Semiconductor device having recessed connector portions
View Patent ↗A semiconductor device in accordance with the present invention includes IC chips (semiconductor elements) ( 2, 3, 4 ) having solder bumps ( 24 ) (projecting electrodes) formed on electrode pads, and a first wiring board ( 1 ) having connection terminals ( 7 ) to which the respective solder bumps ( 24 ) of the IC chips ( 2, 3, 4 ) are connected, external connection terminals ( 8 ) for connection to an external apparatus, and conductor wires ( 9 ) provided in respective groove portions formed in a board surface and connected to the respective connection terminals ( 7 ). In spite of the reduced pitch of the conductor wires ( 9 ), the presence of the groove portions enables an increase in cross section, allowing a reduction in wiring resistance.
1. A semiconductor device comprising:
a wiring board having a principal surface, the principal surface having:
a first recessed portion;
a second recessed portion;
a groove connected to the first recessed portion and the second recessed portion, the groove extending along the principal surface away from the first recessed portion; and
an external connection electrode connected to the second recessed portion;
a semiconductor element having a projecting electrode, the semiconductor element mounted on the wiring board with the projecting electrode connected to the first recessed portion; and
a conductor wire located in the groove, the conductor wire, the external connection electrode and the projecting electrode comprising a same material,
wherein the second recessed portion is more shallow than the groove.
2. The semiconductor device according to claim 1 , wherein the conductor wire and the projecting electrode are made of solder.
3. The semiconductor device according to claim 1 , wherein the conductor wire is connected directly to the projecting electrode.
4. The semiconductor device according to claim 1 , wherein the first recessed portion is more shallow than the groove.
5. The semiconductor device according to claim 1 , wherein the conductor wire, the projecting electrode, and the external connection electrode are made of solder.
6. The semiconductor device according to claim 1 , wherein the conductor wire is connected directly to the projecting electrode and the external connection electrode.
7. The semiconductor device according to claim 1 , wherein the wiring board further includes a metal layer located on the first recessed portion and the groove, the metal layer having a shape corresponding to a shape of the first recessed portion and the groove, respectively,
the projecting electrode is connected to a first metal layer recessed portion located on the first recessed portion of the wiring board, and
the conductor wire is located in a metal layer groove portion located on the groove of the wiring board.
8. The semiconductor device according to claim 7 , wherein the wiring board further comprises an insulating film on at least the groove, and
the metal layer has a multilayer structure comprising:
a lowermost adhesion layer for ensuring tight contact with the insulating film located on the groove of the wiring board; and
an uppermost solder wetting layer for ensuring solder wettability.
9. The semiconductor device according to claim 8 , wherein the adhesion layer comprises at least one of Cr, Ti, TiW, and TiN, and the solder wetting layer comprises at least one of Au, Ni, Pt, and Cu.
10. The semiconductor device according to claim 8 , wherein the metal layer comprises solder.
11. The semiconductor device according to claim 4 , wherein the wiring board is a silicon wiring board.
12. The semiconductor device according to claim 11 , wherein the silicon wiring board is a circuit forming board comprising a silicon single-crystal board with semiconductor circuits formed thereon.
13. The semiconductor device according to claim 1 , wherein the conductor wire of the wiring board is wider near the semiconductor element.
14. A semiconductor device comprising:
a first wiring board having a principal surface, the principal surface having:
a first recessed portion,
a groove connected to the first recessed portion, the groove extending along the principal surface away from the first recessed portion;
a conductor wire located in the groove; and
an external connection terminal;
a semiconductor element having a projecting electrode, the semiconductor mounted on the first wiring board, such that the projecting electrode is connected to the first recessed portion;
a second wiring board having the first wiring board mounted thereon, the second wiring board including:
a mounting portion on which the first wiring board is mounted,
an internal connection terminal,
a wire connecting the internal connection terminal to the external connection terminal of the first wiring board,
an external connection electrode, and
a conductor portion connecting the internal connection terminal to the external connection electrode,
wherein the conductor wire and the projecting electrode comprise a same material, and
the semiconductor element, the first wiring board, and the wire are sealed by a sealing resin located on the second wiring board.
15. The semiconductor device according to claim 14 , wherein the first recessed portion is more shallow than the groove.
16. The semiconductor device according to claim 14 , wherein the conductor wire and the projecting electrode are made of solder.
17. The semiconductor device according to claim 14 , wherein the conductor wire is connected directly to the projecting electrode.
18. The semiconductor device according to claim 14 , wherein the first wiring board further includes a metal layer on the first recessed portion and on the groove of the principal surface, the metal layer having a shape corresponding to a shape of the first recessed portion and the groove, respectively,
the projecting electrode is connected to a first metal layer recessed portion located on the first recessed portion of the first wiring board, and
the conductor wire is located in a metal layer groove portion located on the groove portion of the first wiring board.
19. The semiconductor device according to claim 18 , wherein the first wiring board further comprises an insulating film on at least the groove, and
the metal layer has a multilayer structure comprising:
a lowermost adhesion layer for ensuring tight contact with said insulating film located on the groove of the wiring board; and
an uppermost solder wetting layer for ensuring solder wettability.
20. The semiconductor device according to claim 19 , wherein the adhesion layer comprises at least one of Cr, Ti, TiW, and TiN, and the solder wetting layer comprises at least one of Au, Ni, Pt, and Cu.
21. The semiconductor device according to claim 19 , wherein the metal layer comprises solder.
22. The semiconductor device according to claim 14 , wherein the first wiring board is a silicon wiring board.
23. The semiconductor device according to claim 22 , wherein the silicon wiring board is a circuit forming board comprising a silicon single-crystal board with semiconductor circuits located thereon.
24. The semiconductor device according to claim 14 , wherein the conductor wire of the first wiring board has a wider portion near the semiconductor element.