Top layers of metal for high performance IC's
View Patent ↗A method of closely interconnecting integrated circuits contained within a semiconductor wafer to electrical circuits surrounding the semiconductor wafer. Electrical interconnects are held to a minimum in length by making efficient use of polyimide or polymer as an inter-metal dielectric thus enabling the integration of very small integrated circuits within a larger circuit environment at a minimum cost in electrical circuit performance.
1. A method for fabricating an integrated circuit chip comprising:
providing a silicon substrate, multiple devices in and on said silicon substrate, wherein said multiple devices comprise a transistor, a first dielectric layer over said silicon substrate, a first metallization structure over said first dielectric layer, wherein said first metallization structure comprises aluminum, and wherein said first metallization structure comprises a first metal layer and a second metal layer over said first metal layer, a second dielectric layer between said first and second metal layers, a passivation layer over said first metallization structure and over said first and second dielectric layers, wherein said passivation layer comprises a topmost nitride layer of said integrated circuit chip and a topmost oxide layer of said integrated circuit chip, and a polymer layer over said passivation layer, a first opening in said passivation layer and in said polymer layer exposing a first pad of said first metallization structure, and a second opening in said passivation layer and in said polymer layer exposing a second pad of said first metallization structure, wherein said first and second pads are separate from each other by insulating material, wherein said first and second pads are provided by a topmost metal layer under said passivation layer, and wherein said polymer layer has a thickness between 2 micrometers and 30 micrometers and greater than those of said passivation layer and said first and second dielectric layers; and
forming a second metallization structure over said polymer layer and over said first and second pads, wherein a signal goes up from said first pad, through said first opening, continues over a distance in a direction of a horizontal plane of said second metallization structure, and descends from said second metallization structure down to said second pad by passing through said second opening, wherein said second metallization structure comprises a third metal layer having a thickness greater than those of said first and second metal layers, and wherein said forming said second metallization structure comprises a copper electroplating process.
2. The method of claim 1 , wherein said polymer layer is formed by a process comprising coating and curing.
3. The method of claim 1 , wherein said polymer layer is formed by a process comprising forming a photosensitive polyimide layer on said passivation layer.
4. The method of claim 1 , wherein said forming said second metallization structure further comprises a nickel forming process.
5. The method of claim 1 , wherein said forming said second metallization structure further comprises a sputtering process.
6. The method of claim 1 , wherein said forming said second metallization structure comprises an electroless plating process.
7. A method for fabricating an integrated circuit chip comprising:
providing a silicon substrate, multiple devices in and on said silicon substrate, wherein said multiple devices comprise a transistor, a first dielectric layer over said silicon substrate, a first metallization structure over said first dielectric layer, wherein said first metallization structure comprises aluminum, and wherein said first metallization structure comprises a first metal layer and a second metal layer over said first metal layer; a second dielectric layer between said first and second metal layers, and a passivation layer over said first metallization structure and over said first and second dielectric layers, wherein said passivation layer comprises a topmost nitride layer of said integrated circuit chip and a topmost oxide layer of said integrated circuit chip;
forming a polymer layer over said passivation layer, wherein said polymer layer has a thickness between 2 micrometers and 30 micrometers and greater than those of said passivation layer and said first and second dielectric layers;
forming a first opening in said polymer layer and in said passivation layer to expose a first pad of said first metallization structure and a second opening in said polymer layer and in said passivation layer to expose a second pad of said first metallization structure, wherein said first and second pads are separate from each other by an insulating material, and wherein said first and second pads are provided by a topmost metal layer under said passivation layer; and
forming a second metallization structure over said polymer layer, over said first and second pads and in said first and second openings, wherein a signal goes up from said first pad, through said first opening, continues over a distance in a direction of a horizontal plane of said second metallization structure, and descends from said second metallization structure down to said second pad by passing through said second opening, wherein said second metallization structure comprises a third metal layer having a thickness greater than those of said first and second metal layers, and wherein said forming said second metallization structure comprises a copper electroplating process.
8. The method of claim 7 , wherein said forming said polymer layer comprises coating and curing.
9. The method of claim 7 , wherein said forming said polymer layer comprises forming a photosensitive polyimide layer on said passivation layer.
10. The method of claim 7 , wherein said forming said second metallization structure further comprises a nickel forming process.
11. The method of claim 7 , wherein said forming said second metallization structure further comprises an aluminum forming process.
12. The method of claim 7 , wherein said forming said second metallization structure further comprises a sputtering process.
13. The method of claim 7 , wherein said forming said second metallization structure comprises an electroless plating process.
14. A method for fabricating an integrated circuit chip comprising:
providing a silicon substrate, multiple devices in and on said silicon substrate, wherein said multiple devices comprise a transistor, a first dielectric layer over said silicon substrate, a first metallization structure over said first dielectric layer, wherein said first metallization structure comprises aluminum, and wherein said first metallization structure comprises a first metal layer and a second metal layer over said first metal layer, a second dielectric layer between said first and second metal layers, a passivation layer over said first metallization structure and over said first and second dielectric layers, wherein said passivation layer comprises an oxide layer and a nitride layer over said oxide layer, and a polymer layer over said passivation layer, a first opening in said passivation layer and in said polymer layer exposing a first pad of said first metallization structure, and a second opening in said passivation layer and in said polymer layer exposing a second pad of said first metallization structure, wherein said first and second pads are separate from each other by an insulating material, wherein said first and second pads are provided by a topmost metal layer under said passivation layer, and wherein said polymer layer has a thickness between 2 micrometers and 30 micrometers and greater than those of said passivation layer and said first and second dielectric layers; and
forming a second metallization structure over said polymer layer and over said first and second pads, wherein a signal goes up from said first pad, though said first opening, continues over a distance in a direction of a horizontal plane of said second metallization structure, and descends from said second metallization structure down to said second pad by passing trough said second opening, wherein said second metallization structure comprises a third metal layer having a thickness greater than those of said first and second metal layers, and wherein said forming said second metallization structure comprises a copper electroplating process.
15. The method of claim 14 , wherein said polymer layer is formed by a process comprising coating and curing.
16. The method of claim 14 , wherein said polymer layer is formed by a process comprising forming a photosensitive polyimide layer on said passivation layer.
17. The method of claim 14 , wherein said forming said second metallization structure further comprises a nickel forming process.
18. The method of claim 14 , wherein said forming said second metallization structure further comprises an aluminum forming process.
19. The method of claim 14 , wherein said forming said second metallization structure further comprises a sputtering process.
20. The method of claim 14 , wherein said forming said second metallization structure further comprises an electroless plating process.