Electronic component, semiconductor device employing same, and method for manufacturing electronic component
Herein disclosed an electronic component having a passivation layer in which an opening that exposes a part of a pad electrode is formed, an underlying metal layer formed on the pad electrode and the passivation layer, and a barrier metal layer formed on the underlying metal layer for an external connection electrode, the electronic component including a recess or/and a projection configured to be provided under the barrier metal layer outside or/and inside the opening, the underlying metal layer being formed on the recess or/and the projection and having a surface shape that follows the recess or/and the projection.
1. An electronic component comprising;
a plurality of pad electrodes, wherein an underlying metal layer is formed over each pad electrode and extends over a portion of a passivation layer and a barrier metal layer is formed over the underlying metal layer;
wherein the underlying metal layer beneath an outer region of the barrier metal layer has a first portion that extends upward from the pad electrode and a second portion that extends laterally away from a center of the pad electrode and a third portion that extends downward from the second portion, the underlying metal layer following a contour of the passivation layer, and
further comprising a barrier structure substantially surrounding the pad electrode and being formed in a same layer as the pad electrode and wherein the passivation layer is formed over the barrier structure and an outer perimeter of the pad electrode.
2. A method for manufacturing an electronic component, comprising:
forming a passivation layer with an opening that exposes at least a part of a pad electrode,
forming an underlying metal layer on the pad electrode and a portion of the passivation layer, and forming a barrier metal layer on the underlying metal layer for an external connection electrode;
forming a recess or/and a projection under the barrier metal layer outside or/and inside the opening in a peripheral region of barrier metal layer; and
wherein the underlying metal layer is formed on the recess or/and the projection so that the underlying metal layer has a surface shape that follows the recess or/and the projection, and further comprising forming a barrier structure substantially surrounding the pad electrode in a same layer as the pad electrode and wherein the passivation layer is formed over the barrier structure and an outer perimeter of the pad electrode.