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App. No. 11/819,019 · Confirmation No. 5877

Film formation apparatus, precursor introduction method and film formation method

Inventor: Hiroyuki Ode
Abandoned -- Failure to Respond to an Office Action View Publication ↗
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2014-11-14 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
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2014-08-14 892 List of references cited by examiner 1 View
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2012-01-18 WFEE Fee Worksheet (SB06) 1 View
2011-08-18 CTFR Final Rejection 8 View
2011-08-18 892 List of references cited by examiner 1 View
2011-08-18 FWCLM Index of Claims 1 View
2011-08-18 SRNT Examiner's search strategy and results 1 View
2011-08-18 SRFW Search information including classification, databases and other search related notes 1 View
2011-05-23 A... Amendment/Request for Reconsideration-After Non-Final Rejection 1 View
2011-05-23 REM Applicant Arguments/Remarks Made in an Amendment 4 View
2011-05-23 WFEE Fee Worksheet (SB06) 2 View
2011-05-23 N417 Electronic Filing System Acknowledgment Receipt 2 View
2011-01-21 CTNF Non-Final Rejection 6 View
2011-01-21 892 List of references cited by examiner 1 View
2011-01-21 FWCLM Index of Claims 1 View
2011-01-21 SRFW Search information including classification, databases and other search related notes 1 View
2011-01-21 SRNT Examiner's search strategy and results 4 View
2011-01-21 1449 List of References cited by applicant and considered by examiner 3 View
2011-01-21 1449 List of References cited by applicant and considered by examiner 1 View
2011-01-21 BIB Bibliographic Data Sheet 1 View
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2008-09-12 FOR Foreign Reference 28 View
2008-09-12 FOR Foreign Reference 11 View
2008-09-12 TRAN.LET Transmittal Letter 2 View
2008-01-24 NTC.PUB Notice of Publication 1 View
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2007-06-25 WFEE Fee Worksheet (SB06) 1 View
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2007-06-25 TRNA Transmittal of New Application 2 View
2007-06-25 SPEC Specification 19 View
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2007-06-25 ADS Application Data Sheet 3 View
2007-06-25 FRPR Certified Copy of Foreign Priority Application 18 View
2007-06-25 A.PE Preliminary Amendment 1 View
2007-06-25 SPEC Specification 1 View
2007-06-25 REM Applicant Arguments/Remarks Made in an Amendment 1 View
2007-06-25 APPENDIX Appendix to the specification 2 View
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2007-06-25 136A Authorization for Extension of Time all replies 2 View
2007-06-25 WFEE Fee Worksheet (SB06) 1 View
2007-06-25 WFEE Fee Worksheet (SB06) 1 View
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Quick Facts
App. No.
11/819,019
Filed
2007-06-25
Pub. No.
US20080020494A1
Art Unit
1714