Member for semiconductor device and production method thereof
A member for a semiconductor device of low price, capable of forming a high quality plating layer on a surface, having heat conductivity at high temperature (100° C.) of more than or equal to 180 W/m·K and toughness that will not cause breaking due to screwing, and will not cause solder breaking due to heat stress when it is bonded to other member with solder, and a production method thereof are provided. A member for a semiconductor device ( 1 ) having a coefficient of thermal expansion ranging from 6.5×10 −6 /K to 15×10 −6 /K inclusive, and heat conductivity at 100° C. of more than or equal to 180 W/m·K, has: a base material ( 11 ) formed of an aluminum-silicon carbide composite material starting from powder material in which particulate silicon carbide is dispersed in aluminum or aluminum alloy, and the content of the silicon carbide is from 30% by mass to 85% by mass inclusive; and a superficial layer ( 12 ) containing aluminum or aluminum alloy starting from a melt material bonded on top and bottom faces of the base material ( 11 ).
1. method of producing a member for a semiconductor device comprising the steps of:
preparing mixed powder by mixing powder of aluminum or aluminum alloy and powder of silicon carbide so that the content of the silicon carbide is from 30% by mass to 85% by mass inclusive;
obtaining a molded body by molding while placing the mixed powder between first and second plates of aluminum or aluminum alloy which have in advance been subjected to a rolling process after solidification from a molten state; and
compressing the molded body by heating the molded body to a temperature of (Tm-100)° C. or higher and lower than Tm° C. when the melting point or solidus temperature of the plates is denoted by Tm° C.
2. The method of producing a member for a semiconductor device according to claim 1 , wherein the average thickness of the first and second melt materials is from 0.1 mm to 2.0 mm inclusive.
3. The method of producing a member for a semiconductor device according to claim 1 , wherein the molding pressure in the step of obtaining a molded body is more than or equal to (2×98) MPa.
4. The method of producing a member for a semiconductor device according to claim 1 , further comprising, between the step of obtaining a molded body and the step of compressing, the step of obtaining a heat-treated body by subjecting the molded body to heat treatment in non-oxidizing atmosphere at a temperature of (Tm-300)° C. or higher and lower than Tm° C. when the melting point or solidus temperature of aluminum or aluminum alloy is denoted by Tm° C.
5. The method of producing a member for a semiconductor device according to claim 1 , wherein the step of compressing is conducted in non-oxidizing atmosphere.
6. A method of producing a member for a semiconductor device comprising the steps of:
preparing mixed powder by mixing powder of aluminum or aluminum alloy and powder of silicon carbide so that the content of silicon carbide is from 30% by mass to 85% by mass inclusive;
obtaining a molded body by molding while placing the mixed powder between first and second plates of aluminum or aluminum alloy which have in advance been subjected to a rolling process after solidification from a molten state; and
heating and rolling the molded body at a temperature of (Tm-300)° C. or higher and lower than Tm° C. when the melting point or solidus temperature of aluminum or aluminum alloy is denoted by Tm° C.
7. The method of producing a member for a semiconductor device according to claim 6 , wherein the average thickness of the first and second melt materials is from 0.1 mm to 2.0 mm inclusive.
8. The method of producing a member for a semiconductor device according to claim 6 , wherein the molding pressure in the step of obtaining a molded body is more than or equal to (2×98) MPa.
9. The method of producing a member for a semiconductor device according to claim 6 , further comprising, between the step of obtaining a molded body and the step of heating and rolling, the step of obtaining a heat-treated body by subjecting the molded body to heat treatment in non-oxidizing atmosphere at a temperature of (Tm-300)° C. or higher and lower than Tm° C. when the melting point or solidus temperature of the melt material is denoted by Tm° C.
10. The method of producing a member for a semiconductor device according to claim 6 , wherein the step of heating and rolling is conducted in non-oxidizing atmosphere.