Selective growth method, nitride semiconductor light emitting device and manufacturing method of the same
View Patent ↗A method for selectively growing a nitride semiconductor, in which a mask is formed, with an opening formed therein, on a nitride semiconductor layer. A nitride semiconductor crystal is selectively grown on a portion of the nitride semiconductor layer exposed through the opening in the mask, the nitride semiconductor crystal shaped as a hexagonal pyramid and having crystal planes inclined with respect to a top surface of the nitride semiconductor. Here, the nitride semiconductor crystal has at least one intermediate stress-relieving area having crystal planes inclined at a greater angle than those of upper and lower areas of the nitride semiconductor crystal, the intermediate stress-relieving area relieving stress which occurs from continuity in the inclined crystal planes.
1. A method for selectively growing a nitride semiconductor comprising:
forming a mask, with an opening formed therein, on a nitride semiconductor layer; and
selectively growing a nitride semiconductor crystal on a portion of the nitride semiconductor layer exposed through the opening in the mask, the nitride semiconductor crystal shaped as a hexagonal pyramid and having crystal planes inclined with respect to a top surface of the nitride semiconductor,
wherein the step of selectively growing the nitride semiconductor crystal comprises:
performing a first growth procedure for growing a lower area of the nitride semiconductor crystal at a first growth rate which satisfies a growth mode for the hexagonal pyramid;
forming an intermediate stress-relieving area by performing a second growth procedure for growing the nitride semiconductor crystal at a second growth rate higher than the first growth rate thereby resulting in the intermediate stress-relieving area having crystal planes inclined at a greater angle relative to the top surface of the nitride semiconductor than those of the lower area and an upper area of the nitride semiconductor crystal, the intermediate stress-relieving area relieving stress which occurs from continuity in the inclined crystal planes; and
performing a third growth procedure for growing the upper area of the nitride semiconductor crystal at a third growth rate which satisfies a growth mode for the hexagonal pyramid, the third growth rate being lower than the second growth rate.
2. The method according to claim 1 , wherein the step of selectively growing the nitride semiconductor crystal comprises repeating the second and third growth procedures at least once.
3. The method according to claim 1 , wherein the first and third growth rates are identical.
4. The method according to claim 1 , wherein the second growth rate is at least 20% higher than the first growth rate.
5. The method according to claim 1 , wherein the first and third growth rates range from 7 μ/hr to 9 μm/hr and the second growth rate is at least 10 μm/hr.
6. The method according to claim 1 , wherein the intermediate stress-relieving area has a thickness ranging from 0.1 μm to 2 μm.
7. The method according to claim 1 , wherein the nitride semiconductor crystal of the hexagonal pyramid excluding the intermediate stress-relieving area has S-oriented crystal planes, and the intermediate stress-relieving area has non-S crystal planes.
8. The method according to claim 1 , wherein the nitride semiconductor crystal of the hexagonal pyramid excluding the intermediate stress-relieving area has crystal planes inclined at an angle of 60° to 65° , and the intermediate stress-relieving area has crystal planes inclined at 80° to 150°.
9. A method for manufacturing a nitride semiconductor light emitting diode comprising:
forming a mask, with at least one opening formed therein, on a base layer made of a first conductive nitride semiconductor;
selectively growing a first conductive nitride semiconductor crystal on the base layer exposed through the opening in the mask, the first conductive nitride semiconductor crystal shaped as a hexagonal pyramid and having crystal planes inclined with respect to a top surface of the base layer; and
sequentially growing an active layer and a second conductive nitride semiconductor layer on the first conductive nitride semiconductor crystal,
wherein the step of selectively growing the first conductive nitride semiconductor crystal comprises:
performing a first growth procedure for growing a lower area of the nitride semiconductor crystal at a first growth rate which satisfies a growth mode for the hexagonal pyramidal structure;
forming an intermediate stress-relieving area by performing a second growth procedure for growing the nitride semiconductor crystal at a second growth rate higher than the first growth rate thereby resulting in the intermediate stress-relieving area having crystal planes inclined at a greater angle relative to the top surface of the base layer than those of the lower area and an upper area of the nitride semiconductor crystal, the intermediate stress-relieving area relieving stress which occurs from continuity in the inclined crystal planes;
performing a third growth procedure for growing the upper area of the nitride semiconductor crystal at a third growth rate which satisfies a growth mode for the hexagonal pyramidal structure, the third growth rate being lower than the second growth rate.
10. The method according to claim 9 , wherein the step of selectively growing the first conductive nitride semiconductor crystal comprises repeating the second and third growth procedures at least once.
11. The method according to claim 9 , wherein the first and third growth rates are identical.
12. The method according to claim 9 , wherein the second growth rate is at least 20% higher than the first growth rate.
13. The method according to claim 9 , wherein the first and third growth rates range from 7 μm/hr to 9 μm/hr and the second growth rate is at least 10 μm/hr.
14. The method according to claim 9 , wherein the intermediate stress-relieving area has a thickness from 0.1 μm to 2 μm.
15. The method according to claim 9 , wherein the first conductive nitride semiconductor crystal of the hexagonal pyramid excluding the intermediate stress-relieving area has S-oriented crystal planes, and the intermediate stress-relieving area has non-S crystal planes.
16. The method according to claim 9 , wherein the first conductive nitride semiconductor crystal of the hexagonal pyramid excluding the intermediate stress-relieving area has crystal planes inclined at an angle of 60° to 65° , and the intermediate stress-relieving area has crystal planes inclined at 80° to 150°.
17. The method according to claim 9 , wherein the active layer and the second conductive nitride semiconductor layer are sequentially formed on the crystal surface of the intermediate stress-relieving area and the crystal surfaces of the upper and lower areas.