Method for fabricating a glass substrate, method for fabricating a magnetic disk, and magnetic disk
A method for manufacturing a glass substrate which has a uniform and minute pattern of stripes formed on the surface thereof by ultraprecision polishing, and which allows the recording capacity of a magnetic disk to be increased, includes an inspecting step before the glass substrate is subjected to ultraprecision polishing, whether the Young's modulus Es in topmost part as determined by the nanoindentation method and the Young's modulus Eg as determined by ultrasonic resonance fulfill the inequality 0.8 Eg<Es<1.2 Eg; or the hardness Hs in topmost part as determined by the nanoindentation method and the Vickers hardness Hv fulfill the inequality 0.8 Hv<Hs<1.2 Hv.
1. A method for fabricating a glass substrate comprising:
polishing a surface of a glass substrate;
inspecting the glass substrate after the polishing of the surface thereof to determine whether or not a predetermined inequality is fulfilled by a first value of a predetermined property in a topmost part of the glass substrate as determined by a nanoindentation method and a second value of said predetermined property as determined by another measurement method; and
performing ultraprecision polishing on the glass substrate when the glass substrate has passed the inspecting process, wherein the predetermined property is a Young's modulus and wherein the first value is denoted by Es and the second value is denoted by Eg, wherein the another measurement method is ultrasonic resonance, and the predetermined inequality is given by a formula below:
0.8 Eg<Es<1.2 Eg.
2. A method for fabricating a glass substrate comprising:
polishing a surface of a glass substrate;
inspecting the glass substrate after the polishing of the surface thereof to determine whether or not a predetermined inequality is fulfilled by a first value of a predetermined property in a topmost part of the glass substrate as determined by a nanoindentation method and a second value of said predetermined property as determined by another measurement method; and
performing ultraprecision polishing on the glass substrate when the glass substrate has passed the inspecting process, wherein the predetermined property is a hardness and wherein the first value is denoted by Hs and the second value is denoted by Hv, wherein the another measurement method is a Vickers method, and the predetermined inequality is given by a formula below:
0.8 Hv<Hs<1.2 Hv.
3. The method according to claim 1 , further comprising cleaning the surface of the glass substrate with a cleaning liquid exerting an etching effect between the polishing process and the inspecting process.
4. The method according to claim 3 , wherein the cleaning liquid is hydrofluoric acid.
5. The method according to claim 1 , wherein, the topmost surface of the glass substrate has a surface roughness Ra of 0.3 nm or less after the ultraprecision polishing.
6. The method according to claim 1 , wherein the glass substrate contains 50% or more by weight of SiO 2 .
7. A method for fabricating a magnetic disk, comprising:
fabricating a glass substrate comprising:
polishing a surface of a glass substrate; and
inspecting the glass substrate after the polishing of the surface thereof to determine whether or not a predetermined inequality is fulfilled by a first value of a predetermined property in a topmost part of the glass substrate as determined by a nanoindentation method and a second value of said predetermined property as determined by another measurement method; and
performing ultraprecision polishing on the glass substrate when the glass substrate has passed the inspecting process; and
forming a magnetic recording layer on the ultraprecision polished glass substrate, wherein the predetermined property value is a Young's modulus, wherein the first value is denoted by Es and the second value is denoted by Eg, and wherein the another measurement method is ultrasonic resonance, and the predetermined inequality is given by a formula below:
0.8 Eg<Es<1.2 Eg.
8. A magnetic disk fabricated by the method according to claim 7 .
9. The method according to claim 2 , further comprising cleaning the surface of the glass substrate with a cleaning liquid exerting an etching effect between the polishing process and the inspecting process.
10. The method according to claim 9 , wherein the cleaning liquid is hydrofluoric acid.
11. The method according to claim 2 , wherein, the topmost surface of the glass substrate has a surface roughness Ra of 0.3 nm or less after the ultraprecision polishing.
12. The method according to claim 2 , wherein the glass substrate contains 50% or more by weight of SiO 2 .
13. A method of fabricating a magnetic disk, comprising:
fabricating a glass substrate by:
polishing a surface of the glass substrate;
inspecting the glass substrate after the polishing of the surface thereof to determine whether or not a predetermined inequality is fulfilled by a first value of a predetermined property in a topmost part of the glass substrate as determined by a nanoindentation method and a second value of said predetermined property as determined by another measurement method;
performing ultraprecision polishing on the glass substrate when the glass substrate has passed the inspecting process; and
forming a magnetic recording layer on the ultraprecision polished glass substrate, wherein the predetermined property value is a hardness, wherein the first value is denoted by Hs and the second value is denoted by Hv, and wherein the another measurement method is a Vickers method, and the predetermined inequality is given by a formula below:
0.8 Hv<Hs<1.2 Hv.