Surface inspection method and surface inspection apparatus
View Patent ↗When measuring an edge region, a photo detector with an angle not influenced by the diffracted light, the diffracted light causing noise, is selected to thereby allow for inspection that minimizes the sensitivity reduction. This allows for the management of foreign matters in the outer peripheral portion, which conventionally could not be measured, and this also eliminates the oversight of critical defects on the wafer, thus leading to reduction of failures of IC.
1. A surface inspection apparatus, comprising:
a light receiving system including a plurality of photo detectors;
a light projecting optical system that irradiates light to the surface of an object to be inspected; and
means that identifies a foreign matter by computing signals detected by the plurality of photo detectors through the irradiation of light from the light projecting optical system,
wherein the light receiving system includes a low angle light receiving system having an elevation angle equal to or less than 30 degrees with reference to the surface of the object to be inspected, and a high angle light receiving system having an elevation angle greater than that of the low angle light receiving system,
wherein the light projecting optical system includes a first light projecting optical system that irradiates a laser beam approximately perpendicularly from above the object to be inspected, and a second light projecting optical system that irradiates a polarized laser beam from the oblique direction of the object to be inspected, and
wherein a defect is identified by computing a signal that the high angle light receiving system detects via the irradiation of a laser beam from the first light projecting optical system, and a foreign matter is identified based on a signal that the low angle light receiving system detects via the irradiation of a polarized laser beam from the second light projecting optical system.
2. The surface inspection apparatus according to claim 1 , further comprising an optical system switching mechanism that switches between scanning with the laser beam of the first light projecting optical system and scanning with the second light projecting optical system.
3. The surface inspection apparatus according to claim 1 , further comprising:
a detector for detecting a position of the light on the object to be inspected,
wherein the plurality of photo detectors include photo detectors disposed at an angle not influenced by the diffracted light from the edge region of the object to be inspected, and
a data processing unit that controls the selection of the plurality of photo detectors in response to an output of the detector.