Method of producing multi-wavelength semiconductor laser device

1. A method for producing a multi-wavelength semiconductor laser device, comprising the steps of:

preparing a substrate for growth of a nitride single crystal thereon;

sequentially growing a first conductivity-type first clad layer, a first active layer and a second conductivity-type first clad layer on the substrate, to form a first nitride epitaxial layer;

selectively removing the first nitride epitaxial layer such that a portion of the substrate is exposed;

sequentially growing a first conductivity-type second clad layer, a second active layer and a second conductivity-type second clad layer on the exposed portion of the substrate, to form a second nitride epitaxial layer;

separating the first and second nitride epitaxial layers from the substrate;

attaching the separated first and second nitride epitaxial layers to a first conductivity type substrate;

selectively etching the first and second nitride semiconductor epitaxial layers to expose a portion of the first conductivity-type substrate and to form first and second semiconductor laser structures from the first and second nitride epitaxial layers, respectively, the first and second semiconductor laser structures being separated from each other;

sequentially growing a first conductivity-type third clad layer, a third active layer and a second conductivity-type third clad layer on the exposed portion of the first conductivity-type substrate, to form a third semiconductor laser structure; and

forming a first electrode connected to a bottom surface of the first conductivity-type substrate and forming second electrodes connected to the respective second conductivity-type clad layers of the first, second and third semiconductor laser structures.

2. The method according to claim 1 , further comprising the steps of: selectively etching the respective second conductivity-type clad layers of the first, second and third semiconductor laser structures, after the formation of the third semiconductor laser structure and before the formation of the first electrode and the second electrodes, to form ridge-shaped layers; and forming an insulating layer on top surfaces of the second conductivity-type clad layers except for top ends of the ridge-layers,

wherein the second electrodes are connected to the respective second conductivity-type clad layers through the respective top ends of the ridge-shaped layers.

3. The method according to claim 2 , wherein the insulating layer is formed in such a manner that it is extended to side faces of the first, second and third semiconductor laser structures.

4. The method according to claim 2 , wherein the insulating layer is formed of SiO2 or SiN4.

5. The method according to claim 1 , wherein the separation of the first and second nitride epitaxial layers from the substrate is performed by irradiating the bottom surface of the substrate with laser light to lift-off the first and second nitride epitaxial layers.

6. The method according to claim 5 , wherein the step of separating the first and second nitride epitaxial layers comprises the sub-step of lapping the bottom surface of the substrate, before the laser irradiation, to decrease the thickness of the substrate.

7. The method according to claim 1 , wherein the attachment of the first and second nitride epitaxial layers to the first conductivity-type substrate is performed by pressuring the first and second nitride epitaxial layers on a top surface of the first conductivity-type substrate at high temperature.

8. The method according to claim 1 , wherein the etching of the first nitride semiconductor layer leaves an epitaxial layer for the first semiconductor laser structure.

9. The method according to claim 1 , wherein the step of forming the third semiconductor laser structure comprises the sub-steps of:

sequentially growing the first conductivity-type third clad layer, the third active layer and the second conductivity-type third clad layer on the top surface of the first conductivity-type substrate on which the first and second semiconductor laser structures are formed, to form an epitaxial layer for the third semiconductor laser structure; and

selectively etching the epitaxial layer for the third semiconductor laser structure, to form the third semiconductor laser structure from the first and second semiconductor laser structures on a portion of the first conductivity-type substrate.

10. The method according to claim 1 , wherein the first, second and third semiconductor laser structures are formed in this order from one side of the first conductivity-type substrate.

11. The method according to claim 1 , wherein the substrate for growth of a nitride single crystal is a sapphire, SiC, or GaN substrate.

12. The method according to claim 1 , wherein the first nitride epitaxial layer is formed of a GaN-based semiconductor material for a semiconductor laser structure oscillating blue light, and the second nitride epitaxial layer is formed of a GaN-based semiconductor material for a semiconductor laser structure oscillating green light.

13. The method according to claim 1 , wherein the third semiconductor laser structure is formed from an epitaxial layer made of an AlGaInP-based semiconductor material.