Ionization gauge with a cold electron source
View Patent ↗An ionization gauge that eliminates a hot cathode or filament, but maintains a level of precision of gas density measurements approaching that of a hot cathode ionization gauge. The ionization gauge includes a collector electrode disposed in an ionization volume, an electron source without a heated cathode, and an electrostatic shutter that regulates the flow of electrons between the electron source and the ionization volume. The electrostatic shutter controls the flow of electrons based on feedback from an anode defining the ionization volume. The electron source can be a Penning or glow discharge ionization gauge.
1. An ionization gauge comprising:
a cold cathode electron source comprising an electron source volume in which electrons are generated;
an ionization volume distinct from the electron source volume;
a collector electrode disposed in the ionization volume, the collector electrode configured to collect ions formed by the impact between the electrons and gas molecules and atoms to provide a gas pressure output; and
an electrostatic shutter between the electron source volume and the ionization volume configured to control the flow of electrons from the electron source volume to the ionization volume.
2. The ionization gauge according to claim 1 wherein the electrostatic shutter is pulsed to control the flow of electrons between the electron source and the ionization volume.
3. The ionization gauge according to claim 1 wherein the electrostatic shutter is configured to control the flow of electrons based on the number of electrons in the ionization volume.
4. The ionization gauge according to claim 1 further comprising an anode defining the ionization volume.
5. The ionization gauge according to claim 4 wherein the electrostatic shutter is configured to control the flow of electrons based on the electron current generated in the anode.
6. The ionization gauge according to claim 5 wherein the electron current generated in the anode is measured by an ammeter.
7. The ionization gauge according to claim 1 , wherein the electrostatic shutter is configured as a grid adapted to control the flow of electrons between the electron source volume and the ionization volume.
8. An ionization gauge comprising:
a cold cathode electron source comprising an electron source volume in which electrons are generated;
an ionization volume distinct from the electron source volume;
a first collector electrode, and a second collector electrode with both being disposed in the ionization volume, the first and second collector electrodes configured to collect ions formed by the impact between the electrons and gas molecules and atoms to provide a gas pressure output; and
an electrostatic shutter between the electron source volume and the ionization volume configured to control the flow of electrons from the electron source volume to the ionization volume.
9. The ionization gauge according to claim 8 , wherein the electrostatic shutter is configured as a grid adapted to control the flow of electrons between the electron source volume and the ionization volume.
10. The ionization gauge according to claim 8 wherein the electrostatic shutter is configured to control the flow of electrons based on the number of electrons in the ionization volume.
11. The ionization gauge according to claim 8 further comprising an anode defining the ionization volume.
12. The ionization gauge according to claim 11 wherein the electrostatic shutter is configured to control the flow of electrons based on the electron current generated in the anode.
13. The ionization gauge according to claim 11 wherein the electron current generated in the anode is measured by an ammeter.
14. The ionization gauge according to claim 8 wherein the electrostatic shutter is pulsed to control the flow of electrons between the electron source and the ionization volume.
15. A method of measuring a gas pressure from gas molecules and atoms, comprising:
generating electrons in a cold cathode electron source comprising an electron source volume;
regulating the flow of electrons by an electrostatic shutter between the electron source volume and an ionization volume distinct from the electron source volume; and
collecting ions formed by an impact between the electrons and the gas molecules and atoms in the ionization volume to provide a gas pressure output.
16. The method according to claim 15 , further comprising regulating the flow of electrons between the electron source and the ionization volume by filtering the flow to limit the flow to a predetermined energy range between the source and the ionization volume.
17. The method according to claim 16 , further comprising filtering the flow by modulating a geometry of the ionization gauge.
18. The method according to claim 15 , further comprising regulating the flow of electrons between the electron source and the ionization volume by modulating a voltage of the electron source in response to pressure.
19. The method according to claim 15 , further comprising regulating the flow of electrons between the electron source and the ionization volume by modulating an ionization gauge geometry to produce an electron current in response to a pressure.
20. The method according to claim 16 , further comprising filtering the flow by electrostatic filtering.
21. An ionization gauge comprising:
a cold cathode electron source comprising an electron source volume in which electrons are generated;
an ionization volume distinct from the electron source volume;
a collector electrode disposed in the ionization volume, the collector electrode configured to collect ions formed by the impact between the electrons and gas molecules and atoms to provide a gas pressure output;
an electrostatic shutter between the electron source volume and the ionization volume configured to control the flow of electrons from the electron source volume to the ionization volume; and
an envelope surrounding the electron source volume and the electrostatic shutter, the envelope permitting electrons from a predetermined electric potential to enter into the ionization volume.
22. The ionization gauge of claim 21 , wherein the cold cathode source includes an anode connected to an anode voltage source, and wherein the envelope is grounded allowing electrons located near the envelope to enter the ionization volume.
23. The ionization gauge of claim 22 , further comprising an annular ring of electrostatic shutters being located at substantially a periphery of the envelope.
24. The ionization gauge of claim 21 , wherein the electron source has an anode connected to ground, and wherein the envelope is connected to a negatively charged voltage potential to permit electrons located near the anode of the electron source to enter the ionization volume.
25. The ionization gauge according to claim 21 , wherein the electrostatic shutter is configured as a grid adapted to control the flow of electrons between the electron source volume and the ionization volume.
26. A method of measuring a gas pressure from gas molecules and atoms comprising:
generating electrons in a cold cathode electron source comprising an electron source volume;
regulating the flow of electrons by an electrostatic shutter between the electron source volume and an ionization volume distinct from the electron source volume;
controlling the electron energy from the electron source; and
collecting ions formed by an impact between the electrons and gas molecules and atoms in the ionization volume to provide a gas pressure output.
27. The method of claim 26 , further comprising controlling the electron energy from the electron source by operating an anode of the electron source at a ground potential, and operating an envelope that surrounds the anode of the electron source at a predetermined negative voltage potential.
28. The method of claim 26 , further comprising controlling the electron energy from the electron source by operating an anode of the electron source at a predetermined voltage potential, and operating an envelope that surrounds the anode at a ground potential.