Electrostatic discharge protection device

1. An electrostatic discharge protection circuit, comprising:

a first bipolar transistor including one terminal connected with a first power supply terminal, another terminal connected with an input/output terminal, and a control terminal connected with a second power supply terminal; and

a thyristor including one terminal connected with the input/output terminal, another terminal connected with the second power supply terminal, and a control terminal connected with the first power supply terminal,

wherein the first bipolar transistor is formed in a first conductivity type well, and a region of the other terminal of the first bipolar transistor, which is connected with the input/output terminal includes a second-conductivity-type first diffusion region, and a second-conductivity-type second diffusion region formed entirely below the second-conductivity-type first diffusion region, the second conductivity-type second diffusion region having an impurity concentration less than an impurity concentration of the second-conductivity-type first diffusion region.

2. The electrostatic discharge protection circuit according to claim 1 , wherein the thyristor includes:

a second bipolar transistor including one terminal connected with the input/output terminal, another terminal connected with the second power supply terminal, and a control terminal connected with a trigger element and the first power supply terminal; and

a third bipolar transistor including one terminal connected with the second power supply terminal, the other terminal connected with the control terminal of the second bipolar transistor, and a control terminal connected with the second power supply terminal.

3. The electrostatic discharge protection circuit according to claim 2 , wherein the first bipolar transistor is formed in a first conductivity type well, and a region of the other terminal of the first bipolar transistor, which is connected with the input/output terminal includes a second-conductivity-type first diffusion region, and a second-conductivity-type second diffusion region with an impurity concentration less than an impurity concentration of the first diffusion region.

4. The electrostatic discharge protection circuit according to claim 2 , wherein the second bipolar transistor is formed in a second conductivity type well, and a region of the other terminal of the second bipolar transistor, which is connected with the input/output terminal includes a first-conductivity-type third diffusion region, and a first-conductivity-type fourth diffusion region with an impurity concentration less than an impurity concentration of the third diffusion region.

5. The electrostatic discharge protection circuit according to claim 1 , wherein the thyristor comprises:

a second bipolar transistor including one terminal connected with the input/output terminal, the other terminal connected with the second power supply terminal, and a control terminal connected with a trigger element and the first power supply terminal.

6. The electrostatic discharge protection circuit according to claim 5 , wherein the first bipolar transistor is formed in a first conductivity type well, and a region of the other terminal of the first bipolar transistor, which is connected with the input/output terminal includes a second-conductivity-type first diffusion region, and a second-conductivity-type second diffusion region with an impurity concentration less than an impurity concentration of the first diffusion region.

7. The electrostatic discharge protection circuit according to claim 1 , wherein the thyristor comprises a second bipolar transistor including one terminal connected with the input/output terminal and a control terminal connected with a trigger element and the first power supply terminal, and

wherein the first bipolar transistor is formed in a first conductivity type well, and a region of the other terminal of the first bipolar transistor, which is connected with the input/output terminal includes a second-conductivity-type first diffusion region.

8. The electrostatic discharge protection circuit according to claim 1 , wherein the second-conductivity-type second diffusion region is formed adjacent to and below the second-conductivity-type first diffusion region, and

wherein at least a portion of the second-conductivity-type first diffusion region is located inside the first conductivity type well.

9. The electrostatic discharge protection circuit according to claim 1 , wherein the second-conductivity-type second diffusion region is formed deeper in the first conductivity type well than a first or second conductivity type region of the one terminal of the first bipolar transistor, and

wherein a portion of the second-conductivity-type second diffusion region is formed in the first conductivity type well.

10. The electrostatic discharge protection circuit according to claim 1 , wherein the second-conductivity-type second diffusion region is formed deeper in the first conductivity type well than a first or second conductivity type region of the control terminal of the first bipolar transistor, and

wherein the first bipolar transistor comprises a predetermined parasitic diode formed between the other terminal and the control terminal.

11. An electrostatic discharge protection circuit, comprising:

a first bipolar transistor including one terminal connected with a first power supply terminal, the other terminal connected with an input/output terminal, and a control terminal connected with a second power supply terminal; and

a thyristor including one terminal connected with the input/output terminal, the other terminal connected with the second power supply terminal, and a control terminal connected with the first power supply terminal,

wherein the first bipolar transistor is formed in a first conductivity type well, and a buried region of the other terminal of the first bipolar transistor, which is connected with the input/output terminal includes a second-conductivity-type first diffusion region formed in an insulating region, and a second-conductivity-type second diffusion region with an impurity concentration less than an impurity concentration of the first diffusion region, the second-conductivity-type second diffusion region being formed at least in part in the first conductivity type well and positioned below the first diffusion region, and

wherein the first transistor comprises a predetermined parasitic diode.

12. The electrostatic discharge protection circuit according to claim 4 , wherein an impurity concentration of the second-conductivity-type second diffusion region of the first bipolar transistor is set to adjust a breakdown voltage of a first parasitic diode formed in the first bipolar transistor, such that a voltage at which the thyristor is turned on is less than the breakdown voltage of the first parasitic diode.

13. The electrostatic discharge protection circuit according to claim 11 , wherein an impurity concentration of the second-conductivity type second diffusion region of the first bipolar transistor is set to adjust a breakdown voltage of the predetermined parasitic diode formed in the first bipolar transistor, such that a voltage at which a continuity between a collector and emitter of the first bipolar transistor is ensured is less than the breakdown voltage of the predetermined parasitic diode.

14. The electrostatic discharge protection circuit according to claim 4 , wherein the first-conductivity-type fourth diffusion region of the second bipolar transistor is formed below the first-conductivity-type third diffusion region.

15. The electrostatic discharge protection circuit according to claim 1 , wherein the second power supply terminal comprises a ground potential terminal.