Top layers of metal for high performance IC's
View Patent ↗A method of closely interconnecting integrated circuits contained within a semiconductor wafer to electrical circuits surrounding the semiconductor wafer. Electrical interconnects are held to a minimum in length by making efficient use of polyimide or polymer as an inter-metal dielectric thus enabling the integration of very small integrated circuits within a larger circuit environment at a minimum cost in electrical circuit performance.
1. A semiconductor chip comprising:
a silicon substrate;
multiple transistors on said silicon substrate;
a first metallization structure over said silicon substrate, wherein said first metallization structure comprises a first metal layer over said silicon substrate, a second metal layer over said silicon substrate, a first metal interconnect over said silicon substrate, a second metal interconnect over said silicon substrate, a third metal interconnect over said silicon substrate and between said first and second metal interconnects, and a fourth metal interconnect over said silicon substrate and between said third and second metal interconnects, wherein said first, second, third and fourth metal interconnects are separated from one another by an insulating material, and wherein said first metallization structure comprises electroplated copper;
a dielectric layer between said first and second metal layers;
a passivation layer over said first metallization structure, over said dielectric layer and on said third and fourth metal interconnects, wherein said first, second, third and fourth metal interconnects are provided by a topmost metal layer under said passivation layer, and wherein said passivation layer comprises a topmost nitride layer of said semiconductor chip;
a polymer layer on said passivation layer and over said third and fourth metal interconnects, wherein said polymer layer has a thickness between 2 and 30 micrometers, greater than that of said passivation layer and greater than that of said dielectric layer, and wherein a first opening through said passivation layer and through said polymer layer is over a first contact point of said first metal interconnect and exposes said first contact point, and a second opening through paid passivation layer and through said polymer layer is over a second contact point of said second metal interconnect and exposes said second contact point; and
a second metallization structure on said polymer layer, over said passivation layer, over said third and fourth metal interconnects and over said first and second contact points, wherein said third and fourth metal interconnects are directly under said second metallization structure and are not connected to said second metallization structure through any opening through said polymer layer under said second metallization structure, wherein said first contact point is connected to said second contact point through said second metallization structure, wherein said second metallization structure comprises electroplated copper in said first and second openings and over said polymer layer, and wherein said second metallization structure comprises a third metal layer, on said polymer layer, having a thickness greater than that of said first metal layer and greater than that of said second metal layer.
2. The semiconductor chip of claim 1 , wherein said polymer layer comprises polyimide.
3. The semiconductor chip of claim 1 , wherein said polymer layer comprises benzocyclobutene (BCB).
4. The semiconductor chip of claim 1 , wherein said passivation layer further comprises a topmost oxide layer of said semiconductor chip, wherein said topmost nitride layer of said semiconductor chip is over said topmost oxide layer of said semiconductor chip.
5. The semiconductor chip of claim 1 , wherein said second metallization structure comprises a signal interconnect connecting said first contact point to said second contact point.
6. The semiconductor chip of claim 1 , wherein said second metallization structure comprises a power interconnect connecting said first contact point to said second contact point.
7. The semiconductor chip of claim 1 , wherein said second metallization structure comprises a ground interconnect connecting said first contact point to said second contact point.
8. The semiconductor chip of claim 1 , wherein said second metallization structure has an entire top surface exposed to an ambience.
9. A semiconductor chip comprising:
a silicon substrate;
multiple transistors on said silicon substrate;
a first metallization structure over said silicon substrate, wherein said first metallization structure comprises a first metal layer over said silicon substrate, a second metal layer over said silicon substrate, a first metal interconnect over said silicon substrate, a second metal interconnect over said silicon substrate, and a third metal interconnect over said silicon substrate and between said first and second metal interconnects, wherein said first, second and third metal interconnects are separated from one another by an insulating material, and wherein said first metallization structure comprises electroplated copper;
a dielectric layer between said first and second metal layers;
a passivation layer over said first metallization structure, over said dielectric layer and on said third metal interconnect, wherein said first, second and third metal interconnects are provided by a topmost metal layer under said passivation layer, and wherein said passivation layer comprises a topmost nitride layer of said semiconductor chip;
a polymer layer on said passivation layer and over said third metal interconnect, wherein said polymer layer has a thickness between 2 and 30 micrometers, greater than that of said passivation layer and greater than that of said dielectric layer, and wherein a first opening through said passivation layer and through said polymer layer is over a first contact point of said first metal interconnect and exposes said first contact point, and a second opening through said passivation layer and through said polymer layer is over a second contact point of said second metal interconnect and exposes said second contact point; and
a second metallization structure on said polymer layer, over said passivation layer, over said third metal interconnect and over said first and second contact points, wherein said third metal interconnect is directly under said second metallization structure and is not connected to said second metallization structure through any opening through said polymer layer under said second metallization structure, wherein said first contact point is connected to said second contact point through said second metallization structure, wherein said second metallization structure comprises electroplated copper in said first and second openings and over said polymer layer, and wherein said second metallization structure comprises a third metal layer, on said polymer layer, having a thickness greater than that of said first metal layer and greater than that of said second metal layer.
10. The semiconductor chip of claim 9 , wherein said polymer layer comprises polyimide.
11. The semiconductor chip of claim 9 , wherein said polymer layer comprises benzocyclobutene (BCB).
12. The semiconductor chip of claim 9 , wherein said passivation layer further comprises a topmost oxide layer of said semiconductor chip, wherein said topmost nitride layer of said semiconductor chip is over said topmost oxide layer of said semiconductor chip.
13. The semiconductor chip of claim 9 , wherein said second metallization structure comprises a signal interconnect connecting said first contact point to said second contact point.
14. The semiconductor chip of claim 9 , wherein said second metallization structure comprises a power interconnect connecting said first contact point to said second contact point.
15. The semiconductor chip of claim 9 , wherein said second metallization structure comprises a ground interconnect connecting said first contact point to said second contact point.
16. The semiconductor chip of claim 9 , wherein said second metallization structure has an entire top surface exposed to an ambience.
17. A semiconductor chip comprising:
a silicon substrate;
multiple transistors on said silicon substrate;
a first metallization structure over said silicon substrate, wherein said first metallization structure comprises a first metal layer over said silicon substrate, a second metal layer over said silicon substrate, a first metal interconnect over said silicon substrate and a second metal interconnect over said silicon substrate, wherein said first and second metal interconnects are separated from each other by an insulating material, and wherein said first metallization structure comprises electroplated copper;
a dielectric layer between said first and second metal layers;
a passivation layer over said first metallization structure and over said dielectric layer, wherein said first and second metal interconnects are provided by a topmost metal layer under said passivation layer, and wherein said passivation layer comprises a topmost nitride layer of said semiconductor chip;
a polymer layer on said passivation layer, wherein said polymer layer has a thickness between 2 and 30 micrometers, greater than that of said passivation layer and greater than that of said dielectric layer, and wherein a first opening through said passivation layer and through said polymer layer is over a first contact point of said first metal interconnect and exposes said first contact point, and a second opening through said passivation layer and through said polymer layer is over a second contact point of said second metal interconnect and exposes said second contact point; and
a second metallization structure on said polymer layer, over said passivation layers and over said first and second contact points, wherein said first contact point is connected to said second contact point though said second metallization structure, wherein said second metallization structure comprises electroplated copper in said first and second openings and over said polymer layer, and wherein said second metallization structure comprises a third metal layer, on said polymer layer, having a thickness greater than that of said first metal layer and greater than that of said second metal layer.
18. The semiconductor chip of claim 17 , wherein said polymer layer comprises polyimide.
19. The semiconductor chip of claim 17 , wherein said polymer layer comprises benzocyclobutene (BCB).
20. The semiconductor chip of claim 17 , wherein said passivation layer further comprises a topmost oxide layer of said semiconductor chip, wherein said topmost nitride layer of said semiconductor chip is over said topmost oxide layer of said semiconductor chip.
21. The semiconductor chip of claim 17 , wherein said second metallization structure comprises a power interconnect connecting said first contact point to said second contact point.
22. The semiconductor chip of claim 17 wherein said second metallization structure comprises a ground interconnect connecting said first contact point to said second contact point.
23. The semiconductor chip of claim 17 , wherein said second metallization structure comprises a signal interconnect connecting said first contact point to said second contact point.
24. The semiconductor chip of claim 17 , wherein said second metallization structure has an entire top surface exposed to an ambience.