Method of preventing dielectric breakdown of semiconductor device and semiconductor device preventing dielectric breakdown
A semiconductor device that prevents a build-up of electrostatic charge in a dummy pad is provided. The semiconductor device may contain an internal circuit formed on a semiconductor substrate and the dummy pad which is not electrically connected to the internal circuit. The semiconductor device may further include a seal ring that surrounds the internal circuit and the dummy pad, where the seal ring is electrically connected to the semiconductor substrate and includes a pattern in a first metal layer, a contact between the pattern in the first metal layer and the semiconductor substrate, patterns in upper metal layers stacked above the pattern in the first metal layer, and multiple electrical contacts between the patterns in the first metal layer and the upper metal layers, in which the dummy pad is electrically connected to the seal ring.
1. A semiconductor device comprising:
an internal circuit formed on a semiconductor substrate;
a dummy pad which is not electrically connected to the internal circuit; and
a seal ring that surrounds the internal circuit and the dummy pad, where the seal ring is electrically connected to the semiconductor substrate and includes a pattern in a first metal layer, a contact between the pattern in the first metal layer and the semiconductor substrate, patterns in a plurality of upper metal layers stacked above the pattern in the first metal layer, and a plurality of contacts between the patterns in the first metal layer and the plurality of upper metal layers,
wherein the dummy pad is electrically connected to the seal ring.
2. The semiconductor device according to claim 1 , wherein the dummy pad includes a plurality of proximately located dummy pads.
3. The semiconductor device according to claim 1 , wherein the plurality of upper metal layers includes a top metal layer and a below-the-top metal layer disposed immediately below the top metal layer, where the dummy pad is formed in one of the top and the below-the-top metal layers and is electrically connected to the seal ring through an electrical conductor in the one of the top metal layer and the below-the-top metal layer.
4. A method of preventing a defect of a semiconductor device caused by an electrostatic charge stored in a dummy pad, comprising:
forming an internal circuit of the semiconductor device on the semiconductor substrate;
forming a dummy pad which is not electrically connected to the internal circuit;
forming a seal ring that surrounds the internal circuit and the dummy pad, where the seal ring is electrically connected to the semiconductor substrate and includes a pattern in a first metal layer, a contact between the pattern in the first metal layer and the semiconductor substrate, patterns in a plurality of upper metal layers stacked above the pattern in the first metal layer, and a plurality of contacts between the patterns in the first metal layer and the plurality of upper metal layers; and
electrically connecting the dummy pad to the seal ring.
5. The method according to claim 4 , wherein the dummy pad includes a plurality of proximately located dummy pads.
6. The method according to claim 4 , wherein the plurality of upper metal layers includes a top metal layer and a below-the-top metal layer disposed immediately below the top metal layer, where the dummy pad is formed in one of the top and the below-the-top metal layers and is electrically connected to the seal ring through an electrical conductor in the one of the top metal layer and the below-the-top metal layer.