Silicon carbide semiconductor device and method for manufacturing the same
View Patent ↗A SiC semiconductor substrate is disclosed which includes a SiC single crystal substrate, a nitrogen (N)-doped n-type SiC epitaxial layer in which nitrogen (N) is doped and a phosphorus (P)-doped n-type SiC epitaxial layer in which phosphorus (P) is doped. The nitrogen (N)-doped n-type SiC epitaxial layer and the phosphorus (P)-doped n-type SiC epitaxial layer are laminated on the silicon carbide single crystal substrate sequentially. The nitrogen (N)-doped n-type SiC epitaxial layer and the phosphorus (P)-doped n-type SiC epitaxial layer are formed by using two or more different dopants, for example, nitrogen and phosphorus, at the time of epitaxial growth. Basal plane dislocations in a SiC device can be reduced.
1. A method for manufacturing a silicon carbide semiconductor device comprising:
alternating laminating a plurality of first and second silicon carbide epitaxial layers sequentially on a first conductivity type silicon carbide substrate,
wherein each of the plurality of first and second silicon carbide epitaxial layers is of the first conductivity type,
the plurality of first silicon carbide epitaxial layer of the first conductivity type consists of a first type of impurity dopants,
the plurality of second silicon carbide epitaxial layer of the first conductivity type consists of a second type of impurity dopants,
the plurality of first and second silicon carbide epitaxial layers are formed with mutually exclusive types of impurity dopants such that the first silicon carbide epitaxial layer does not contain the type of impurity dopants used in the adjacent second silicon carbide epitaxial layer and the second silicon carbide epitaxial layer does not contain the type of impurity dopant used in the adjacent first silicon carbide epitaxial layer; and
wherein the impurity concentrations between an adjacent pair of first and second silicon carbide epitaxial layers are different from each other.
2. The method for manufacturing the silicon carbide semiconductor device according to claim 1 , wherein each silicon carbide epitaxial layer is a silicon carbide epitaxial layer of an n-type, wherein the first epitaxial layer uses nitrogen as the impurity dopant and the second epitaxial layer which is adjacent to the first epitaxial layer uses phosphorus as the impurity dopant.
3. The method for manufacturing the silicon carbide semiconductor device according to claim 1 , wherein each silicon carbide epitaxial layer is a silicon carbide epitaxial layer of a p-type, and at least two of boron, aluminum, and indium are used as the impurities when the first silicon carbide epitaxial layer is formed.
4. The method for manufacturing the silicon carbide semiconductor device according to claim 1 , wherein the first epitaxial layer uses nitrogen as the impurity dopant and the second epitaxial layer which is adjacent to the first epitaxial layer uses phosphorus as the impurity dopant.
5. A silicon carbide semiconductor device comprising:
a silicon carbide substrate of a first conductivity type;
a plurality of first silicon carbide epitaxial layers and a plurality of second silicon carbide epitaxial layers alternately laminated on the silicon carbide substrateM
wherein each of the plurality of first and second silicon carbide epitaxial layers is of the first conductivity type,
the plurality of first silicon carbide epitaxial layer of the first conductivity type consists of a first type of impurity dopants,
the plurality of second silicon carbide epitaxial layer of the first conductivity type consists of a second type of impurity dopants,
the plurality of first and second silicon carbide epitaxial layers are formed with mutually exclusive types of impurity dopants such that the first silicon carbide epitaxial layer does not contain the type of impurity dopants used in the adjacent second silicon carbide epitaxial layer and the second silicon carbide epitaxial layer does not contain the type of impurity dopant used in the adjacent first silicon carbide epitaxial layer; and
wherein the impurity concentrations between an adjacent pair of first and second silicon carbide epitaxial layers are different from each other.
6. The silicon carbide semiconductor device according to claim 5 , wherein the first silicon carbide epitaxial layers are p-type silicon carbide epitaxial layers in which at least two of boron, aluminum, and indium are doped as impurity dopants.
7. The silicon carbide semiconductor device according to claim 5 , wherein the silicon carbide substrate is doped with a p-type or an n-type impurity dopant and the concentration of the impurity dopant in said silicon carbide substrate is different from the concentration of the impurity dopant in each of said epitaxial layers.
8. The silicon carbide semiconductor device according to claim 5 , wherein the silicon carbide substrate is doped with a p-type or an n-type impurity, and at least one of the silicon carbide epitaxial layers is doped with a different impurity dopant from the impurity dopant introduced into the silicon carbide substrate.