Magnetoresistive effect element with intermediate oxide layer containing boron and an element selected from Ca, Mg, Sr, Ba, Ti, and Sc
View Patent ↗It is made possible to provide a magnetoresistive effect element that can reverse magnetization direction with a low current, having low areal resistance (RA) and a high TMR ratio. A magnetoresistive effect element includes: a film stack that includes a magnetization free layer including a magnetic layer in which magnetization direction is changeable, a magnetization pinned layer including a magnetic layer in which magnetization direction is pinned, and an intermediate layer provided between the magnetization free layer and the magnetization pinned layer, the intermediate layer being an oxide containing boron (B) and an element selected from the group consisting of Ca, Mg, Sr, Ba, Ti, and Sc. Current is applied bidirectionally between the magnetization pinned layer and the magnetization free layer through the intermediate layer, so that the magnetization of the magnetization free layer is reversible.
1. A magnetoresistive effect element comprising:
a film stack that includes a magnetization free layer comprising a magnetic layer in which magnetization direction is changeable, a magnetization pinned layer comprising a magnetic layer in which magnetization direction is pinned, and an intermediate layer provided between the magnetization free layer and the magnetization pinned layer, the intermediate layer being an oxide containing boron (B) and an element selected from the group consisting of Ca, Mg, Sr, Ba, Ti, and Sc,
wherein current is applied between the magnetization pinned layer and the magnetization free layer through the intermediate layer, so that the magnetization of the magnetization free layer is reversible, and
wherein the intermediate layer has a NaCl crystalline structure.
2. The magnetoresistive effect element according to claim 1 , wherein an interfacial layer containing boron (B) is formed at an interface between the intermediate layer and at least one of the magnetization free layer and the magnetization pinned layer.
3. The magnetoresistive effect element according to claim 1 , wherein oxidized boron exists in an interfacial region between the intermediate layer and at least one of the magnetization free layer and the magnetization pinned layer.
4. The magnetoresistive effect element according to claim 1 , wherein the magnetization pinned layer has a stacked structure comprising a first magnetic film, a nonmagnetic film, and a second magnetic film, the first and second magnetic films being antiferromagnetically coupled though the nonmagnetic film.
5. The magnetoresistive effect element according to claim 1 , wherein the intermediate layer is an oxide containing boron (B) and magnesium (Mg).
6. A magnetoresistive effect element comprising:
a film stack that includes a magnetization free layer comprising a magnetic layer in which magnetization direction is changeable, a magnetization pinned layer comprising a magnetic layer in which magnetization direction is pinned, and an intermediate layer provided between the magnetization free layer and the magnetization pinned layer, the intermediate layer being an oxide containing boron (B) and an element selected from the group consisting of Ca, Mg, Sr, Ba, Ti, and Sc,
wherein current is applied between the magnetization pinned layer and the magnetization free layer through the intermediate layer, so that the magnetization of the magnetization free layer is reversible, and
wherein a concentration peak of the boron in the intermediate layer is shifted to at least one of interfaces with the magnetization free layer and the magnetization pinned layer.
7. The magnetoresistive effect element according to claim 6 , wherein the intermediate layer is an oxide containing boron (B) and magnesium (Mg).
8. A magnetoresistive effect element comprising:
a film stack that includes a magnetization free layer comprising a magnetic layer in which magnetization direction is changeable, a magnetization pinned layer comprising a magnetic layer in which magnetization direction is pinned, and an intermediate layer provided between the magnetization free layer and the magnetization pinned layer, the intermediate layer being an oxide containing boron (B) and an element selected from the group consisting of Ca, Mg, Sr, Ba, Ti, and Sc,
wherein current is applied between the magnetization pinned layer and the magnetization free layer through the intermediate layer, so that the magnetization of the magnetization free layer is reversible, and
wherein the intermediate layer has a stacked structure comprising a first film and a second film with higher boron concentration than boron concentration in the first film.
9. The magnetoresistive effect element according to claim 8 , wherein the intermediate layer is an oxide containing boron (B) and magnesium (Mg).
10. A magnetoresistive effect element comprising:
a film stack that includes a magnetization free layer comprising a magnetic layer in which magnetization direction is changeable, a magnetization pinned layer comprising a magnetic layer in which magnetization direction is pinned, and an intermediate layer provided between the magnetization free layer and the magnetization pinned layer, the intermediate layer being an oxide containing boron (B) and an element selected from the group consisting of Ca, Mg, Sr, Ba, Ti, and Sc,
wherein current is applied between the magnetization pinned layer and the magnetization free layer through the intermediate layer, so that the magnetization of the magnetization free layer is reversible, and
wherein the intermediate layer has a stacked structure formed of a first film, a second film, and a third film, the second and third films sandwiching the first film and having higher boron concentration than boron concentration in the first film.
11. The magnetoresistive effect element according to claim 10 , wherein the intermediate layer is an oxide containing boron (B) and magnesium (Mg).
12. A random access memory comprising:
memory cells,
each of the memory cells including a magnetoresistive effect element comprising:
a film stack that includes a magnetization free layer comprising a magnetic layer in which magnetization direction is changeable, a magnetization pinned layer comprising a magnetic layer in which magnetization direction is pinned, and an intermediate layer provided between the magnetization free layer and the magnetization pinned layer, the intermediate layer being an oxide containing boron (B) and an element selected from the group consisting of Ca, Mg, Sr, Ba, Ti, and Sc,
wherein current is applied between the magnetization pinned layer and the magnetization free layer through the intermediate layer, so that the magnetization of the magnetization free layer is reversible, and
wherein the intermediate layer has a NaCl crystalline structure.
13. The random access memory according to claim 12 , wherein an interfacial layer containing boron (B) is formed at an interface between the intermediate layer and at least one of the magnetization free layer and the magnetization pinned layer.
14. The random access memory according to claim 12 , wherein oxidized boron exists in an interfacial region between the intermediate layer and at least one of the magnetization free layer and the magnetization pinned layer.
15. The random access memory according to claim 12 , wherein the magnetization pinned layer has a stacked structure comprising a first magnetic film, a nonmagnetic film, and a second magnetic film, the first and second magnetic films being antiferromagnetically coupled though the nonmagnetic film.
16. The random access memory according to claim 12 , wherein the intermediate layer is an oxide containing boron (B) and magnesium (Mg).
17. A random access memory comprising:
memory cells,
each of the memory cells including a magnetoresistive effect element comprising:
a film stack that includes a magnetization free layer comprising a magnetic layer in which magnetization direction is changeable, a magnetization pinned layer comprising a magnetic layer in which magnetization direction is pinned, and an intermediate layer provided between the magnetization free layer and the magnetization pinned layer, the intermediate layer being an oxide containing boron (B) and an element selected from the group consisting of Ca, Mg, Sr, Ba, Ti, and Sc,
wherein current is applied between the magnetization pinned layer and the magnetization free layer through the intermediate layer, so that the magnetization of the magnetization free layer is reversible, and
wherein a concentration peak of the boron in the intermediate layer is shifted to at least one of interfaces with the magnetization free layer and the magnetization pinned layer.
18. The random access memory according to claim 17 , wherein the intermediate layer is an oxide containing boron (B) and magnesium (Mg).
19. A random access memory comprising:
memory cells,
each of the memory cells including a magnetoresistive effect element comprising:
a film stack that includes a magnetization free layer comprising a magnetic layer in which magnetization direction is changeable, a magnetization pinned layer comprising a magnetic layer in which magnetization direction is pinned, and an intermediate layer provided between the magnetization free layer and the magnetization pinned layer, the intermediate layer being an oxide containing boron (B) and an element selected from the group consisting of Ca, Mg, Sr, Ba, Ti, and Sc,
wherein current is applied between the magnetization pinned layer and the magnetization free layer through the intermediate layer, so that the magnetization of the magnetization free layer is reversible, and
wherein the intermediate layer has a stacked structure comprising a first film and a second film with higher boron concentration than boron concentration in the first film.
20. The random access memory according to claim 19 , wherein the intermediate layer is an oxide containing boron (B) and magnesium (Mg).
21. A random access memory comprising:
memory cells,
each of the memory cells including a magnetoresistive effect element comprising:
a film stack that includes a magnetization free layer comprising a magnetic layer in which magnetization direction is changeable, a magnetization pinned layer comprising a magnetic layer in which magnetization direction is pinned, and an intermediate layer provided between the magnetization free layer and the magnetization pinned layer, the intermediate layer being an oxide containing boron (B) and an element selected from the group consisting of Ca, Mg, Sr, Ba, Ti, and Sc,
wherein current is applied between the magnetization pinned layer and the magnetization free layer through the intermediate layer, so that the magnetization of the magnetization free layer is reversible, and
wherein the intermediate layer has a stacked structure comprising a first film, a second film, and a third film, the second and third films sandwiching the first film and having higher boron concentration than boron concentration in the first film.
22. The random access memory according to claim 21 , wherein the intermediate layer is an oxide containing boron (B) and magnesium (Mg).
23. A magnetoresistive effect element comprising:
a film stack that includes a magnetization free layer comprising a magnetic layer in which magnetization direction is changeable, a magnetization pinned layer comprising a magnetic layer in which magnetization direction is pinned, and an intermediate layer provided between the magnetization free layer and the magnetization pinned layer, the intermediate layer being an oxide containing boron (B) and magnesium (Mg),
wherein current is applied between the magnetization pinned layer and the magnetization free layer through the intermediate layer, so that the magnetization of the magnetization free layer is reversible, and
wherein an interfacial layer containing boron (B) is formed at an interface between the intermediate layer and at least one of the magnetization free layer and the magnetization pinned layer.
24. A magnetoresistive effect element comprising:
a film stack that includes a magnetization free layer comprising a magnetic layer in which magnetization direction is changeable, a magnetization pinned layer comprising a magnetic layer in which magnetization direction is pinned, and an intermediate layer provided between the magnetization free layer and the magnetization pinned layer, the intermediate layer being an oxide containing boron (B) and magnesium (Mg),
wherein current is applied between the magnetization pinned layer and the magnetization free layer through the intermediate layer, so that the magnetization of the magnetization free layer is reversible, and
wherein oxidized boron exists in an interfacial region between the intermediate layer and at least one of the magnetization free layer and the magnetization pinned layer.
25. A random access memory comprising:
memory cells,
each of the memory cells including a magnetoresistive effect element comprising:
a film stack that includes a magnetization free layer comprising a magnetic layer in which magnetization direction is changeable, a magnetization pinned layer comprising a magnetic layer in which magnetization direction is pinned, and an intermediate layer provided between the magnetization free layer and the magnetization pinned layer, the intermediate layer being an oxide containing boron (B) and magnesium (Mg),
wherein current is applied between the magnetization pinned layer and the magnetization free layer through the intermediate layer, so that the magnetization of the magnetization free layer is reversible, and
wherein an interfacial layer containing boron (B) is formed at an interface between the intermediate layer and at least one of the magnetization free layer and the magnetization pinned layer.
26. A random access memory comprising:
memory cells,
each of the memory cells including a magnetoresistive effect element comprising:
a film stack that includes a magnetization free layer comprising a magnetic layer in which magnetization direction is changeable, a magnetization pinned layer comprising a magnetic layer in which magnetization direction is pinned, and an intermediate layer provided between the magnetization free layer and the magnetization pinned layer, the intermediate layer being an oxide containing boron (B) and magnesium (Mg),
wherein current is applied between the magnetization pinned layer and the magnetization free layer through the intermediate layer, so that the magnetization of the magnetization free layer is reversible, and
wherein oxidized boron exists in an interfacial region between the intermediate layer and at least one of the magnetization free layer and the magnetization pinned layer.