vapor deposition method of growing a crystal includes providing a seed crystal and a source material in spaced relation inside of a growth crucible that is at least in-part gas permeable to an unwanted gas. The growth chamber is heated whereupon the source material sublimates and is transported via a temperature gradient in the growth chamber to the seed crystal where the sublimated source material precipitates. Concurrent with heating the growth chamber, a purging gas is caused to flow inside or outside of the growth crucible in a manner whereupon the unwanted gas flows from the inside to the outside of the growth crucible via the gas permeable part thereof.
1. A physical vapor deposition method of growing a crystal comprising:
(a) providing a source crucible charged with source material inside of an enclosed growth crucible which at least in-part has a first permeability to an unwanted gas that is present in the charged growth crucible, wherein said part of the growth crucible has a second, lower permeability to sublimated source material;
(b) providing a seed crystal in the growth crucible in spaced relation to the source crucible;
(c) heating the interior of the growth crucible whereupon the source material is at a first temperature sufficient to sublimate the source material and the seed crystal is at a second, lower temperature sufficient to cause the sublimated source material to be transported to the seed crystal where the sublimated source material precipitates; and
(d) concurrent with step (c), causing a purging gas to flow either inside or outside of the growth crucible, which is also permeable to the purging gas, at a flow rate whereupon a concentration gradient of the unwanted gas forms across said part of the growth crucible, whereupon the unwanted gas flows from the inside to the outside of the growth crucible via said part of the growth crucible.
2. The method of claim 1 , wherein an exterior wall of the source crucible is spaced from an interior wall of the growth chamber.
3. The method of claim 1 , wherein, the unwanted gas is nitrogen, the purging gas is inert gas, or both.
4. The method of claim 1 , wherein growth crucible is made from graphite.
5. The method of claim 1 , wherein the source material and the seed crystal are made from SiC.
6. The method of claim 1 , wherein in step (d), the purging gas is caused to flow inside the growth crucible at a flow rate between 10 standard cubic centimeters per minute (sccm) and 200 sccm.
7. The method of claim 1 , wherein, when the purging gas is caused to flow outside of the growth crucible, the method further includes providing the growth crucible inside of an insulated chamber with an exterior wall of the growth crucible spaced from an interior wall of the chamber; and
causing the purging gas to flow through the space between the exterior wall of the growth crucible and the interior wall of the chamber.
8. The method of claim 7 , wherein the purging gas is caused to flow in said space at a flow rate between 100 sccm and 500 sccm.
9. The method of claim 1 , wherein the purging gas is comprised of at least one of the following: argon, helium, hydrogen, a Si-bearing gas, a C-bearing gas, a Cl-bearing gas and a F-bearing gas.
10. A physical vapor deposition method of growing a crystal comprising:
(a) providing a seed crystal and a source material in spaced relation inside of an enclosed growth crucible that at least in-part has a first permeability to an unwanted gas therein, wherein said part of the growth crucible has a second, lower permeability to sublimated source material;
(b) heating the growth chamber whereupon the source material sublimates and is transported via a temperature gradient in the growth chamber to the seed crystal where the sublimated source material precipitates; and
(c) concurrent with step (b), causing a purging gas to flow inside or outside of the growth crucible at a rate whereupon a concentration gradient of the unwanted gas forms across said part of the growth crucible, whereupon the unwanted gas flows from the inside to the outside of the growth crucible via said part of the growth crucible.
11. The method of claim 10 , wherein the purging gas is caused to flow inside the growth crucible at a rate between 10 standard cubic centimeters per minute (sccm) and 200 sccm.
12. The method of claim 10 , wherein the source material is disposed in a source crucible that is positioned inside the growth crucible.
13. The method of claim 12 , wherein at least an exterior wall of the source crucible is spaced from an interior wall of the growth crucible.
14. The method of claim 13 , wherein the purging gas is caused to flow outside the growth crucible at a rate between 100 standard cubic centimeters per minute (sccm) and 500 sccm between an exterior of the growth crucible and an interior of an insulated chamber in which the growth crucible is disposed.
15. The method of claim 14 , wherein the insulated chamber includes around the growth crucible a porous insulation that facilitates the flow of the purging gas.
16. The method of claim 10 , wherein the unwanted gas is nitrogen, the purging gas is inert gas, or both.
17. The method of claim 10 , wherein the growth crucible is comprised of graphite.
18. The method of claim 10 , wherein the source material and the seed crystal comprise SiC.
19. The method of claim 10 , wherein the purging gas is comprised of at least one of the following: argon, helium, hydrogen, silicon, carbon, chlorine and fluorine.