Semiconductor device having pad structure for preventing and buffering stress of silicon nitride film
View Patent ↗A semiconductor device having a pad structure for preventing a stress of a silicon nitride film. The semiconductor device includes a semiconductor substrate, a lower structure formed on the semiconductor substrate, a first insulation film formed on the lower structure, a first metal layer coupled to the lower structure through a first metal contact in the first insulation film, a second metal layer formed on the first metal layer, and a plurality of dummy gates having a concentric square structure formed at the lower portion of the pad region on the second metal layer.
1. A semiconductor device, comprising:
a semiconductor substrate;
a field oxide film formed on the semiconductor substrate;
a first insulation film formed on the field oxide film;
a plurality of insulation films formed on the first insulation film;
a metal layer formed on the plurality of insulation films;
a protection layer formed on a portion of the metal layer to expose a pad region of the metal layer;
first inside dummy metal layers formed under the pad region, wherein the first inside dummy metal layers divide a portion of the plurality of insulation films into a plurality of strips; and
a plurality of inside dummy gates formed on the field oxide film under the pad region in the shape of a plurality of concentric squares or a plurality of islands, wherein the inside dummy gates do not overlap with the first inside dummy metal layers.
2. The semiconductor device of claim 1 , wherein the first inside dummy metal layers are formed in the shape of a mesh or a plurality of concentric squares.
3. The semiconductor device of claim 1 , wherein the inside dummy gates are separated by 0.5 μm to 3.0 μm when overlapping with the first inside dummy metal layers.
4. The semiconductor device of claim 1 , further comprising an outside dummy gate for surrounding the pad region at a predetermined interval from the pad region outside the pad region.
5. The semiconductor device of claim 4 , further comprising a first dummy metal contact formed in a line shape on the outside dummy gate outside the pad region.
6. The semiconductor device of claim 1 , wherein a width of the first inside dummy metal layers ranges from 0.2 μm to 1.0 μm.
7. The semiconductor device of claim 1 , wherein an interval between the first inside dummy metal layers ranges from 2.0 μm to 5.0 μm.
8. The semiconductor device of claim 1 , wherein the edges of the first inside dummy metal layers are aligned in the vertical direction to the edges of the pad region.
9. The semiconductor device of claim 1 , wherein the first inside dummy metal layers are inwardly formed at an interval of 0.5 μm to 2.0 μm from the edges of the metal layer.
10. The semiconductor device of claim 5 , further comprising a first outside dummy metal layer for surrounding the pad region in a line shape outside the pad region, and a second dummy metal contact formed on the first outside dummy metal layer.
11. The semiconductor device of claim 10 , wherein a width of the first outside dummy metal layer ranges from 0.5 μm to 1.0 μm.
12. The semiconductor device of claim 10 , wherein a width of the second dummy metal contact ranges from 0.20 μm to 0.50 μm.
13. The semiconductor device of claim 10 , further comprising a second dummy metal layer formed on the second dummy metal contact, wherein an interval between the second dummy metal layer and the second metal layer ranges from 3.0 μm to 10.0 μm.
14. The semiconductor device of claim 13 , wherein a width of the second dummy metal layer ranges from 0.5 μm to 1.0 μm.
15. The semiconductor device of claim 10 , wherein a horizontal interval between the first dummy metal contact and the second dummy metal contact ranges from 1.0 μm to 5.0 μm.
16. The semiconductor device of claim 1 , wherein the plurality of insulation films include a silicon nitride film formed on the first insulation film and a second insulation film formed on the nitride film, wherein the silicon nitride film is divided into the plurality of strips by the first inside dummy metal layers.