Image inspection method and image inspection apparatus employing the same
The method comprises a first step (S 1 in FIG. 1 ) of obtaining a transmission image, a second step (S 2 ) of applying a quadratic differential filter to the transmission image, thereby to emphasize a part of large luminance change as a quadratic differential filter image, a third step (S 3 ) of binarizing the quadratic differential filter image with a predetermined threshold value, and then storing the resulting binarized image, a fourth step (S 4 ) of binarizing the transmission image with another predetermined threshold value, and then storing the resulting binarized image, a fifth step (S 5 ) of performing the measurement of binary feature quantities for the binarized image stored at the third step (S 3 ) and the binarized image stored at the fourth step (S 4 ), and a sixth step (S 6 ) of deciding the quality of the object to-be-inspected from the binary feature quantities.
1. An image inspection method wherein an object to-be-inspected is illuminated by transmission illumination means, and illumination light transmitted through the object to-be-inspected is imaged as a transmission image by imaging means, so as to inspect the object to-be-inspected, comprising:
a first step of imaging the transmission image;
a second step of applying a quadratic differential filter to the transmission image, thereby to convert the transmission image into a quadratic differential filter image;
a third step of binarizing the quadratic differential filter image with a predetermined threshold value, thereby to convert the quadratic differential filter image into a first binarized image;
a fourth step of binarizing the transmission image with another predetermined threshold value, thereby to convert the transmission image into a second binarized image;
a fifth step of performing a binary feature quantity measurement for the first binarized image and the second binarized image, thereby to calculate binary feature quantities; and
a sixth step of deciding a quality of the object to-be-inspected from the binary feature quantities.
2. An image inspection method as defined in claim 1 , wherein at the second step, quadratic differential values are computed by making a difference distance variable.
3. An image inspection method as defined in claim 1 , wherein a luminance conversion step of normalizing a luminance by using a mean luminance of the transmission image is added after the first step.
4. An image inspection method as defined in claim 1 , wherein a step of converting a luminance of the transmission image by employing a minimum filter or/and an average filter is added after the first step.
5. An image inspection method as defined in claim 1 , wherein an inspection region of the object to-be-inspected is computed using the transmission image, before the fifth step, and the binary feature quantity measurement is not performed in any region other than the inspection region, at the fifth step.
6. An image inspection apparatus wherein an object to-be-inspected is illuminated by transmission illumination means, and illumination light transmitted through the object to-be-inspected is imaged as a transmission image by imaging means, so as to inspect the object to-be-inspected, comprising:
an image memory in which the transmission image is stored;
image processing means for applying a quadratic differential filter to the transmission image, thereby to convert the transmission image into a quadratic differential filter image, for binarizing the quadratic differential filter image with a predetermined threshold value, thereby to convert the quadratic differential filter image into a first binarized image, for binarizing the transmission image with another predetermined threshold value, thereby to convert the transmission image into a second binarized image, and for performing a binary feature quantity measurement for the first binarized image and the second binarized image, thereby to calculate binary feature quantities; and
decision means for deciding a quality of the object to-be-inspected from the binary feature quantities.