Composition for resist underlayer film and process for producing same
A composition for a resist underlayer film is provided. The composition has excellent storage stability and can form a resist underlayer film which has excellent adhesion to a resist film, can improve reproducibility of a resist pattern and is resistant to an alkaline liquid used in development and to oxygen ashing during the removal of a resist. The composition comprises a hydrolyzate and/or a condensate of a silane compound of the following formula (A), R 1 b R 2 c Si(OR 3 ) 4-a (A) wherein R 1 is a monovalent organic group having at least one unsaturated bond, R 2 individually represents a hydrogen atom, a halogen atom or a monovalent organic group, R 3 individually represents a monovalent organic group, R 1 is a group other than OR 3 , a is an integer of 1 to 3, b is an integer of 1 to 3, and c is an integer of 0 to 2, provided that a=b+c.
1. A composition for a resist underlayer film comprising a condensate of a mixture consisting of 5 to 90 mol % of at least one silane compound represented by the following formula (A), 5 to 90 mol % of at least one silane compound represented by the following formula (B) and 5 to 90 mol % of at least one silane compound represented by the following formula (C),
or
a condensate of a mixture consisting of 5 to 95 mol % of at least two silane compounds represented by the following formula (A) and 5 to 95 mol % of at least one silane compound represented by the following formula (C),
R 1 Si(OR 3 ) 3 (A)
wherein R 1 is a cyanoethyl group, 3-isocyanatepropyl group, or methacryloxypropyl group, and R 3 individually represents a monovalent organic group,
Si(OR 3 ) 4 (B)
wherein R 3 individually represents a monovalent organic group,
(R 4 ) d Si(OR 3 ) 4-d (C)
wherein R 3 individually represents a monovalent organic group, and R 4 individually represents a methyl group, an ethyl group, an n-propyl group, an iso-propyl group, an n-butyl group, a sec-butyl group or a tert-butyl group, and d is an integer of 1 to 3.
2. The composition for a resist underlayer film according to claim 1 , wherein the condensate is a condensate of a mixture consisting of at least one silane compound represented by the above formula (A), at least one silane compound represented by the above formula (B), and at least one silane compound represented by the above formula (C).
3. The composition for a resist underlayer film according to claim 1 , wherein the condensate is a condensate of a mixture consisting of at least two silane compounds represented by the above formula (A) and at least one silane compound represented by the above formula (C).
4. A composition for a resist underlayer film comprising
(I) a condensate of a mixture consisting of at least two compounds selected from the group consisting a silane compound represented by the following formula (A), a silane compound represented by the following formula (B), and a silane compound represented by the following formula (C), and
(II) a condensate of a mixture consisting of at least one compound selected from the group consisting of the silane compound (A), the silane compound (B), and the silane compound (C),
wherein the silane compound (A) is included in at least one of the mixtures for preparing the component (I) and the component (II), the silane compound (B) is included in at least one of the mixtures for preparing the component (I) and the component (II), and the silane compound (C) is included in at least one of the mixtures for preparing the component (I) and the component (II), provided that the component (I) and the component (II) are different, and
when the mixture for preparing the component (I) or the component (II) is a mixture containing the silane compound (A) and the silane compound (B), the proportion of the silane compound (A) is 5 to 95 mol % and the proportion of the silane compound (B) is 5 to 95 mol %, provided that the total amount of the silane compounds (A) and (B) is 100 mol %,
when the mixture for preparing the component (I) or the component (II) is a mixture containing the silane compound (A) and the silane compound (C), the proportion of the silane compound (A) is 5 to 95 mol % and the proportion of the silane compound (C) is 5 to 95 mol %, provided that the total amount of the silane compounds (A) and (C) is 100 mol %, and
when the mixture for preparing the component (I) or the component (II) is a mixture containing the silane compound (A), the silane compound (B) and the silane compound (C), the proportion of the silane compound (A) is 5 to 90 mol %, the proportion of the silane compound (B) is 5 to 90 mol % and the proportion of the silane compound (C) is 5 to 90 mol %, provided that the total amount of the silane compounds (A), (B) and (C) is 100 mol %,
R 1 Si(OR 3 ) 3 (A)
wherein R 1 is a cyanoethyl group, 3-isocyanatepropyl group, or methacryloxypropyl group, and R 3 individually represents a monovalent organic group,
Si(OR 3 ) 4 (B)
wherein R 3 individually represents a monovalent organic group, and
(R 4 ) d Si(OR 3 ) 4-d (C)
wherein R 3 individually represents a monovalent organic group, and R 4 individually represents a methyl group, an ethyl group, an n-propyl group, an iso-propyl group, an n-butyl group, a sec-butyl group or a tert-butyl group, and d is an integer of 1 to 3.
5. The composition for a resist underlayer film according to claim 1 , further comprising an acid-producing compound which generates an acid by irradiation of ultraviolet radiation and/or by heating.
6. A process for producing the composition for a resist underlayer film according to claim 1 , comprising a step of hydrolyzing and/or condensing the silane compound used in the composition in an organic acid in the presence of water and a catalyst.
7. The composition for a resist underlayer film according to claim 2 , further comprising an acid-producing compound which generates an acid by irradiation of ultraviolet radiation and/or by heating.
8. The composition for a resist underlayer film according to claim 3 , further comprising an acid-producing compound which generates an acid by irradiation of ultraviolet radiation and/or by heating.
9. The composition for a resist underlayer film according to claim 4 , further comprising an acid-producing compound which generates an acid by irradiation of ultraviolet radiation and/or by heating.
10. A process for producing the composition for a resist underlayer film according to claim 2 , comprising a step of hydrolyzing and/or condensing the silane compound used in the composition in an organic acid in the presence of water and a catalyst.
11. A process for producing the composition for a resist underlayer film according to claim 3 , comprising a step of hydrolyzing and/or condensing the silane compound used in the composition in an organic acid in the presence of water and a catalyst.
12. A process for producing the composition for a resist underlayer film according to claim 4 , comprising a step of hydrolyzing and/or condensing the silane compound used in the composition in an organic acid in the presence of water and a catalyst.