Semiconductor apparatus
View Patent ↗A semiconductor apparatus includes a semiconductor device formed to a first surface of a semiconductor substrate, a blocking film provided in a first via-hole, the first via-hole formed with a concave shape to the first surface of the semiconductor substrate, a first via line connected to an electrode of the semiconductor device in contact with the blocking film, a second via line formed inside a second via-hole, electrically connected with the first via line with the blocking film interposed therebetween and being apart of a wiring formed to a second surface, the second via-hole formed with a concave shape to the second surface opposing the first surface of the semiconductor substrate so as to reach the blocking film. The blocking film includes at least one kind of group 8 element.
1. A semiconductor apparatus comprising:
a semiconductor device formed to a first surface of a semiconductor substrate;
a blocking film provided in a first via-hole, the first via-hole formed with a concave shape to the first surface of the semiconductor substrate;
a first via line, in contact with the blocking film, that is connected to an electrode of the semiconductor device in contact with the blocking film;
a second via line formed inside a second via-hole, electrically connected with the first via line with the blocking film interposed therebetween and being a part of a wiring formed to a second surface, the second via-hole formed with a concave shape to the second surface opposing the first surface of the semiconductor substrate so as to reach the blocking film,
wherein the blocking film includes at least one kind of group 8 element and is formed as being projected to the second via-hole.
2. The semiconductor apparatus according to claim 1 , wherein the semiconductor substrate is Si, GaAs, InP, GaN or SiC.
3. The semiconductor apparatus according to claim 1 , wherein the blocking film includes at least one kind of group 8 element; iron (Fe), cobalt (Co), nickel (Ni), ruthenium (Ru), rhodium (Rh), palladium (Pd), osmium (Os), iridium (Ir) and platinum (Pt).
4. The semiconductor apparatus according to claim 1 , wherein one of the first via line is in contact with one of the second via line.
5. The semiconductor apparatus according to claim 1 , wherein a plurality of the first via lines are in contact with one of the second via line.
6. The semiconductor apparatus according to claim 1 , wherein the second via line is provided to a lower part of the semiconductor device formed to the first surface.
7. The semiconductor apparatus according to claim 1 , wherein the second via line is provided to have a sloped sidewall to the lower part of the semiconductor device formed to the first surface.
8. The semiconductor apparatus according to claim 1 , wherein the first and the second via lines are metal, metal alloy or resin with diffused conductive particles.
9. The semiconductor apparatus according to claim 1 , wherein the wiring formed to the second surface is formed to an entire surface of the second surface.
10. The semiconductor apparatus according to claim 1 , wherein the wiring formed to the second surface is a plurality of the second via lines disposed separately.
11. The semiconductor apparatus according to claim 1 , wherein the first and the second via lines are in contact with each other, the semiconductor substrate and an insulating layer interposed therebetween.
12. The semiconductor apparatus according to claim 1 , wherein the semiconductor device is a field-effect transistor or a bipolar transistor.
13. The semiconductor apparatus according to claim 1 , wherein the blocking film is formed along a shape of a sidewall and a bottom of the first via-hole.
14. The semiconductor apparatus according to claim 1 , wherein the second via line includes a Ti layer as an adhesive film and an Au layer as a conductive film in order from a side of the first via line.